提高夏克-哈特曼波前传感器光斑质心的定位精度
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摘要
提出了一种提高夏克-哈特曼波前传感器光斑质心的定位精度算法,分析了光斑质心的探测误差,采用与光斑尺寸匹配的探测窗口及插值法提高了图像的分辨率,并使用二阶矩算法计算了质心位置。采用该算法对含有噪声的光斑图进行图像处理与计算,并给出了待测件的波前重构示意图。结果表明,相对于传统算法,该算法将质心的探测精度提高了约0.8倍。
An algorithm to improve the positioning accuracy of spot centroid for Shack-Hartmann wavefront sensor is proposed.The detection errors of spot centroid are analyzed.The image resolution is improved by utilizing the detection window whose size is matched with that of spot and using the interpolation method.The centroid position is calculated by the two-order moment algorithm.The proposed algorithm is used to process and calculate the spot images with noise and the wavefront reconstruction diagram of the test component is also presented.The results show that,compared with the traditional algorithm,the proposed algorithm improves the detection accuracy of centroid by about 0.8times.
An algorithm to improve the positioning accuracy of spot centroid for Shack-Hartmann wavefront sensor is proposed.The detection errors of spot centroid are analyzed.The image resolution is improved by utilizing the detection window whose size is matched with that of spot and using the interpolation method.The centroid position is calculated by the two-order moment algorithm.The proposed algorithm is used to process and calculate the spot images with noise and the wavefront reconstruction diagram of the test component is also presented.The results show that,compared with the traditional algorithm,the proposed algorithm improves the detection accuracy of centroid by about 0.8times.
引文
[1]Li Jing,Gong Yan,Hu Xinrong,et al.A high-precision centroid detecting method for Hartmann-Shack wavefront sensor[J].Chinese J Lasers,2014,41(3):0316002.李晶,巩岩,呼新荣,等.哈特曼夏克波前传感器的高精度质心探测方法[J].中国激光,2014,41(3):0316002.
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[4]Li Wenjie,Mu Quanquan,Wang Shaoxin,et al.High precision regulating mechanism of Hartmann detector[J].Optics and Precision Engineering,2015,23(10):2852-2859.李文杰,穆全全,王少鑫,等.哈特曼探测器的高精度调节机构[J].光学精密工程,2015,23(10):2852-2859.
[5]Zhang Hao,Yan Feng,Wei Haisong,et al.Error analysis of scanning Hartmann wavefront detection[J].Laser&Optoelectronics Progress,2016,53(11):111203.张昊,闫锋,魏海松,等.扫描哈特曼波前检测技术的误差分析研究[J].激光与光电子学进展,2016,53(11):111203.
[6]Wang Yanping,Wang Qianqian,Ma Chong.Research on calibration method of Hartmann wavefront analyzer[J].Chinese J Lasers,2015,42(1):0108003.王艳萍,王茜倩,马冲.哈特曼波前分析仪校准方法研究[J].中国激光,2015,42(1):0108003.
[7]Xia Aili,Ma Caiwen.High precision measurement of spot centroid based on image processing technology[J].Journal of Optoelectronics Laser,2011,22(10):1542-1545.夏爱利,马彩文.基于图像处理技术的光斑质心高精度测量[J].光电子激光,2011,22(10):1542-1545.
[8]Liang Chun,Liao Wenhe,Shen Jianxin,et al.An adaptive detecting centroid method for Hartmann-Shack wavefront sensor[J].Chinese J Lasers,2009,36(2):430-434.梁春,廖文和,沈建新,等.Hartmann-Shack波前传感器的自适应质心探测力法[J].中国激光,2009,36(2):430-434.
[9]Cao G R,Yu X.Accuracy analysis of a Hartmann-Shack wavefront sensor operated with a faint object[J].Optical Engineering,1994,33(7):2331-2335.
