基于MEMS的矩形微同轴技术研究现状
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摘要
矩形微同轴技术已成为射频微电子机械系统(RF MEMS)的一个重要发展方向。矩形微同轴的电性能相比于传统的传输结构(如微带、共面波导等)在毫米波宽带领域具有巨大优势。从结构、性能等方面对矩形微同轴进行了简要分析。回顾了矩形微同轴技术在其发展的不同阶段出现的体硅刻蚀技术、EFABTM和PolyStrataTM技术,并对矩形微同轴的结构、加工工艺及射频性能等方面进行了简要分析。介绍了矩形微同轴技术在不同RF MEMS中的应用,并对获得的特性进行了讨论。矩形微同轴技术应用于高度集成的RF MEMS是发展的必然趋势,必将对传统射频电路的设计、制备及系统集成产生巨大影响。
The rectangular micro-coaxial technology has become an important development direction of the radio frequency micro-electromechanical systems(RF MEMS),and the electrical perfor-mance of the rectangular micro-coaxial structure has great advantages over that of the traditional transmission structure,such as the microstrip and coplanar waveguide,for the millimeter wave broadband field.The rectangular micro-coaxial structure and its performance are simply analyzed,and different development stages of the rectangular micro-coaxial technology are reviewed,such as bulk silicon etching,EFABTMand PolyStrataTM,which are simply discussed from the aspects of the structure,fabrication process and RF performance.The applications of the rectangular micro-coaxial technology for various RF MEMS are introduced,and the obtained characteristics are discussed.The high-level integrated RF MEMS with the rectangular micro-coaxial technology is the inevitable development trend,which will deeply impact on the design,fabrication and system integration of traditional RF circuits.
The rectangular micro-coaxial technology has become an important development direction of the radio frequency micro-electromechanical systems(RF MEMS),and the electrical perfor-mance of the rectangular micro-coaxial structure has great advantages over that of the traditional transmission structure,such as the microstrip and coplanar waveguide,for the millimeter wave broadband field.The rectangular micro-coaxial structure and its performance are simply analyzed,and different development stages of the rectangular micro-coaxial technology are reviewed,such as bulk silicon etching,EFABTMand PolyStrataTM,which are simply discussed from the aspects of the structure,fabrication process and RF performance.The applications of the rectangular micro-coaxial technology for various RF MEMS are introduced,and the obtained characteristics are discussed.The high-level integrated RF MEMS with the rectangular micro-coaxial technology is the inevitable development trend,which will deeply impact on the design,fabrication and system integration of traditional RF circuits.
引文
[1]焦海龙,赵广宏,李文博,等.RF MEMS国内外现状及发展趋势[EB/OL].(2018-03-07)[2018-10-20].http://www.memsconsulting.com.
[2]REID J,MARSH E,WEBSTER R.Micromachined rectangular-coaxial transmission lines[J].IEEE Transaction on Microwave Theory and Techniques,2006,54(8):3433-3442.
[3]REID J,WEBSTER R.A55 GHz bandpass filter realized with integrated TEM transmission lines[C]//Proceedings of the IEEE MTT-S International Microwave Symposium(IMS).San Francisco,USA,2006:132-135.
[4]REID J,WEBSTER R.A compact integrated coaxial V-band bandpass filter[C]//Proceedings of the Antennas and Propagation Society International Conference.Monterey,USA,2004:990-993.
[5]MARSH E D,REID J R,VASILYEV V S.Gold-plated micromachined millimeter-wave resonators based on rectangular coaxial transmission lines[J].Microwave Theory and Techniques,2007,55(1):78-84.
[6]VANHILLE K J,FONTAINE D L,NICHOLS C,et al.Quasi-planar high-Q millimeter-wave resonators[J].IEEETransactions on Microwave Theory and Techniques,2006:54(6):2439-2446.
