超精密光学镜片三维表面形貌参数评定方法研究
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摘要
分析了当前超精密光学镜片表面评定方法及其存在的不足,提出引用ISO 25178-2中规范的部分表面3D参数来表征精密光学镜片三维表面,找出光学镜片表面形貌与对应的光学性能存在的关系,并实现ISO对超精密光学镜片三维表面的评定。仿真实验表明:当光学镜片表面的高度服从高斯分布时,其评价光学系统性能的传递函数随着均方值的减小而增大。用实例说明ISO的部分三维参数对光学镜片三维表面可以很好地区分,利用新的综合评价方法评定光学镜片表面形貌具有一定的可行性。
The shortcomings of current ultra precision optical lens surface assessment methods is analysed. The existing optical elements surface characterization methods is embarked, combining with the three-dimensional surface parameters in the ISO 25178-2. The relationship between the surface topography of optical lens and the corresponding optical properties is found out. The evaluation of the 3 D surface of ultra precision optical lenses using the standard ISO is realized. The simulation results show that when the surface of the optical lens is highly subjectef to Gauss distribution, the transfer function of the optical system performance is evaluated with the decrease of the mean square value. And the example results show that the characteristics can also be well distinguished by the three dimensional parameters, and it has certain feasibility to characterize the optical surface by the use of the new comprehensive evaluation method.
The shortcomings of current ultra precision optical lens surface assessment methods is analysed. The existing optical elements surface characterization methods is embarked, combining with the three-dimensional surface parameters in the ISO 25178-2. The relationship between the surface topography of optical lens and the corresponding optical properties is found out. The evaluation of the 3 D surface of ultra precision optical lenses using the standard ISO is realized. The simulation results show that when the surface of the optical lens is highly subjectef to Gauss distribution, the transfer function of the optical system performance is evaluated with the decrease of the mean square value. And the example results show that the characteristics can also be well distinguished by the three dimensional parameters, and it has certain feasibility to characterize the optical surface by the use of the new comprehensive evaluation method.
引文
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[3]戴一帆,吴冬良,王贵林.光学加工中高频误差对散射损失比的影响[J].光学精密工程,2009,17(10):2365-2370.
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[5]李剑白,李达成,李小芸,等.原子力显微镜测试光学超精密表面微轮廓的研究[J].光学学报,2000,20(11):1533-1536.
[6]Bennet H E,Bennet J M.Physics of Thin Films[M].New York:Academic,1969.
[7]Bhushan B,Wyant J C,Meiling J.A new threedimensional non-contact digital optical profiler[J].Wear,1988,122(3):301-312.
[8]Geometrical product specifications(GPS)—Surface texture:Areal—Part 2:Terms,definitions and surface texture parameters:ISO 25178-2[S].2012.
[9]杨旭东,李家春,谢铁邦.机械零件三维表面形貌测量与评定的研究[J].机械设计与研究,2007,(8):102-104.
[10]马彬,王占山,沈正祥.功率谱密度函数对于超光滑光学元件表面的表征技术[C]//2008年全国博士生学术会议(光学测试新理论、新技术),长春,2008:24-28.
[11]Aikens D M,Wolfe C R,Lawson J K.The use of power spectral density(PSD)functions in specifying optics for the national ignition facility[J].Proceeding of SPIE,1995,2576:281-292.
[2]吴冬良,戴一帆,王贵林.光学加工中高频误差对环围能量比的影响[J].光学精密工程,2009,17(11):2705-2711.
[3]戴一帆,吴冬良,王贵林.光学加工中高频误差对散射损失比的影响[J].光学精密工程,2009,17(10):2365-2370.
[4]张小强,武欣,王伟荣,等.平面光学元件平面度动态干涉拼接测量[J].计量学报,2016,37(5):484-488.
[5]李剑白,李达成,李小芸,等.原子力显微镜测试光学超精密表面微轮廓的研究[J].光学学报,2000,20(11):1533-1536.
[6]Bennet H E,Bennet J M.Physics of Thin Films[M].New York:Academic,1969.
[7]Bhushan B,Wyant J C,Meiling J.A new threedimensional non-contact digital optical profiler[J].Wear,1988,122(3):301-312.
[8]Geometrical product specifications(GPS)—Surface texture:Areal—Part 2:Terms,definitions and surface texture parameters:ISO 25178-2[S].2012.
[9]杨旭东,李家春,谢铁邦.机械零件三维表面形貌测量与评定的研究[J].机械设计与研究,2007,(8):102-104.
[10]马彬,王占山,沈正祥.功率谱密度函数对于超光滑光学元件表面的表征技术[C]//2008年全国博士生学术会议(光学测试新理论、新技术),长春,2008:24-28.
[11]Aikens D M,Wolfe C R,Lawson J K.The use of power spectral density(PSD)functions in specifying optics for the national ignition facility[J].Proceeding of SPIE,1995,2576:281-292.