基于时空转换法的正弦波光栅尺位移测量系统设计
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摘要
光栅尺作为高精度位置测量仪器,其分辨率受制于超精密的空间刻划技术,测量精度急需通过电子学细分法来提高。为此,提出了"时空转换"的思想:借助于载波调制理论,引入了恒定的时空当量,将对空间位移的测量转换为对信号瞬时周期的测量。首先,进行了时空转换法的数学推导,探究了正弦波光栅尺位移的测定和移动方向的判别方法;然后,在DSP开发平台下,搭建出基于时空转换法的正弦波光栅尺位移测量系统;最后,从实验数据以及光栅信号的残余直流电平、幅值不均衡、相位不正交等方面进行了误差分析。实验表明:栅距为8mm的正弦波光栅尺,在时空转换法下,平均测量误差为±0.258 1μm,兼顾了细分与辨向。
A grating has been viewed as the high-precision position measuring instrument,however,its resolution islimited by the spatial characterization based on ultraprecise technology.Therefore,the measuring accuracy need tobe improved by the electronics subdivision urgently.Time-space conversion method has been proposed in this paper.Based on carrier modulation theory and the spatial equivalent constant,measuring displacement is converted to themeasurement of instantaneous signal cycle.Firstly,the mathematical derivation for time-space conversion method isconducted.Furthermore,the identification method for sine-wave grating displacement and its moving direction is ex-plored.Then,displacement measurement system for sine-wave grating based on time-space conversion method is es-tablished under DSP platform.Finally,the error has been analyzed based on experimental data and raster signals,such as residual DC level,amplitude imbalance and non-orthogonal phase.As for the sine-wave grating with a grat-ing pitch of 8 mm,experimental results show that the average measuring error of the time-space conversion methodis ±0.258 1 mm,meanwhile,the subdivision and the direction discrimination are contained.
A grating has been viewed as the high-precision position measuring instrument,however,its resolution islimited by the spatial characterization based on ultraprecise technology.Therefore,the measuring accuracy need tobe improved by the electronics subdivision urgently.Time-space conversion method has been proposed in this paper.Based on carrier modulation theory and the spatial equivalent constant,measuring displacement is converted to themeasurement of instantaneous signal cycle.Firstly,the mathematical derivation for time-space conversion method isconducted.Furthermore,the identification method for sine-wave grating displacement and its moving direction is ex-plored.Then,displacement measurement system for sine-wave grating based on time-space conversion method is es-tablished under DSP platform.Finally,the error has been analyzed based on experimental data and raster signals,such as residual DC level,amplitude imbalance and non-orthogonal phase.As for the sine-wave grating with a grat-ing pitch of 8 mm,experimental results show that the average measuring error of the time-space conversion methodis ±0.258 1 mm,meanwhile,the subdivision and the direction discrimination are contained.
引文
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[2]陶仁浩.基于增量式光电编码器的高精度位置检测技术研究[D].南京:南京航空航天大学,2012.
[3]郑忠杰,陈德传.正弦波光栅尺信号的方波相移式细分法及应用[J].传感技术学报,2014,27(10):1437-1442.
[4]李大鹏,徐东明,陈文宣.基于门延时的数字TDC电路设计[J].中国集成电路,2011,20(7):37-40.
[5]杨俊.基于TDC与FPGA精密时间测量技术的研究与应用[D].武汉:中国科学院武汉物理与数学研究所,2012.
[6]冉扬洁,江中伟,杨继森,等.基于TDC-GP2的高速时栅位移传感器信号处理系统的研究[J].传感技术学报,2014,27(12):1654-1658.
[7]郭雨梅,崔晋玲,刘雪艳,等.锁相式莫尔条纹信号细分方法[J].哈尔滨工业大学报,2007,39(9):1496-1498.
[8]邵毅全,何强,赵杨,等.基于二阶滤波器的高阶带通滤波器设计和仿真[J].激光杂志,2013,34(1):25-27.
[9]陈本永,吴晓维,张建新.精密直线位移工作台单神经元自适应PID控制方法研究[J].传感技术学报,2004,12(4):583-586.
[10]Yao Fengjia.Design of Vehicle Speed Controller Based on Incremental Photoelectric Encoder[J].Internet of things Technologies,2013(4):16-19.
[11]张志刚.光电编码器细分误差分析及补偿研究[D].哈尔滨:哈尔滨工业大学,2010.
[12]郭雨梅,崔晋玲.乘法倍频对锁相式莫尔条纹信号细分方法的改进[J].上海交通大学学报,2009(5):837-840.
[13]苏东风.高精度标定转台光栅测角系统关键技术研究[D].长春:中国科学院长春光学精密机械与物理研究所,2011.
[14]高旭,万秋华,赵长海,等.莫尔条纹光电信号正交性偏差的实时补偿[J].光学精密工程,2014,22(1):213-219.