基于双端固定音叉的润滑剂微黏着力测量系统
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摘要
针对普通石英音叉测力时,其开放端耦合探针导致品质因数(Q值)降低的问题,设计一种基于双端固定石英音叉的微力测量系统,用于润滑剂微黏着力测量。该系统将双端固定石英音叉固定端与一光纤探针耦合,形成对称结构,采用宽度弯曲振动模式,以计算机控制压电微动实验台负载被检测样品接近或远离光纤探针,并实时监测石英音叉振动的幅值和相位变化,以AD630芯片为核心设计锁相放大器比较传感器输入与输出信号的幅值和相位差,进而反演润滑剂的竖直方向黏着力。实验结果表明探针耦合前后,系统均具有较高Q值,且装置结构简单,易于扩展。
Aiming at the problem of quality factor reduction was caused by the open end coupling probe when measuring the force of ordinary quartz tuning fork,a new kind of quartz double-ended fixation tuning fort based force measuring system was designed for lubricant adhesion measurement. An optical fiber probe was adhered to the end of the quartz double-ended tuning fork to form a symmetric structure,the quartz double-ended tuning fork oscillated in width bending vibration mode,and the vibration amplitude and phase changes of the quartz tuning fork were detected in real-time,when a piezo stage with the sample lubricant keeping close to or far away from the optical fiber probe. The amplitude and phase shifts of input and output signals of the quartz tuning fort were compared with the AD630 chip based lock-in amplifier,and then the vertical adhesive force of lubricant is reversed. The results show that the system has the high Q factor,simple structure and is easy to expand.
Aiming at the problem of quality factor reduction was caused by the open end coupling probe when measuring the force of ordinary quartz tuning fork,a new kind of quartz double-ended fixation tuning fort based force measuring system was designed for lubricant adhesion measurement. An optical fiber probe was adhered to the end of the quartz double-ended tuning fork to form a symmetric structure,the quartz double-ended tuning fork oscillated in width bending vibration mode,and the vibration amplitude and phase changes of the quartz tuning fork were detected in real-time,when a piezo stage with the sample lubricant keeping close to or far away from the optical fiber probe. The amplitude and phase shifts of input and output signals of the quartz tuning fort were compared with the AD630 chip based lock-in amplifier,and then the vertical adhesive force of lubricant is reversed. The results show that the system has the high Q factor,simple structure and is easy to expand.
引文
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[2]张瀚,金小锋,邹江波.一种新型固支结构石英音叉陀螺的设计[J].仪表技术与传感器,2009(S1):313-315.
[3]黄强先,史科迪,陈晨.基于视觉引导的3D纳米测头[J].仪表技术与传感器,2015(11):11-14.
[4]王毛翠.基于石英音叉测头的三维纳米测量与定位实验研究[D].合肥:合肥工业大学,2012.
[5]岳书彬,孙秀英,秦自楷,等.双端石英音叉力敏传感器的原理与设计[J].山东大学学报(自然科学版),2000,35(3):282-288.
[6]曾婕.磁性薄膜/石英音叉复合磁传感器研究[D].重庆:重庆大学,2009.
[7] FUKUZAWA K,YAMAUCHI Y,NAITO Y,et al. A new method for measuring normal forces with accurate gap control using a microfabricated quartz resonator for lubrication at nanometer Gaps[J]. Tribol Lett,2011,43:121-128.
[8]刘芳芳.基于AD630的锁相放大器的设计与分析[D].哈尔滨:哈尔滨理工大学,2016.
[9]姚欣.激光多普勒振动检测技术的研究[D].天津:天津大学,2004.
[10]刘卿卿,严飞,郭颖.基于改进椭圆偏振显微镜的纳米润滑薄膜动态观测[J].光学学报,2017,37(8):0812003.