硬质合金刀具涂层的研究进展
|
摘要
随着科学技术的飞速发展,用于机械加工、矿山采掘的硬质合金刀具在不断的更新,刀具涂层技术也在日趋多样化和复杂化,对生产工艺的要求也随之提高.文中介绍了硬质合金刀具涂层的2种主要制备方法即化学气相沉积法(CVD)和物理气相沉积法(PVD),简述了刀具涂层即单组分涂层、多组分涂层、多层涂层和梯度涂层的发展,概括了几种新型涂层即金刚石涂层、类金刚石涂层、立方氮化硼涂层和氮化碳涂层,对未来硬质合金刀具涂层的发展方向进行了展望.
With the rapid development of science and technology, cemented carbide tools used in mechanical processing and mining are developing constantly. Therefore, the technology of tool coating is becoming more and more diversified and complex, and the requirements for production process are also increasing. In this paper, two main preparation methods of cemented carbide tool coatings, chemical vapor deposition(CVD) and physical vapor deposition(PVD), were introduced. The development of tool coatings in recent years, including single component coatings, multi-component coatings, multi-layer coatings and gradient coatings, was briefly described. Several new coatings popular at present were summarized: diamond coatings, diamond-like carbon coatings, cubic boron nitride coatings and carbon nitride coatings. Finally, the development direction of cemented carbide tool coatings in the future was presented.
With the rapid development of science and technology, cemented carbide tools used in mechanical processing and mining are developing constantly. Therefore, the technology of tool coating is becoming more and more diversified and complex, and the requirements for production process are also increasing. In this paper, two main preparation methods of cemented carbide tool coatings, chemical vapor deposition(CVD) and physical vapor deposition(PVD), were introduced. The development of tool coatings in recent years, including single component coatings, multi-component coatings, multi-layer coatings and gradient coatings, was briefly described. Several new coatings popular at present were summarized: diamond coatings, diamond-like carbon coatings, cubic boron nitride coatings and carbon nitride coatings. Finally, the development direction of cemented carbide tool coatings in the future was presented.
引文
[1]李彤,刘艳明,王晨,等.硬质涂层的研究热点及面临问题[J].真空科学与技术学报,2018,38(9):755-763.
[2]CH S K,SAROJ K P.Experimental and numerical investigations on the effect of varying AlTiN coating thickness on hard machining performance of Al2O3-TiCN mixed ceramic inserts[J].Surface&Coatings Technology,2017,309:266-281.
[3]钟厉,龙永杰,韩西.刀具表面磁控溅射CrN涂层及其耐磨性能研究[J].表面技术,2018,47(10):151-156.
[4]郭杰,徐看,刘利国,等.刀具涂层技术现状与发展趋势[J].工具技术,2014,48(3):3-7.
[5]胡鹏飞,张华.刀具硬质涂层的发展现状及展望[J].工具技术,2009,43(11):29-33.
[6]安立宝.激光表面处理技术及其进展[J].航空制造技术,1995(4):19-21.
[7]贺春林,高建君,王苓飞,等.基体温度对反应共溅射TiN/Ni纳米复合膜结构和耐蚀性的影响[J].中国表面工程,2018,31(2):85-93.
[8]张锋刚,王永善,宋佩维.硬质合金表面改性研究现状与展望[J].陕西理工大学学报(自然科学版),2015(3):8-13.
[9]KNOTEK O,BOHMER M,LEYENDECKER T.On structure and properties of sputtered Ti and Al based hard compound films[J].J.Vac.Sci.Technol.A;(United States),1986,4:6(6):2695-2700.
[10]刘建华,邓建新,张庆余.TiAlN涂层刀具的发展与应用[J].工具技术,2006,40(4):9-13.
[11]杨小璠,李友生,李凌祥,等.CVD金刚石涂层工艺对硬质合金立铣刀铣削CFRP性能的影响[J].金刚石与磨料磨具工程,2018,38(2):37-41.
[12]李晓亮,阎殿然,何继宁,等.反应等离子喷涂TiN/AlN涂层的性能研究[J].新技术新工艺,2006(3):85-86.
