基于激光干涉测振技术的压电陶瓷蜂鸣片质量监控
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摘要
利用激光干涉技术和干涉条纹大小数拟合计数软件处理方法,研究测量低频微小振动,开展压电陶瓷蜂鸣片质量监控研究。介绍了基于激光干涉技术的振动测量研究方法,分析了压电陶瓷蜂鸣片在正弦电压驱动下,不同初始干涉光程差、不同振幅的振动产生的干涉信号及干涉条纹大小数拟合计数软件处理方法;建立了迈克尔逊干涉测振系统,运用干涉条纹大小数拟合计数软件方法,对不同正弦电压驱动的压电陶瓷蜂鸣片微小振动进行了测量。研究表明,基于大小数拟合计数软件方法的激光干涉测振技术可以有效测量微小振动,为压电陶瓷蜂鸣片质量监控提供一种有效手段。
Laser interferometer, which uses interferometric fringes integral counting and decimal fitting software method to extract the vibration displacement, was employed to measure low-frequency micro-vibrations of piezoelectric ceramic buzzers. The vibration measurement principle on the base of laser interference technique is introduced at the first. Interference signals with various initial optical path differences and vibration amplitudes when the piezoelectric ceramic buzzers are driven by sinusoidal voltage signals are analyzed. The corresponding software processing method for the vibration displacement determination is established. An experimental system was built for the measurement of micro-vibrations of a piezoelectric ceramic buzzer driven by different sinusoidal voltage signals. The results show that the laser interferometer vibration measurement technique based on the interferometric fringes integral counting and decimal fitting software method can efficiently measure micro-vibrations and provide an effective means for quality control of piezoelectric ceramic buzzers.
Laser interferometer, which uses interferometric fringes integral counting and decimal fitting software method to extract the vibration displacement, was employed to measure low-frequency micro-vibrations of piezoelectric ceramic buzzers. The vibration measurement principle on the base of laser interference technique is introduced at the first. Interference signals with various initial optical path differences and vibration amplitudes when the piezoelectric ceramic buzzers are driven by sinusoidal voltage signals are analyzed. The corresponding software processing method for the vibration displacement determination is established. An experimental system was built for the measurement of micro-vibrations of a piezoelectric ceramic buzzer driven by different sinusoidal voltage signals. The results show that the laser interferometer vibration measurement technique based on the interferometric fringes integral counting and decimal fitting software method can efficiently measure micro-vibrations and provide an effective means for quality control of piezoelectric ceramic buzzers.
引文
[1]刘欣.压电陶瓷(PZT)特性的分析及实验测试[D].昆明:昆明理工大学,2007.LIU Xin.Testing and analyzing on characteristic of PZT[D].Kunming:Kunming University of Science&Technotogy,2007.
[2]ZHANG Q F,JIANG S L,YANG T Q.Pyroelectric,dielectric,and piezoelectric properties of Mn O2-doped(Na0.82K0.18)0.5Bi0.5Ti O3 lead-free ceramics[J].Electroceramic,2012,29:8-11.
[3]段小艳,任冬梅.激光干涉法微位移测量技术综述[J].计测技术,2012,36(6):1-5.DUAN Xiao-yan,REN Dong-mei.Review of highresolution measuring method of displacement using laser interferometer[J].Metrology&Measurement Technology,2012,36(6):1-5.
[4]韦丰.激光合成波长干涉纳米测量系统及其信号处理方法的研究[D].杭州:浙江大学,2005.WEI Feng.Study on measurement system and signal processing method of the laser synthetic-wavelength nanomeasurement interferometer[D].Hangzhou:Zhejiang University,2005.
[5]HUANG Yang,DU Zheng-ting,DENG Jia-liang,et al.A study of vibration system characteristics based on laser selfmixing interference effect[J].J Appl Phys,2012,112(2):023106.
[6]LU W.Improving the performance of optical feedback selfmixing interferometry sensing[D].Wollongong,Australia:University of Wollongong,2011.
[7]MOREAU A,BORZA D,NISTEA I.Full-field vibration measurement by time-average speckle interferometry and by doppler vibrometry-a comparison[J].Strain,2008,44(5):386-397.
[8]PEDRINI G,OSTEN W,MIKHAIL E.High-speed digital holographic interferometry for vibration measurement[J].Applied Optics,2006,45(15):3456-3462.
[9]陈本永,吴晓维,李达成.一种新型的干涉条纹软件计数方法及其实现研究[J].传感技术学报,2004,17(3):371-374.CHEN Ben-yong,WU Xiao-wei,LI Da-cheng.A novel software interference fringe-counting method and its realization[J].Chinese Journal of Sensors and Actuators,2004,17(3):371-374.