[7]REID J,WEBSTER R.A6-port 60 GHz coupler for an RN2beam former[C]//Proceedings of the Antennas and Propagation Society International Conference.Albuquerque,USA,2006:1985-1988.
[8]REID J R,WEBSTER R T.A60 GHz branch line coupler fabricated using integrated rectangular coaxial lines[C]//Proceedings of the IEEE MTT-S International Microwave Symposium(IMS).New York,USA,2004:441-444.
[9]CHEN R,BROWN E,SINGH R.A compact 30 GHz low loss balanced hybrid coupler fabricated using micro machined integrated coax[C]//Proceedings of the Radio and Wireless Conference.Atlanta,USA,2004:227-230.
[10]VANHILLE K,ROLLIN J M,RONDINEAU S,et al.Kaband surface-mount directional coupler fabricated using microrectangular coaxial transmission lines[C]//Proceedings of the IEEE MTT-S International Microwave Symposium(IMS).Nanjing,China,2008:1549-1552.
[11]VANHILLE K,FILIPOVIC D,NICHOLST C,et al.Balanced low-loss Ka-band micro-coaxial hybrids[C]//Proceedings of the IEEE MTT-S International Microwave Symposium(IMS).Hawaii,USA,2007:1157-1160.
[12]LUKIC M V,FILIPOVIC D S.Surface-micromachined dual Ka-band cavity backed patch antenna[J].Antennas and Propagation,2007,55(7):2107-2110.
[13]BROWN E R,COHEN A L,BANG C A,et al.Characteristics of microfabricated rectangular coax in the Ka band[J].Microwave and Optical Technology Letters,2004,40(5):365-368.
[14]SAITO Y,FILIPOVIC D S.Analysis and design of monolithic rectangular coaxial lines for minimum coupling[J].IEEE Transactions on Microwave Theory and Techniques,2007,55(12):2521-2530.
[15]POPOVIC Z.Micro-coaxial micro-fabricated feeds for phased array antennas[C]//Proceedings of the Phased Array Systems and Technology(ARRAY).Boston,USA,2010:1-10.
[16]EHSAN N,VANHILLE K,CULLENS E,et al.Broadband Micro-Coaxial Wilkinson Dividers[J].IEEE Transaction on Microwave Theory and Techniques,2009,57(11):2783-2789.
[17]COHEN A,ZHANG G,TSENG F,et al.EFAB:rapid lowcost desktop micromachining of high aspect ratio true 3-DMEMS[C]//Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems(MEMS).Orlando,USA,1999:244-251.
[18]FILIPOVIC D S,POPOVIC Z,VANHILLE K,et al.Modeling,design,fabrication,and performance of rectangular coaxial lines and components[C]//Proceedings of the IEEE MTTSInternational Microwave Symposium(IMS).San Francisco,USA,2006:1393-1396.
[19]DIB N I,HAROKOPUS W P,KATEHI P B,et al.Study of a novel planar transmission line[C]//Proceedings of the IEEE MTT-S International Microwave Symposium(IMS).Boston,USA,1991:623-626.
[20]DIB N I,KATEHI L.Impedance calculation for the microshield line[J].IEEE Microwave and Guided Wave Letters,1992,2(10):406-408.
[21]THORPE J R,STEENSON D P,MILES R E.High frequency transmission line using micromachined polymer dielectric[J].Electronics Letters,1998 34(12):1237-1238.
[22]NEWLIN D A,PHAM V H,HARRISS J.Development of low loss organic-micromachined interconnects on silicon at microwave frequencies[J].IEEE Transactions on Components,Packaging,and Manufacturing Technology,2002,25(3):506-510.
[23]KATEHI L,REBEIZ G,WELLER T,et al.Micromachined circuits for millimeter-and sub-millimeter-wave applications[J].IEEE Antennas and Propagation Magazine,1993,35(5):9-17.
[24]WELLER T,KATEHI L,REBEIZ G,et al.High performance microshield line components[J].IEEE Transactions on Microwave Theory and Techniques,1995,43(3):534-543.