[13]刘海浪,羊建高,黄如愿.硬质合金涂层刀具研究进展[J].凿岩机械气动工具,2009(2):52-59.
[14]张钦英,陈颢,任兴润,等.A1靶溅射功率对CrAIN涂层组织结构及摩擦性能的影响[J].有色金属科学与工程,2017,8(5):109-114.
[15]丁旭丽.类金刚石薄膜的制备及光学性质研究[D].曲阜:曲阜师范大学,2009.
[16]COHEN M L.Structural,electronic and optical properties of carbon nitride[J].Materials Science&Engineering A,2004,209(11):119-204.
[17]丁志,杨海东,张崇高.C3N4涂层刀具在切削淬火钢和硅铝合金中的应用[J].工具技术,2006,40(10):19-21.
[18]黄健.基于自支撑金刚石薄膜的晶体管和紫外探测器制备与性能研究[D].上海:上海大学,2010.
[19]吕毅军,高玉琳,郑健生,等.Direct observation of NN pairs transfer in GaP1-xNx(x=0.12%)[J].中国物理快报:英文版,2005,22(11):2957-2959.
[20]应显军,涂小龙,刘钢,等.PVD涂层硬质合金刀具加工2Cr13性能对比试验研究[J].工具技术,2015,49(6):12-17.
[21]UDDIN M S,PHAM B,SARHAN A.Comparative study between wear of uncoated and TiAlN-coated carbide tools in milling of Ti6Al4V[J].Advances in Manu facturing,2017,5(1):83-91.
[22]万熠,刘战强,赵军,等.先进切削刀具及未来趋势[J].航空制造技术,2014(12):40-43.
[23]郑亚军.Ti(Cr,Al)SiC(O)N涂层及其表面改性硬质合金刀具性能研究[D].西南交通大学,2013.
[24]郑艳彬,姜志刚.DLC膜涂层硬质合金刀具的研究进展[J].硬质合金,2012,29(2):116-122.
[25]陈勇志,占志泽,曾铁初.硬质合金涂层技术及其进展[J].东莞理工学院报,2012,19(3):94-98.
[26]颜培.ZrTiN梯度涂层刀具的制备及性能研究[D].济南:山东大学,2012.
[27]尹福兰,丁国富,杨大治,等.深冷处理对涂层硬质合金刀具耐磨性的影响[J].金属热处理,2018,43(9):98-102.
[28]邵泽宽.涂层刀具的现状研究[J].有色金属科学与工程,2017,8(6):57-64.
[29]王国珍,侯俊,丁荣乐,等.切削刀具表面涂层及耐磨性能研究[J].铸造技术,2017,38(12):2862-2864.
[30]吴贤,李亮,何宁,等.金刚石涂层刀具微细铣削硬质合金的试验研究[J].工具技术,2018,52(5):38-41.
[31]刘灿宇,刘战强.TiN刀具涂层抗多次冲击性能研究[J].现代制造工程,2018(7):105-111.
[32]王铁钢,张姣姣,阎兵.刀具涂层的研究进展及最新制备技术[J].真空科学与技术学报,2017,37(7):727-738.
[2]CH S K,SAROJ K P.Experimental and numerical investigations on the effect of varying AlTiN coating thickness on hard machining performance of Al2O3-TiCN mixed ceramic inserts[J].Surface&Coatings Technology,2017,309:266-281.
[3]钟厉,龙永杰,韩西.刀具表面磁控溅射CrN涂层及其耐磨性能研究[J].表面技术,2018,47(10):151-156.
[4]郭杰,徐看,刘利国,等.刀具涂层技术现状与发展趋势[J].工具技术,2014,48(3):3-7.
[5]胡鹏飞,张华.刀具硬质涂层的发展现状及展望[J].工具技术,2009,43(11):29-33.
[6]安立宝.激光表面处理技术及其进展[J].航空制造技术,1995(4):19-21.
[7]贺春林,高建君,王苓飞,等.基体温度对反应共溅射TiN/Ni纳米复合膜结构和耐蚀性的影响[J].中国表面工程,2018,31(2):85-93.
