FTIR测量的量子型光电探测器响应光谱校正
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摘要
针对采用FTIR方法测量量子型光电探测器的光电流谱并据此校正获得器件的实际响应光谱问题,提出了两种简便可行的校正方案,即计算仪器函数校正方案和标准探测器传递校正方案;对其可行性、限制因素及注意事项进行了详细讨论.用两种方案对多种短波红外InGaAs光电探测器进行了测量校正,获得了与实际符合的响应光谱.为验证方案的适用性,还与采用经精确标定的光栅分光测量系统测得的结果进行了比对,确认了其适用性.结果表明,采用FTIR测量方法并结合适当的校正方案可以获得符合实际的响应光谱.
To get actual response spectra of quantum type photodetectors from measured photo-current spectra using FTIR method,two feasible and convenient correction schemes of calculated instrument function scheme and standard detector transfer scheme are proposed. The feasibility,limitations and matters which need attention are discussed in detail. Based on those schemes,consistent response spectra of various shortwave infrared InGaAs photodetectors have been gained. A comparison has been made to the response spectrum measured using a precisely calibrated grating monochromator system and the validity of the schemes is confirmed.
To get actual response spectra of quantum type photodetectors from measured photo-current spectra using FTIR method,two feasible and convenient correction schemes of calculated instrument function scheme and standard detector transfer scheme are proposed. The feasibility,limitations and matters which need attention are discussed in detail. Based on those schemes,consistent response spectra of various shortwave infrared InGaAs photodetectors have been gained. A comparison has been made to the response spectrum measured using a precisely calibrated grating monochromator system and the validity of the schemes is confirmed.
引文
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[2]Zhang Y G.Emission spectroscopy in the mid-infrared using FTIR spectrometry,chapter 26 in the wonder of nanotechnol-ogy:Quantum optoelectronic devices and applications[M].Bellingham,WA,SPIE Press,2013:673.
[3]YE Zhen-Hua,ZHOU Wen-Hong,HU Wei-Da,et al.Spectral study on response of HgCdTe IR two-color detector arrays[J].Infrared Millim.Waves(叶振华,周文洪,胡伟达,等.碲镉汞红外双色探测器响应光谱研究,红外与毫米波学报)2009,28(1):4-7.
[4]HE Xiang-Rong,ZHANG Ya-Ni,WANG Yang.Measurement of response spectral characteristics for long wavelength broad-band(6.2-15?m)infrared detectors[J].Optics&Optoelectronic Technol(贺香荣,张亚妮,汪洋.甚长波宽波段(6.4-15?m)红外探测器响应光谱特性的测量,光学与光电技术)2014,12(2):79-82.
[5]CHEN Yu,HE Xiang-Rong,SHAO Xiu-Mei,et al.Measurement system of relative spectral response for SWIR FPA based on LabVIEW[J].Optics&Optoelectronic Technol(陈郁,贺香荣,邵秀梅,等.基于LabVIEW的短波红外焦平面相对响应光谱测试系统,光学与光电技术)2013,11(6):25-28.
[6]http://www.bruker.com/nc/service/support-upgrades/software-downloads/infrared-and-raman-spectroscopy-softwaredownload.html?cid=13999&did=50363&sechash=d949e96a
[7]ZHANG Yong-Gang,GU Yi,ZHU Cheng,et al.Fabrication of shortwave infrared InGaAs/InP photovoltaic detector series[J].Infrared Millim.Waves(张永刚,顾溢,朱诚,等.短波红外InGaAs/InP光伏探测器系列的研制,红外与毫米波学报)2006,25(1):6-9.
[8]Zhang Y G,Gu Y,Tian Z B,et al.Wavelength extended2.4 mm heterojunction InGaAs photodiodes with InAlAs cap and linearly graded buffer layers suitable for both front and back illuminations[J].Infrared Physics&Technology,2008,51(2):316-321.
[9]Zhang Y G,Gu Y,Tian Z B,et al.Wavelength extended InGaAs/InAlAs/InP photodetectors using n-on-p configuration optimized for back illumination[J].Infrared Physics&Technology,2009,52(1):52-56.