[25]CHI C Y,REBEIZ G.Conductor-loss limited strip line resonators and filters[J].IEEE Transactions on Microwave Theory and Techniques,1996,44(4):626-630.
[26]ROBERTSON S,KATEHI L,REBEIZ G.Micromachined W-band filters[J].IEEE Transactions on Microwave Theory and Techniques,1996,44(4):598-606.
[27]BLONDY P,BROWN A,CROS D,et al.Low-loss micromachined filters for millimeter-wave communication systems[J].IEEE Transactions on Microwave Theory and Techniques,1998,46(12):2283-2288.
[28]BROWN A,REBEIZ G.A high-performance integrated K-band diplexer[J].IEEE Transactions on Microwave Theory and Techniques,1999,47(8):1477-1481.
[29]MARGOMENOS A,HERRICK K,HERMAN M,et al.Isolation in three-dimensional integrated circuits[J].IEEETransactions on Microwave Theory and Techniques,2003,51(1):25-32.
[30]CHEN T S.Determination of the capacitance,inductance and characteristic impedance of rectangular lines[J].IEEETransactions on Microwave Theory and Techniques,1960,8(9):510-519.
[31]Microwave101,Inc.Rectax[EB/OL].(2000-09-07)[2018-10-20].https://www.microwaves101.com/encyclopedias/rf-wirebonds.
[32]Microfabrica,Inc.Vision of Microfabrica[EB/OL].(2001-10-04)[2018-10-20].http://www.microfabrica.com/pages/index.php?pg=tech.
[33]EVANS J D.3-D micro electromagnetic radio frequency systems(3-D MERFS)and other DARPA RF MEMS programs[C]//Proceedings of the Compound Semiconductor Integrated Circuit Symposium.San Antonio,USA,2006:211-214.
[34]HUETTNER S.3-D Air dielectric coax miniaturized RF networks[C]//Proceedings of the International Microwave Symposium.Honolulu,USA,2017:1-45.
[35]SHERRER D,FISHER J.Coaxial waveguide microstructures and the method of formation thereof:USA,US20040263290A1[P].2004-12-30.
[36]Nuvotronics Inc.Our secret weapon[EB/OL].(2010-08-20)[2018-10-20].http://www.nuvotronics.com.
[37]LUKIC M,RONDINEAU S,POPOVIC Z,et al.Modeling of realistic rectangularμ-coaxial lines[J].IEEE Transactions on Microwave Theory and Techniques,2006:54(5):2068-2076.
[38]EHSAN N,CULLENS E,VANHILLE K,et al.Microcoaxial lines for active hybrid-monolithic circuits[C]//Proceedings of the IEEE MTT-S International Microwave Symposium(IMS).Boston,USA,2009:465-468.
[39]POPOVIC Z,VANHILLE K,EHSAN N,et al.Micro-fabricated micro-coaxial millimeter-wave components[C]//Proceedings of the 33rd International Conference on Infrared,Millimeter and Terahertz Waves.Pasadena,USA,2008:1-3.
[40]FILIPOVIC D S,LUKIC M V,LEE Y,et al.Monolithic rectangular coaxial lines and resonators with embedded dielectric support[J].IEEE Microwave and Wireless Components Letters,2008,18(11):740-742.
[41]VANHILLE K.Design and characterization of microfabricated three-dimensional millimeter-wave components[D].Colorado:University of Colorado,2007.
[42]HUETTNER S.High performance 3D micro-coax technology[J].Microwave Journal,2013,56(11):108-120.
[43]FILIPOVIC D S,POPPOVIC Z B,LUKIC M V,et al.Design of microfabricated rectangular coaxial lines and components for mm-wave applications[J].Microwave Review,2006,11:11-16.
[44]EHSAN N,VANHILLE K J,RONDINEAU S,et al.Micro-coaxial impedance transformers[J].IEEE Transactions on Microwave Theory and Techniques,2010 58(11):2908-2914.