[8]张锋刚,王永善,宋佩维.硬质合金表面改性研究现状与展望[J].陕西理工大学学报(自然科学版),2015(3):8-13.
[9]KNOTEK O,BOHMER M,LEYENDECKER T.On structure and properties of sputtered Ti and Al based hard compound films[J].J.Vac.Sci.Technol.A;(United States),1986,4:6(6):2695-2700.
[10]刘建华,邓建新,张庆余.TiAlN涂层刀具的发展与应用[J].工具技术,2006,40(4):9-13.
[11]杨小璠,李友生,李凌祥,等.CVD金刚石涂层工艺对硬质合金立铣刀铣削CFRP性能的影响[J].金刚石与磨料磨具工程,2018,38(2):37-41.
[12]李晓亮,阎殿然,何继宁,等.反应等离子喷涂TiN/AlN涂层的性能研究[J].新技术新工艺,2006(3):85-86.
[13]刘海浪,羊建高,黄如愿.硬质合金涂层刀具研究进展[J].凿岩机械气动工具,2009(2):52-59.
[14]张钦英,陈颢,任兴润,等.A1靶溅射功率对CrAIN涂层组织结构及摩擦性能的影响[J].有色金属科学与工程,2017,8(5):109-114.
[15]丁旭丽.类金刚石薄膜的制备及光学性质研究[D].曲阜:曲阜师范大学,2009.
[16]COHEN M L.Structural,electronic and optical properties of carbon nitride[J].Materials Science&Engineering A,2004,209(11):119-204.
[17]丁志,杨海东,张崇高.C3N4涂层刀具在切削淬火钢和硅铝合金中的应用[J].工具技术,2006,40(10):19-21.
[18]黄健.基于自支撑金刚石薄膜的晶体管和紫外探测器制备与性能研究[D].上海:上海大学,2010.
[19]吕毅军,高玉琳,郑健生,等.Direct observation of NN pairs transfer in GaP1-xNx(x=0.12%)[J].中国物理快报:英文版,2005,22(11):2957-2959.
[20]应显军,涂小龙,刘钢,等.PVD涂层硬质合金刀具加工2Cr13性能对比试验研究[J].工具技术,2015,49(6):12-17.
[21]UDDIN M S,PHAM B,SARHAN A.Comparative study between wear of uncoated and TiAlN-coated carbide tools in milling of Ti6Al4V[J].Advances in Manu facturing,2017,5(1):83-91.
[22]万熠,刘战强,赵军,等.先进切削刀具及未来趋势[J].航空制造技术,2014(12):40-43.
[23]郑亚军.Ti(Cr,Al)SiC(O)N涂层及其表面改性硬质合金刀具性能研究[D].西南交通大学,2013.
[24]郑艳彬,姜志刚.DLC膜涂层硬质合金刀具的研究进展[J].硬质合金,2012,29(2):116-122.
[25]陈勇志,占志泽,曾铁初.硬质合金涂层技术及其进展[J].东莞理工学院报,2012,19(3):94-98.
[26]颜培.ZrTiN梯度涂层刀具的制备及性能研究[D].济南:山东大学,2012.
[27]尹福兰,丁国富,杨大治,等.深冷处理对涂层硬质合金刀具耐磨性的影响[J].金属热处理,2018,43(9):98-102.
[28]邵泽宽.涂层刀具的现状研究[J].有色金属科学与工程,2017,8(6):57-64.
[29]王国珍,侯俊,丁荣乐,等.切削刀具表面涂层及耐磨性能研究[J].铸造技术,2017,38(12):2862-2864.
[30]吴贤,李亮,何宁,等.金刚石涂层刀具微细铣削硬质合金的试验研究[J].工具技术,2018,52(5):38-41.
[31]刘灿宇,刘战强.TiN刀具涂层抗多次冲击性能研究[J].现代制造工程,2018(7):105-111.
[32]王铁钢,张姣姣,阎兵.刀具涂层的研究进展及最新制备技术[J].真空科学与技术学报,2017,37(7):727-738.