压电微夹钳的迟滞及蠕变补偿
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摘要
为提高压电微夹钳的操作精度,对其迟滞及蠕变误差进行补偿。基于压电材料迟滞曲线的非对称性,为提高微夹钳迟滞模型的精度,采用升回程分别建模的方法,建立了微夹钳的Prandtl-Ishlinskii(PI)迟滞模型,对迟滞误差进行了补偿。在综合考虑模型简单且具有较高精度的前提下,采用二阶惯性环节建立了微夹钳的蠕变模型,设计出无需求蠕变逆模型的补偿器,对蠕变误差进行了补偿。实验结果表明,在最大位移为120μm时,钳指位移的迟滞误差由补偿前的-11.8～10.7μm减小为-1.7～1.0μm;在900 s作用时间内,钳指位移的蠕变由补偿前的4μm几乎减小为0。
In order to improve the operation precision of the piezoelectric micro-gripper, the hysteresis and creep errors are compensated. Based on the asymmetry of hysteresis curve of piezoelectric materials, the Prandtl-Ishlinskii(PI) hysteresis model of micro-gripper is established by using the modeling method of lift back to improve the precision of the hysteresis model of the micro-gripper, and the hysteresis error is compensated. Under the premise of considering the simplicity and accuracy of the model, the creep model of micro-gripper is established by using the two-order inertial links, and a compensator with no demand of the creep inverse model is designed to compensate the creep error. The hysteresis and creep compensation experimental results show that the hysteresis displacement error of the micro-gripper finger is reduced from-11.8～10.7 μm before compensation to-1.7～1.0 μm when the maximum displacement is 120 μm. During the action time of 900 s, the creep of the micro-gripper finger is almost reduced from 4 μm before compensation to 0.
In order to improve the operation precision of the piezoelectric micro-gripper, the hysteresis and creep errors are compensated. Based on the asymmetry of hysteresis curve of piezoelectric materials, the Prandtl-Ishlinskii(PI) hysteresis model of micro-gripper is established by using the modeling method of lift back to improve the precision of the hysteresis model of the micro-gripper, and the hysteresis error is compensated. Under the premise of considering the simplicity and accuracy of the model, the creep model of micro-gripper is established by using the two-order inertial links, and a compensator with no demand of the creep inverse model is designed to compensate the creep error. The hysteresis and creep compensation experimental results show that the hysteresis displacement error of the micro-gripper finger is reduced from-11.8～10.7 μm before compensation to-1.7～1.0 μm when the maximum displacement is 120 μm. During the action time of 900 s, the creep of the micro-gripper finger is almost reduced from 4 μm before compensation to 0.
引文
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[3] 李朋志,葛川,苏志德,等.基于动态模糊系统模型的压电陶瓷驱动器控制[J].光学精密工程,2013,21(2):394-399.LI Pengzhi, GE Chuan, SU Zhide, et al.Control of piezoceramic actuator based on dynamic fuzzy system model[J].Optical Precision Engineering,2013,21(2):394-399.
[4] LIU Y, SHAN J, QI N. Creep modeling and identification for piezoelectric actuators based on fractional-order system[J].Mechatronics,2013,23(7):840-847.
[5] ORSZULIK R R,SHAN J.Output feedback integral control of piezoelectric sctuators considering hysteresis[J].Precision Engineering,2016,47:90-96.
[6] ZHU W,RUI X T.Hysteresis modeling and displacement control of piezoelectric actuators with the frequency-dependent behavior using a generalized Bouc-Wen model[J].Precision Engineering,2016,43:299-307.
[7] 赵广义,王伟国,李博,等.压电陶瓷迟滞逆模型的前馈PID控制[J].压电与声光,2014,36(6):914-916.ZHAO Guangyi,WANG Weiguo,LI Bo,et al.Feedforward PID control for piezoceramic hysteresis inverse model[J]. Piezoelectrics & Acoustooptics,2014,36(6):914-916.
[8] WANG X, POMMIER-BUDINGER V, REYSSET A,et al. Simultaneous compensation of hysteresis and creep in a single piezoelectric actuator by open-loop control for quasi-static space active optics applications[J].Control Engineering Practice,2014,33:48-62.