[45]RALSTON P,VANHILLE K,CABA A,et al.Test and verification of micro coaxial line power performance[C]//Proceedings of the IEEE MTT-S International Microwave Symposium(IMS).Seattle,USA,2012:1-3.
[46]VANHILLE K,FONTAINE D,NICHOLS C,et al.Acapacitively-loaded quasi-planar Ka-band resonator[C]//Proceedings of the 36th European Microwave Conference.Manchester,USA,2006:495-497.
[47]VANHILLE K,FONTAINE D,NICHOLS C,et al.Kaband miniaturized quasi-planar high-Qresonators[J].Microwave Theory and Techniques,2007,55(6):1272-1279.
[48]VANHILLE K,FILIPOVIC D,NICHOLST C,et al.Balanced low-loss Ka-bandμ-coaxial hybrids[C]//Proceedings of the IEEE MTT-S International Microwave Symposium(IMS).Honolulu,USA,2007:1157-1160.
[49]LUKIC M,KIM K,LEE Y,et al.Multi-physics design and performance of a surface micromachined Ka-band cavity backed patch antenna[C]//Proceedings of the International Microwave&Optoelectronics Conference.Salvador,Brazil,2007:321-324.
[50]LUKIC M,FILIPOVIC D,FONTAINE D,et al.Monolithically integrated corporate-fed cavity-backed antennas[J].Antennas and Propagation,2009,57(9):2583-2590.
[51]OLIVER J M,RALSTION P,CULLENS E.A W-band micro coaxial passive monopulse comparator network with integrated cavity-backed patch antenna array[C]//Proceedings of the IEEE MTT-S International Microwave Symposium(IMS).Baltimore,USA,2011:1-4.
[52]LUKIC M,FILIPOVIC D.Integrated cavity-backed Ka-band phased array antenna[C]//Proceedings of the Antennas and Propagation Society International Symposium.Honolulu,USA,2007:133-136.
[53]SAITO Y,FONTAINE D,ROLLIN J M,et al.Monolithic micro-coaxial power dividers[J].Electronics Letters,2009:45(9):1-2.
[54]POPOVIC Z,EHSAN N,CULLENS E,et al.Miniature 3Dmicro-machined solid state power amplifiers[C]//Proceedings of the IEEE International Conference on Microwaves,Communications,Antennas and Electronic Systems San Diego,USA,2008:1-7.
[55]POPOVIC′Z,RONDINEAU S,FILIPOVIC′D S,et al.An enabling new3-D architecture for microwave components and systems[J].Microwave Journal,2008,51(2):66-87.
[56]ENSAN N.Broadband Microwave lithographic 3D components[D].University of Colorado,2010:8-9.
[57]ROLLIN J M.Advanced millimeter-wave package for space and beyond[C]//Proceedings of the IEEE MTT-S International Microwave Symposium(IMS).Honolulu,USA,2017:1-33.
[58]RALSTON P,OLIVER M,VUMMIDI K,et al.Liquid metal vertical interconnects for flip-chip assembly of GaAs C-band power amplifiers onto micro-rectangular coaxial transmission lines[J].Journal of Solid-State Circuits,2012,47(10):2327-2334.
[59]KAZEMII H,MILLE D,MOHAN A,et al.Ultra-compact G-band 16-way power splitter/combiner module fabricated through a new method of 3D-copper additive manufacturing[C]//Proceedings of the IEEE MTT-S International Microwave Symposium(IMS).Phoenix,USA,2015:1-3.
[60]MRUK J,HONGYU Z,UHM M,et al.Wideband mmwave log-periodic antennas[C]//Proceedings of the 3rd European Conference Antennas and Propagation.Berlin,Germany,2009:2584-2587.
[61]MRUK J R,SUTTON N,FILIPOVIC D S.Micro-coaxial fed 18 to 110 GHz planar log-periodic antennas with RF transitions[J].IEEE Transactions on Antennas and Propagation,2014,62(2):968-972.
