无源温度标签中的超低功耗CMOS温度传感器设计
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摘要
设计了一种适用于无源超高频(UHF)温度标签的超低功耗CMOS温度传感器电路。该电路利用衬底pnp晶体管产生随温度变化的电压信号,同时采用了逐次逼近寄存器(SAR)转换和Σ-Δ调制相结合的模拟数字转换方式。为了降低电源电压波动以及采样电容电荷泄漏对传感器测温精度的不利影响,提出了一种具有漏电保护机制的采样电路。基于0.18μm CMOS工艺设计实现了该传感器的电路和版图,其中版图面积为550μm×450μm,并利用Cadence Spectre仿真工具对电路进行了仿真。仿真结果表明,在-40~125℃,传感器的系统误差为-1.4~2.0℃,测温分辨率达到0.02℃;在1.2~2.6 V电源电压内,传感器输出温度波动小于0.3℃;在1.2 V电源电压下传感器电路(不含控制逻辑及数字滤波器)的功耗仅为2.4μW。
An ultra-low power CMOS temperature sensor circuit for the passive ultra-high frequency( UHF) temperature tag was designed. The temperature-dependent voltage signals were generated based on the substrate pnp transistor,and the analog-digital conversion method which combined successive approximation register( SAR) conversion and Σ-Δ modulation was used in the circuit. In order to reduce the negative effects of the supply voltage variation and charge leakage of the sampling capacitors on the temperature measurement accuracy of the temperature sensor,a sampling circuit with leakage protection mechanism was proposed. The sensor circuit and layout were designed and realized based on 0. 18 μm CMOS process,which was also simulated by Cadence Spectre. The layout area is 550 μm×450 μm. The simulation results show that the system error is-1. 4-2. 0 ℃ at-40 ~ 125 ℃ with a temperature measurement resolution of 0. 02 ℃. The maximum output temperature variation is less than 0. 3 ℃ at the supply voltage range from 1. 2 V to 2. 6 V,and the power consumption of the sensor circuit( excluding the control logic and digital filter) is only 2. 4 μW at the supply voltage of 1. 2 V.
An ultra-low power CMOS temperature sensor circuit for the passive ultra-high frequency( UHF) temperature tag was designed. The temperature-dependent voltage signals were generated based on the substrate pnp transistor,and the analog-digital conversion method which combined successive approximation register( SAR) conversion and Σ-Δ modulation was used in the circuit. In order to reduce the negative effects of the supply voltage variation and charge leakage of the sampling capacitors on the temperature measurement accuracy of the temperature sensor,a sampling circuit with leakage protection mechanism was proposed. The sensor circuit and layout were designed and realized based on 0. 18 μm CMOS process,which was also simulated by Cadence Spectre. The layout area is 550 μm×450 μm. The simulation results show that the system error is-1. 4-2. 0 ℃ at-40 ~ 125 ℃ with a temperature measurement resolution of 0. 02 ℃. The maximum output temperature variation is less than 0. 3 ℃ at the supply voltage range from 1. 2 V to 2. 6 V,and the power consumption of the sensor circuit( excluding the control logic and digital filter) is only 2. 4 μW at the supply voltage of 1. 2 V.
引文
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[14]李伦.应用于RFID标签芯片的CMOS温度传感器设计[D].武汉:华中科技大学,2015:78-79.
[2]YU S M,FENG P,WU N J.Passive and semi-passive wireless temperature and humidity sensors based on EPC generation-2 UHF protocol[J].IEEE Sensors Journal,2015,15(4):2403-2411.
[3]CHEN C C,CHEN H W.A low-cost CMOS smart temperature sensor using a thermal-sensing and pulse-shrinking delay line[J].IEEE Sensors Journal,2014,14(1):278-284.
[4]AN Y J,JUNG D H,RYU K,et al.An energy-efficient all-digital time-domain-based CMOS temperature sensor for SOC thermal management[J].IEEE Transactions on VLSI Systems,2015,23(8):1508-1517.
[5]SONG W,LEE J,CHO N,et al.An ultra low power time-domain temperature sensor with time-domain deltasigma TDC[J].IEEE Transactions on Circuits and Systems:II,2017,64(10):1117-1121.
[6]DENG C,SHENG Y,WANG S Y,et al.A CMOS smart temperature sensor with single-point calibration method for clinical use[J].IEEE Transactions on Circuits and Systems:II,2016,63(2):136-140.
[7]FENG P,ZHANG Q,WU N J.A passive UHF RFID tag chip with a dual-resolution temperature sensor in a0.18μm standard CMOS process[J].Journal of Semiconductors,2011,32(11):115013-1-115013-9.
[8]AITA A L,PERTIJS A P,MAKINWA K A A,et al.A CMOS smart temperature sensor with a batch-calibrated inaccuracy of±0.25℃from-70℃to 130℃[C]∥Proceedings of IEEE ISSCC Conforence.San Francisco,CA,USA,2009:342-343.
[9]姚园园.面向无源RFID应用的低功耗温度传感器芯片的设计研究[D].西安:西安电子科技大学,2016:52.
[10]PERTIJS M A P,MAKINWA K A A,HUIJSING J H.A CMOS smart temperature sensor with a 3σinaccuracy of±0.1℃from-55℃to 125℃[J].IEEE Journal of Solid-State Circuits,2005,40(12):2805-2815.
[11]SOURI K,CHAE Y,MAKINWA K A A A.CMOS temperature sensor with a voltage-calibrated inaccuracy of±0.15℃(3σ)from-55℃to 125℃[J].IEEE Journal of Solid-State Circuits,2013,48(1):292-301.
[12]PERTIJS M A P,HUIJSING J H.Precision temperature sensors in CMOS technology[M].Berlin:Springer,2006:60-61,126-128.
[13]陈彦如,陈志铭.一种大量程低误差CMOS温度传感器[J].微电子学,2016,46(5):605-611.CHEN Y R,CHEN Z M.A wide sensing range low error CMOS temperature sensor[J].Microelectronics,2016,46(5):605-611(in Chinese).
[14]李伦.应用于RFID标签芯片的CMOS温度传感器设计[D].武汉:华中科技大学,2015:78-79.