[10]楚兴春,吕海宝,杜列波.莫尔(干涉)条纹计数细分和辨向技术的研究[J].光学技术,2004,30(4):475-477.CHU Xing-chun,LüHai-bao,DU Lie-bo.New subdivision and direction recogniang method of Moir(interference)fringes[J].Optical Technique,2004,30(4):475-477.
[11]ZHU J,ZHOU H,YI H.Image processing applied to laser holographic interference fringes[C]//Computer Engineering and Technology.Chengdu:[s.n.],2010,3:1132-1135.
[12]赵光兴,陈洪璆,杨国光.干涉条纹的数据拟合方法[J].光学学报,2000,20(6):797-800.ZHAO Guang-xing,CHENG Hong-qiu.YANG Guo-guang.Data fittiig method of interference stripes[J].Acta Optica Sinica,2000,20(6):797-800.
[13]宋松,王向朝,王学锋,等.半导体激光微小振动实时干涉测量仪[J].光学学报,2001,21(5):578-580.SONG Song,WANG Xiang-zhao,WANG Xue-feng,et al.Real-time micro-vibration measurement with a laser diode interferometer[J].Acta Optica Sinica,2001,21(5):578-580.
[2]ZHANG Q F,JIANG S L,YANG T Q.Pyroelectric,dielectric,and piezoelectric properties of Mn O2-doped(Na0.82K0.18)0.5Bi0.5Ti O3 lead-free ceramics[J].Electroceramic,2012,29:8-11.
[3]段小艳,任冬梅.激光干涉法微位移测量技术综述[J].计测技术,2012,36(6):1-5.DUAN Xiao-yan,REN Dong-mei.Review of highresolution measuring method of displacement using laser interferometer[J].Metrology&Measurement Technology,2012,36(6):1-5.
[4]韦丰.激光合成波长干涉纳米测量系统及其信号处理方法的研究[D].杭州:浙江大学,2005.WEI Feng.Study on measurement system and signal processing method of the laser synthetic-wavelength nanomeasurement interferometer[D].Hangzhou:Zhejiang University,2005.
[5]HUANG Yang,DU Zheng-ting,DENG Jia-liang,et al.A study of vibration system characteristics based on laser selfmixing interference effect[J].J Appl Phys,2012,112(2):023106.
[6]LU W.Improving the performance of optical feedback selfmixing interferometry sensing[D].Wollongong,Australia:University of Wollongong,2011.
[7]MOREAU A,BORZA D,NISTEA I.Full-field vibration measurement by time-average speckle interferometry and by doppler vibrometry-a comparison[J].Strain,2008,44(5):386-397.
[8]PEDRINI G,OSTEN W,MIKHAIL E.High-speed digital holographic interferometry for vibration measurement[J].Applied Optics,2006,45(15):3456-3462.
[9]陈本永,吴晓维,李达成.一种新型的干涉条纹软件计数方法及其实现研究[J].传感技术学报,2004,17(3):371-374.CHEN Ben-yong,WU Xiao-wei,LI Da-cheng.A novel software interference fringe-counting method and its realization[J].Chinese Journal of Sensors and Actuators,2004,17(3):371-374.
[10]楚兴春,吕海宝,杜列波.莫尔(干涉)条纹计数细分和辨向技术的研究[J].光学技术,2004,30(4):475-477.CHU Xing-chun,LüHai-bao,DU Lie-bo.New subdivision and direction recogniang method of Moir(interference)fringes[J].Optical Technique,2004,30(4):475-477.
[11]ZHU J,ZHOU H,YI H.Image processing applied to laser holographic interference fringes[C]//Computer Engineering and Technology.Chengdu:[s.n.],2010,3:1132-1135.
[12]赵光兴,陈洪璆,杨国光.干涉条纹的数据拟合方法[J].光学学报,2000,20(6):797-800.ZHAO Guang-xing,CHENG Hong-qiu.YANG Guo-guang.Data fittiig method of interference stripes[J].Acta Optica Sinica,2000,20(6):797-800.
[13]宋松,王向朝,王学锋,等.半导体激光微小振动实时干涉测量仪[J].光学学报,2001,21(5):578-580.SONG Song,WANG Xiang-zhao,WANG Xue-feng,et al.Real-time micro-vibration measurement with a laser diode interferometer[J].Acta Optica Sinica,2001,21(5):578-580.