[62]SAITO Y,MRUK J R,ROLLIN J M,et al.X-through Q-band log-periodic antenna with monolithically integrated m-coaxial impedance transformer/feeder[J].Electronics Letters,2009:45(15):1-2.
[63]VANHILLE K,DURHAM T,STACY W.A microfabricated8-40 GHz dual-polarized reflector feed[EB/OL].(2014-01-17)[2018-10-20].https://ntrs.nasa.gov/search.jsp?R=20140017771.
[64]TIAN Y,LEE K,WANG H,et al.A390 ps on-wafer truetime-delay line developed by a novel micro-coax technology[J].Microwave and Wireless Components Letters,2014,24(4):233-235.
[65]范新磊,张斌珍,张勇,等.射频同轴传输线的设计仿真与加工工艺[J].微纳电子技术,2013,50(6):397-402.
[66]李祥祥,桑磊,马强.矩形微同轴射频传输性能研究[C]//全国微波毫米波会议.上海,中国,2005:961-964.
[67]LI X P,ZHU H,LI N,et al.Surface micro-machined wideband circularly polarized antenna array for 60 GHz radios[C]//Proceedings of the 3rd Asia-Pacific Conference on Antennas and Propagation.Harbin,China,2014:1165-1168.
[2]REID J,MARSH E,WEBSTER R.Micromachined rectangular-coaxial transmission lines[J].IEEE Transaction on Microwave Theory and Techniques,2006,54(8):3433-3442.
[3]REID J,WEBSTER R.A55 GHz bandpass filter realized with integrated TEM transmission lines[C]//Proceedings of the IEEE MTT-S International Microwave Symposium(IMS).San Francisco,USA,2006:132-135.
[4]REID J,WEBSTER R.A compact integrated coaxial V-band bandpass filter[C]//Proceedings of the Antennas and Propagation Society International Conference.Monterey,USA,2004:990-993.
[5]MARSH E D,REID J R,VASILYEV V S.Gold-plated micromachined millimeter-wave resonators based on rectangular coaxial transmission lines[J].Microwave Theory and Techniques,2007,55(1):78-84.
[6]VANHILLE K J,FONTAINE D L,NICHOLS C,et al.Quasi-planar high-Q millimeter-wave resonators[J].IEEETransactions on Microwave Theory and Techniques,2006:54(6):2439-2446.
[7]REID J,WEBSTER R.A6-port 60 GHz coupler for an RN2beam former[C]//Proceedings of the Antennas and Propagation Society International Conference.Albuquerque,USA,2006:1985-1988.
[8]REID J R,WEBSTER R T.A60 GHz branch line coupler fabricated using integrated rectangular coaxial lines[C]//Proceedings of the IEEE MTT-S International Microwave Symposium(IMS).New York,USA,2004:441-444.
[9]CHEN R,BROWN E,SINGH R.A compact 30 GHz low loss balanced hybrid coupler fabricated using micro machined integrated coax[C]//Proceedings of the Radio and Wireless Conference.Atlanta,USA,2004:227-230.
[10]VANHILLE K,ROLLIN J M,RONDINEAU S,et al.Kaband surface-mount directional coupler fabricated using microrectangular coaxial transmission lines[C]//Proceedings of the IEEE MTT-S International Microwave Symposium(IMS).Nanjing,China,2008:1549-1552.
[11]VANHILLE K,FILIPOVIC D,NICHOLST C,et al.Balanced low-loss Ka-band micro-coaxial hybrids[C]//Proceedings of the IEEE MTT-S International Microwave Symposium(IMS).Hawaii,USA,2007:1157-1160.
[12]LUKIC M V,FILIPOVIC D S.Surface-micromachined dual Ka-band cavity backed patch antenna[J].Antennas and Propagation,2007,55(7):2107-2110.
