容性耦合射频氩等离子体放电诊断研究及仿真模拟
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摘要
针对中等气压、中等功率下射频容性耦合(CCRF)等离子体的放电特性,采用基于流体模型的COMSOL软件仿真,建立一维等离子体放电模型,以Ar为工作气体,研究同一气压时不同射频输入功率下等离子体电子温度和电子密度的分布规律。同时依据仿真模型设计制作相同尺寸的密闭玻璃腔体和平板电极,实验测量了不同射频输入功率时放电等离子体的有效电流电压及发射光谱,进而计算等离子体的电子温度及电子密度;利用玻耳兹曼双线测温法,得到光谱法下等离子体的电子温度及电子密度。结果表明:当气体压强为250Pa、输入功率为100～450W时,等离子体电压电流呈线性关系,电子密度随功率的增大而增大,而电子温度并未随功率的变化而有明显变化,其与功率无关。运用仿真模拟验证了实验的准确性,通过比较,三种方法所得的结果相近。通过结合等效回路法、光谱法和数值模拟仿真法初步诊断出中等气压下等离子体的放电参数,提出了结合三种方法作为实验研究的方法,使实验结果更具说服力,证明其方法的可靠性,也为进一步的等离子体特性研究提供依据。
Aiming at the discharge characteristics of radio frequency capacitively coupled(CCRF)plasma at moderate pressure and medium power,a one-dimensional plasma discharge model was established by using COMSOL software based on fluid model.The distribution law in plasma electron temperature and electron density were studied at the same pressure and different radio frequency input power with Ar gas as working gas.At the same time,a closed glass cavity and a flat plate electrode of the same size were designed and fabricated according to the simulation model.The effective current,voltage and emission spectrum of the discharge plasma were measured experimentally at different RF input power.The electron temperature and electron density of the plasma were calculated by the current-voltage relationship and the energy balance equation.The electron temperature and electron density of plasma were obtained by Boltzmann double-wire method.When the gas pressure was 250 Pa and the input power was 100-450 W,the plasma voltage and current showed a linear relationship.The electron density increased with the increase of the power,but the electron temperature did not change with the change of the power.At the same time,the accuracy of the experiment was further verified by simulation.In this paper,the discharge parameters of plasma at moderate pressure are preliminarily diagnosed by combining the equivalent circuit method,spectral method and numerical simulation method,and a combination of these three methods is proposed for experiment to make the experimental results more convincing and to provide a basis for further study of plasma characteristics.
Aiming at the discharge characteristics of radio frequency capacitively coupled(CCRF)plasma at moderate pressure and medium power,a one-dimensional plasma discharge model was established by using COMSOL software based on fluid model.The distribution law in plasma electron temperature and electron density were studied at the same pressure and different radio frequency input power with Ar gas as working gas.At the same time,a closed glass cavity and a flat plate electrode of the same size were designed and fabricated according to the simulation model.The effective current,voltage and emission spectrum of the discharge plasma were measured experimentally at different RF input power.The electron temperature and electron density of the plasma were calculated by the current-voltage relationship and the energy balance equation.The electron temperature and electron density of plasma were obtained by Boltzmann double-wire method.When the gas pressure was 250 Pa and the input power was 100-450 W,the plasma voltage and current showed a linear relationship.The electron density increased with the increase of the power,but the electron temperature did not change with the change of the power.At the same time,the accuracy of the experiment was further verified by simulation.In this paper,the discharge parameters of plasma at moderate pressure are preliminarily diagnosed by combining the equivalent circuit method,spectral method and numerical simulation method,and a combination of these three methods is proposed for experiment to make the experimental results more convincing and to provide a basis for further study of plasma characteristics.
引文
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[15]杨龙,王强,阚明先,等.微放电等离子体多负辉区结构融合过程数值模拟研究[J].强激光与粒子束,2017,29:085002.(Yang Long,Wang Qiang,Kan Mingxian,et al.Numerical simulation of multiple negative glow regions in micro discharge plasma.High Power Laser and Particle Beams,2017,29:085002)
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[17]陈春梅,摆玉龙,张洁,等.太赫兹波斜入射到磁化等离子体的数值研究[J].强激光与粒子束,2018,30:013101.(Chen Chunmei,Bai Yulong,Zhang Jie,et al.Numerical study of oblique incidence of terahertz wave to magnetized plasma.High Power Laser and Particle Beams,2018,30:013101)
[18]赵日康,张紫浩,张林,等.圆柱形等离子体对微波散射的数值模拟与实验研究[J].强激光与粒子束,2017,29:053001.(Zhao Rikang,Zhang Zihao,Zhang Lin,et al.Microwave scattering by inhomogeneous plasma column.High Power Laser and Particle Beams,2017,29:053001)
[2]Bredin J,Chabert P,Aanesland A.Langmuir probe analysis of highly electronegative plasmas[J].Applied Physics Letters,2013,102:154107.
