反应等离子喷涂TiCN涂层显微结构与性能研究
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摘要
利用反应等离子喷涂制备了TiCN涂层,并采用扫描电镜、X–射线衍射仪和X–射线光谱分析了涂层的显微结构,采用显微硬度计、万能试验机和环–块式摩擦磨损试验机测定了涂层的机械性能和摩擦磨损性能。结果表明:涂层主相为TiC_(0.7)N_(0.3)和TiN,同时存在少量不定性石墨相和CN_x相。由于大气喷涂的氧化,形成少量Ti_2O。涂层为典型热喷涂铺展形貌,涂层与基体具有良好的结合性。TiCN涂层的显微硬度均在1000HV_(0.2)以上,远高于基体和黏结层硬度。由于涂层H~3/E~2大于0.1,具有较强抵抗塑性变形能力和耐磨性。
The TiCN coating were successfully fabricated by reactive plasma spraying. The microstructure of coating was characterized by scanning electron micrograph(SEM), X-ray diffraction(XRD) and X-ray photoelectron spectroscopy(XPS). The mechanical and tribological properties of coatings were evaluated by Vickers microhardness tests, nanoindentation tester and block-on-ring tribometer. Results showed that the main phases are TiC_(0.7)N_(0.3) and TiN with some amount of amorphous graphite and CN_x phase. There are some Ti_2O due to the plasm spraying carried out in atmosphere. The coating exhibits typical thermal spray spreading out morphology and a good bonding status between the coating and substrate was obtained. The microhardness value of coating still exceeds 1000HV_(0.2), which is higher than that of substrate and bond coat. Due to the H~3/E~2 of coating is greater than 0.1, it indicated that TiCN coating possessed a high resistance of plastic deformation and excellent wear resistance.
The TiCN coating were successfully fabricated by reactive plasma spraying. The microstructure of coating was characterized by scanning electron micrograph(SEM), X-ray diffraction(XRD) and X-ray photoelectron spectroscopy(XPS). The mechanical and tribological properties of coatings were evaluated by Vickers microhardness tests, nanoindentation tester and block-on-ring tribometer. Results showed that the main phases are TiC_(0.7)N_(0.3) and TiN with some amount of amorphous graphite and CN_x phase. There are some Ti_2O due to the plasm spraying carried out in atmosphere. The coating exhibits typical thermal spray spreading out morphology and a good bonding status between the coating and substrate was obtained. The microhardness value of coating still exceeds 1000HV_(0.2), which is higher than that of substrate and bond coat. Due to the H~3/E~2 of coating is greater than 0.1, it indicated that TiCN coating possessed a high resistance of plastic deformation and excellent wear resistance.
引文
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[2]朱丽慧,张雨萌,彭笑,等.Ti C0.81N0.48和Ti C0.61N0.44O0.15涂层的热稳定性能[J].材料研究学报,2013,27(3):312-316.ZHU Lihui,ZHANG Yumeng,PEN GXiao,et al.Thermal stability of Ti C0.81N0.48 and Ti C0.61N0.44O0.15 coatings[J].Chinese Journal of Material Research,2013,27(3):312-316.
[3]OYAMA S T.The chemistry of transition metal carbides and nitrides[M].New York:Springer,1996.
[4]刘野.电弧等离子镀与磁控溅射复合制备Ti CN涂层的研究[D].天津:天津师范大学,2013.LIU Ye.Deposition of arc ion plated and magnetron sputtere TICN coatings with pulsed bias[D].Tianjin:Tianjin Normal University,2013.
[5]PENG Y,MIAO H Z,PENG Z J.Development of Ti CN-based cermets:mechanical properties and wear mechanism[J].International Journal Refractory Metal Hard Materials,2013,39(7):78-89.
[6]BULL S J,BHAT D G,STAIA M H.Properties and performance of commercial Ti CNcoatings.Part 1:coating architecture and hardness modelling[J].Surface&Coatings Technology,2003,163-164(2):499-506.
[7]BULL S J,BHAT D G,STAIA M H.Properties and performance of commercial Ti CNcoatings.Part 2:tribological performance[J].Surface&Coatings Technology,2003,163(2):507-514.
[8]许俊华,曹峻,喻利花.磁控溅射制备Ti CN复合膜的微结构与性能[J].中国有色金属学报,2012,22(11):3123-3128.XU Junhua,CAO Jun,YU Lihua.Microstructure and properties of TiCNcompoite film spreparred by magnetron sputtering[J].The Chinese Journal of Nonferrous Metals,2012,22(11):3123-3128.
[9]SHAN L,WANG Y,LI J,et al.Tribological behaviours of PVD Ti N and Ti CN coatings in artificial seawater[J].Surface&Coatings Technology,2013,226(14):40-50.
[10]ZOU B,WAN GY,X U J,e t a l.Mechanism in reactive plasma spraying synthesis of Ti C-Ti B2 composite coating[J].Journal of Asian Ceramic Societies,2013,1(4):322-327.
[11]LIN Z,HE J,YAN D,et al.Synthesis and microstructure observation of titanium carbonitride nanostructured coatings using reactive plasma spraying in atmosphere[J].Applied Surface Science,2011,257(20):8722-8727.
[12]SHAHIEN M,YAMADAM,FUKUMOTO M.Challenges upon reactive plasma spray nitriding:Al powders and fabrication of Al N coatings as a case study[J].Journal of Thermal Spray Technology,2016,25(5):1-23.
[13]YANG Y,CHEN X G,WANG L,et al.Sliding wear behavior of in-situ Fe Al2O4 matrix nanocomposite coating fabricated by plasma spraying[J].Tribology International,2015,81:97-104.
[14]LI J,ZHANG S,LI M.Influence of the C2H2 flow rate on gradient Ti CN films deposited by multi-arc ion plating[J].Applied Surface Science,2013,283(14):134-144.
[15]WANG Y,LI J,DANG C,et al.Influence of carbon contents on the structure and tribocorrosion properties of Ti Si CN coatings on Ti6Al4V[J].Tribology International,2017,109:285-296.
[16]CHEN R,TU J P,LIU D G,et al.Microstructure,mechanical and tribological properties of Ti CN nanocomposite films deposited by DC magnetron sputtering[J].Surface&Coatings Technology,2011,205(21):5228-5234.
[17]ZHOU F,ADACHI K,KATO K.Friction and wear property of a-CNx coatings sliding against ceramic and steelballs in water[J].Diamond&Related Materials,2005,14(10):1711-1720.
[18]辛煜,范叔平,甘肇强,等.多弧法沉积Ti(C,N)膜中的CN相[J].功能材料,1997,28(6):612-614.XIN Yu,FAN Shuping,GAN Zhaoqiang,et al.Studies on Ti(C,N)films deposited by multi-arc method[J].1997,28(6):612-614.
[19]AJIKUMAR P K,KAMRUDDIN M,RAVINDRAN T R,et al.Oxidation behavior of Ti C x N1-x,coatings as a function of C/N ratio[J].Ceramics International,2014,40(7):10523-10529.
[20]XU S,MUNROE P,XU J,et al.The microstructure and mechanical properties of tantalum nitride coatings deposited by a plasma assisted bias sputtering deposition process[J].Surface&Coatings Technology,2016,307:470-475.
[21]WAN H,YE Y,LEI C,et al.Influence of polyfluo-wax on the friction and wear behavior of polyimide/epoxy resin-molybdenum disulfide bonded solid lubricant coating[J].Tribology Transactions,2015,59(5):889-895.