[13]BROWN E R,COHEN A L,BANG C A,et al.Characteristics of microfabricated rectangular coax in the Ka band[J].Microwave and Optical Technology Letters,2004,40(5):365-368.
[14]SAITO Y,FILIPOVIC D S.Analysis and design of monolithic rectangular coaxial lines for minimum coupling[J].IEEE Transactions on Microwave Theory and Techniques,2007,55(12):2521-2530.
[15]POPOVIC Z.Micro-coaxial micro-fabricated feeds for phased array antennas[C]//Proceedings of the Phased Array Systems and Technology(ARRAY).Boston,USA,2010:1-10.
[16]EHSAN N,VANHILLE K,CULLENS E,et al.Broadband Micro-Coaxial Wilkinson Dividers[J].IEEE Transaction on Microwave Theory and Techniques,2009,57(11):2783-2789.
[17]COHEN A,ZHANG G,TSENG F,et al.EFAB:rapid lowcost desktop micromachining of high aspect ratio true 3-DMEMS[C]//Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems(MEMS).Orlando,USA,1999:244-251.
[18]FILIPOVIC D S,POPOVIC Z,VANHILLE K,et al.Modeling,design,fabrication,and performance of rectangular coaxial lines and components[C]//Proceedings of the IEEE MTTSInternational Microwave Symposium(IMS).San Francisco,USA,2006:1393-1396.
[19]DIB N I,HAROKOPUS W P,KATEHI P B,et al.Study of a novel planar transmission line[C]//Proceedings of the IEEE MTT-S International Microwave Symposium(IMS).Boston,USA,1991:623-626.
[20]DIB N I,KATEHI L.Impedance calculation for the microshield line[J].IEEE Microwave and Guided Wave Letters,1992,2(10):406-408.
[21]THORPE J R,STEENSON D P,MILES R E.High frequency transmission line using micromachined polymer dielectric[J].Electronics Letters,1998 34(12):1237-1238.
[22]NEWLIN D A,PHAM V H,HARRISS J.Development of low loss organic-micromachined interconnects on silicon at microwave frequencies[J].IEEE Transactions on Components,Packaging,and Manufacturing Technology,2002,25(3):506-510.
[23]KATEHI L,REBEIZ G,WELLER T,et al.Micromachined circuits for millimeter-and sub-millimeter-wave applications[J].IEEE Antennas and Propagation Magazine,1993,35(5):9-17.
[24]WELLER T,KATEHI L,REBEIZ G,et al.High performance microshield line components[J].IEEE Transactions on Microwave Theory and Techniques,1995,43(3):534-543.
[25]CHI C Y,REBEIZ G.Conductor-loss limited strip line resonators and filters[J].IEEE Transactions on Microwave Theory and Techniques,1996,44(4):626-630.
[26]ROBERTSON S,KATEHI L,REBEIZ G.Micromachined W-band filters[J].IEEE Transactions on Microwave Theory and Techniques,1996,44(4):598-606.
[27]BLONDY P,BROWN A,CROS D,et al.Low-loss micromachined filters for millimeter-wave communication systems[J].IEEE Transactions on Microwave Theory and Techniques,1998,46(12):2283-2288.
[28]BROWN A,REBEIZ G.A high-performance integrated K-band diplexer[J].IEEE Transactions on Microwave Theory and Techniques,1999,47(8):1477-1481.
[29]MARGOMENOS A,HERRICK K,HERMAN M,et al.Isolation in three-dimensional integrated circuits[J].IEEETransactions on Microwave Theory and Techniques,2003,51(1):25-32.
[30]CHEN T S.Determination of the capacitance,inductance and characteristic impedance of rectangular lines[J].IEEETransactions on Microwave Theory and Techniques,1960,8(9):510-519.
[31]Microwave101,Inc.Rectax[EB/OL].(2000-09-07)[2018-10-20].https://www.microwaves101.com/encyclopedias/rf-wirebonds.