[3]Ross J S,Park H S,Berger R.Couisionless coupling of ion and electron temperatures in counter streaming plasma flows[J].Physical Review Letters,2013,110:145005.
[4]Godyak V A.Soviet radio frequency discharge research[M].A:Delphic Associates Inc.,1986:28-52.
[5]Raizer Y P,Gas discharge physics[M].Berlin:Springer,1991:387-394.
[6]Li S Z,Lim J P,Uhm H S.Discharge characteristics of an atmospheric-pressure capacitively couple radio-frequency argon plasma[J].Physics Letter,2006,A360:304-308.
[7]王宇天,张百灵,李益文,等.基于均匀模型的低气压电容耦合射频放电特性研究[J].真空科学与技术学报,2016,36(7):773-778.(Wang Yutian,Zhang Bailing,Li Yiwen,et al.Modeling and characterization of low-pressure capacitive coupled rf discharge properties.Chinese Journal of Vacuum Science and Technology,2016,36(7):773-778)
[8]吴荣,李燕,朱顺管,等.等离子体电子温度的发射光谱法诊断[J].光谱学与光谱分析,2008,28(4):731-735.(Wu Rong,Li Yan,Zhu Shunguan,et al.Emission spectroscopy diagnostics of plasma electron temperature.Spectroscopy and Spectral Analysis,2008,28(4):731-735)
[9]董丽芳,冉俊霞,尹增谦,等.大气压氩气介质阻挡放电中的电子激发温度[J].光谱学与光谱分析,2005,25(8):1184-1186.(Dong Lifang,Ran Junxia,Yin Zengqian,et al.Electron excitation temperature of argon dielectric barrier discharge at atmospheric pressure.Spectroscopy and Spectral Analysis,2005,25(8):1184-1186)
[10]刘大斌,杨栋,蒋荣光,等.导爆管起爆器瞬态电火花温度的光谱法测定[J].光谱学与光谱分析,2002,22(4):670-672.(Liu Dabin,Yang Dong,Jiang Rongguang,et al.Spectroscopic determination of the dynamic electrical spark temperature of nonel tube igniter.Spectroscopy and Spectra Analysis,2002,22(4):670-672)
[11]孙成琪,高阳,杨德明,等.光谱法测量低压热喷涂等离子体的电子温度和电子密度[J].激光与光电子学进展,2015,52:043001.(Sun Chengqi,Gao Yang,Yang Deming,et al.Spectroscopic method for measuring electron temperature and electron density of thermal spray plasma.Laser&Optoelectronics Progress,2015,52:043001)
[12]袁玉章,张军,白珍,等.等离子体对相对论返波管工作影响的粒子模拟[J].强激光与粒子束,2018,30:043002.(Yuan Yuzhang,Zhang Jun,Bai Zhen,et al.Simulation research on influence of RF breakdown plasma on performance of relative backward wave oscillator.High Power Laser and Particle Beams,2018,30:043002)
[13]Chen Guangye,Raja L L.Fluid modeling of electron heating in low-pressure,high-frequency capacitively coupled plasma discharges[J].Journal of Applied Physics,2004,96(11):6073)
[14]杨旺,刘学平,夏焕雄,等.容性耦合等离子体腔室放电特性仿真研究[J].真空科学与技术学报,2015,35(6):639-645.(Yang Wang,Liu Xueping,Xia Huanxiong,et al.Simulation of discharge characteristics of capacitively coupled plasma.Chinese Journal of Vacuum Science and Technology,2015,35(6):639-645)
[15]杨龙,王强,阚明先,等.微放电等离子体多负辉区结构融合过程数值模拟研究[J].强激光与粒子束,2017,29:085002.(Yang Long,Wang Qiang,Kan Mingxian,et al.Numerical simulation of multiple negative glow regions in micro discharge plasma.High Power Laser and Particle Beams,2017,29:085002)
[16]Mouchtouris S,Kokkoris G.A hybrid model for low pressure inductively coupled plasmas combining a fluid model for electrons with a plasma-potential-dependent energy distribution and a fluid-Monte Carlo model for ions[J].Plasma Sources Science and Technology,2016,25:025007.
[17]陈春梅,摆玉龙,张洁,等.太赫兹波斜入射到磁化等离子体的数值研究[J].强激光与粒子束,2018,30:013101.(Chen Chunmei,Bai Yulong,Zhang Jie,et al.Numerical study of oblique incidence of terahertz wave to magnetized plasma.High Power Laser and Particle Beams,2018,30:013101)
[18]赵日康,张紫浩,张林,等.圆柱形等离子体对微波散射的数值模拟与实验研究[J].强激光与粒子束,2017,29:053001.(Zhao Rikang,Zhang Zihao,Zhang Lin,et al.Microwave scattering by inhomogeneous plasma column.High Power Laser and Particle Beams,2017,29:053001)