[32]Microfabrica,Inc.Vision of Microfabrica[EB/OL].(2001-10-04)[2018-10-20].http://www.microfabrica.com/pages/index.php?pg=tech.
[33]EVANS J D.3-D micro electromagnetic radio frequency systems(3-D MERFS)and other DARPA RF MEMS programs[C]//Proceedings of the Compound Semiconductor Integrated Circuit Symposium.San Antonio,USA,2006:211-214.
[34]HUETTNER S.3-D Air dielectric coax miniaturized RF networks[C]//Proceedings of the International Microwave Symposium.Honolulu,USA,2017:1-45.
[35]SHERRER D,FISHER J.Coaxial waveguide microstructures and the method of formation thereof:USA,US20040263290A1[P].2004-12-30.
[36]Nuvotronics Inc.Our secret weapon[EB/OL].(2010-08-20)[2018-10-20].http://www.nuvotronics.com.
[37]LUKIC M,RONDINEAU S,POPOVIC Z,et al.Modeling of realistic rectangularμ-coaxial lines[J].IEEE Transactions on Microwave Theory and Techniques,2006:54(5):2068-2076.
[38]EHSAN N,CULLENS E,VANHILLE K,et al.Microcoaxial lines for active hybrid-monolithic circuits[C]//Proceedings of the IEEE MTT-S International Microwave Symposium(IMS).Boston,USA,2009:465-468.
[39]POPOVIC Z,VANHILLE K,EHSAN N,et al.Micro-fabricated micro-coaxial millimeter-wave components[C]//Proceedings of the 33rd International Conference on Infrared,Millimeter and Terahertz Waves.Pasadena,USA,2008:1-3.
[40]FILIPOVIC D S,LUKIC M V,LEE Y,et al.Monolithic rectangular coaxial lines and resonators with embedded dielectric support[J].IEEE Microwave and Wireless Components Letters,2008,18(11):740-742.
[41]VANHILLE K.Design and characterization of microfabricated three-dimensional millimeter-wave components[D].Colorado:University of Colorado,2007.
[42]HUETTNER S.High performance 3D micro-coax technology[J].Microwave Journal,2013,56(11):108-120.
[43]FILIPOVIC D S,POPPOVIC Z B,LUKIC M V,et al.Design of microfabricated rectangular coaxial lines and components for mm-wave applications[J].Microwave Review,2006,11:11-16.
[44]EHSAN N,VANHILLE K J,RONDINEAU S,et al.Micro-coaxial impedance transformers[J].IEEE Transactions on Microwave Theory and Techniques,2010 58(11):2908-2914.
[45]RALSTON P,VANHILLE K,CABA A,et al.Test and verification of micro coaxial line power performance[C]//Proceedings of the IEEE MTT-S International Microwave Symposium(IMS).Seattle,USA,2012:1-3.
[46]VANHILLE K,FONTAINE D,NICHOLS C,et al.Acapacitively-loaded quasi-planar Ka-band resonator[C]//Proceedings of the 36th European Microwave Conference.Manchester,USA,2006:495-497.
[47]VANHILLE K,FONTAINE D,NICHOLS C,et al.Kaband miniaturized quasi-planar high-Qresonators[J].Microwave Theory and Techniques,2007,55(6):1272-1279.
[48]VANHILLE K,FILIPOVIC D,NICHOLST C,et al.Balanced low-loss Ka-bandμ-coaxial hybrids[C]//Proceedings of the IEEE MTT-S International Microwave Symposium(IMS).Honolulu,USA,2007:1157-1160.
[49]LUKIC M,KIM K,LEE Y,et al.Multi-physics design and performance of a surface micromachined Ka-band cavity backed patch antenna[C]//Proceedings of the International Microwave&Optoelectronics Conference.Salvador,Brazil,2007:321-324.
[50]LUKIC M,FILIPOVIC D,FONTAINE D,et al.Monolithically integrated corporate-fed cavity-backed antennas[J].Antennas and Propagation,2009,57(9):2583-2590.
[51]OLIVER J M,RALSTION P,CULLENS E.A W-band micro coaxial passive monopulse comparator network with integrated cavity-backed patch antenna array[C]//Proceedings of the IEEE MTT-S International Microwave Symposium(IMS).Baltimore,USA,2011:1-4.
[52]LUKIC M,FILIPOVIC D.Integrated cavity-backed Ka-band phased array antenna[C]//Proceedings of the Antennas and Propagation Society International Symposium.Honolulu,USA,2007:133-136.
[53]SAITO Y,FONTAINE D,ROLLIN J M,et al.Monolithic micro-coaxial power dividers[J].Electronics Letters,2009:45(9):1-2.
[54]POPOVIC Z,EHSAN N,CULLENS E,et al.Miniature 3Dmicro-machined solid state power amplifiers[C]//Proceedings of the IEEE International Conference on Microwaves,Communications,Antennas and Electronic Systems San Diego,USA,2008:1-7.
[55]POPOVIC′Z,RONDINEAU S,FILIPOVIC′D S,et al.An enabling new3-D architecture for microwave components and systems[J].Microwave Journal,2008,51(2):66-87.
[56]ENSAN N.Broadband Microwave lithographic 3D components[D].University of Colorado,2010:8-9.
[57]ROLLIN J M.Advanced millimeter-wave package for space and beyond[C]//Proceedings of the IEEE MTT-S International Microwave Symposium(IMS).Honolulu,USA,2017:1-33.
[58]RALSTON P,OLIVER M,VUMMIDI K,et al.Liquid metal vertical interconnects for flip-chip assembly of GaAs C-band power amplifiers onto micro-rectangular coaxial transmission lines[J].Journal of Solid-State Circuits,2012,47(10):2327-2334.
[59]KAZEMII H,MILLE D,MOHAN A,et al.Ultra-compact G-band 16-way power splitter/combiner module fabricated through a new method of 3D-copper additive manufacturing[C]//Proceedings of the IEEE MTT-S International Microwave Symposium(IMS).Phoenix,USA,2015:1-3.
[60]MRUK J,HONGYU Z,UHM M,et al.Wideband mmwave log-periodic antennas[C]//Proceedings of the 3rd European Conference Antennas and Propagation.Berlin,Germany,2009:2584-2587.
[61]MRUK J R,SUTTON N,FILIPOVIC D S.Micro-coaxial fed 18 to 110 GHz planar log-periodic antennas with RF transitions[J].IEEE Transactions on Antennas and Propagation,2014,62(2):968-972.
[62]SAITO Y,MRUK J R,ROLLIN J M,et al.X-through Q-band log-periodic antenna with monolithically integrated m-coaxial impedance transformer/feeder[J].Electronics Letters,2009:45(15):1-2.
[63]VANHILLE K,DURHAM T,STACY W.A microfabricated8-40 GHz dual-polarized reflector feed[EB/OL].(2014-01-17)[2018-10-20].https://ntrs.nasa.gov/search.jsp?R=20140017771.
[64]TIAN Y,LEE K,WANG H,et al.A390 ps on-wafer truetime-delay line developed by a novel micro-coax technology[J].Microwave and Wireless Components Letters,2014,24(4):233-235.
[65]范新磊,张斌珍,张勇,等.射频同轴传输线的设计仿真与加工工艺[J].微纳电子技术,2013,50(6):397-402.
[66]李祥祥,桑磊,马强.矩形微同轴射频传输性能研究[C]//全国微波毫米波会议.上海,中国,2005:961-964.
[67]LI X P,ZHU H,LI N,et al.Surface micro-machined wideband circularly polarized antenna array for 60 GHz radios[C]//Proceedings of the 3rd Asia-Pacific Conference on Antennas and Propagation.Harbin,China,2014:1165-1168.