[10]Shen Feng,Jiang Hanwen.Detection error of wavefront phase of shack Hartmann wavefront sensor[J].Acta Optica Sinica,2000,20(5):666-671.沈峰,姜汉文.夏克-哈特曼波前传感器的波前相位探测误差[J].光学学报,2000,20(5):666-671.
[11]Yan Peiguo,Liu Shuchang,Wang Xiaoman.Automatic precise positioning of the spot of Hartmann wavefront sensor[J].Journal of Changchun University of Science and Technology,2013,36(5):123-126.颜佩国,刘树昌,王晓曼.夏克一哈特曼波前传感器光斑自动精确定位[J].长春理工大学学报,2013,36(5):123-126.
[12]Ren Jianfeng,Rao Changhui,Li Mingquan.An adaptive threshold selection method for Hartmann-Shack wavefront sensor images[J].Optoelectronic Engineering Journal,2002,29(1):1-5.任剑峰,饶长辉,李明全.一种Hartmann-Shack波前传感器图像的自适应阈值选取方法[J].光电工程,2002,29(1):1-5.
[13]Zhou Wenchao,Peng Yong,You Anqing.A computational method to improve the centroid detection accuracy of Hartmann wavefront sensor[J].Laser&Optoelectronics Progress,2012,49(6):061203.周文超,彭勇,游安清.提高哈特曼波前传感器质心探测精度的一种计算方法[J].激光与光电子学进展,2012,49(6):061203.
[14]Xia Aili,Ma Caiwen.Higher order moment method for improving the accuracy of wavefront sensing[J].Infrared and Laser Engineering,2012,41(1):472-477.夏爱利,马彩文.提高波前探测精度的高阶矩方法[J].红外与激光工程,2012,41(1):472-477.
[2]Xie Hongsheng,Yang Lebao,Li Dayu,et al.Influence of chromatic aberration on Shack-Hartmann wavefront sensor[J].Laser&Optoelectronics Progress,2015,52(3):030801.解洪升,杨乐宝,李大禹,等.人眼色差对夏克-哈特曼波前探测器的影响[J].激光与光电子学进展,2015,52(3):030801.
[3]Zhu X,Hu S,Zhao L.Wafer focusing measurement of optical lithography system based on Hartmann-Shack wavefront testing[J].Optics and Lasers in Engineering,2015,66:128-131.
[4]Li Wenjie,Mu Quanquan,Wang Shaoxin,et al.High precision regulating mechanism of Hartmann detector[J].Optics and Precision Engineering,2015,23(10):2852-2859.李文杰,穆全全,王少鑫,等.哈特曼探测器的高精度调节机构[J].光学精密工程,2015,23(10):2852-2859.
[5]Zhang Hao,Yan Feng,Wei Haisong,et al.Error analysis of scanning Hartmann wavefront detection[J].Laser&Optoelectronics Progress,2016,53(11):111203.张昊,闫锋,魏海松,等.扫描哈特曼波前检测技术的误差分析研究[J].激光与光电子学进展,2016,53(11):111203.
[6]Wang Yanping,Wang Qianqian,Ma Chong.Research on calibration method of Hartmann wavefront analyzer[J].Chinese J Lasers,2015,42(1):0108003.王艳萍,王茜倩,马冲.哈特曼波前分析仪校准方法研究[J].中国激光,2015,42(1):0108003.
[7]Xia Aili,Ma Caiwen.High precision measurement of spot centroid based on image processing technology[J].Journal of Optoelectronics Laser,2011,22(10):1542-1545.夏爱利,马彩文.基于图像处理技术的光斑质心高精度测量[J].光电子激光,2011,22(10):1542-1545.
[8]Liang Chun,Liao Wenhe,Shen Jianxin,et al.An adaptive detecting centroid method for Hartmann-Shack wavefront sensor[J].Chinese J Lasers,2009,36(2):430-434.梁春,廖文和,沈建新,等.Hartmann-Shack波前传感器的自适应质心探测力法[J].中国激光,2009,36(2):430-434.
[9]Cao G R,Yu X.Accuracy analysis of a Hartmann-Shack wavefront sensor operated with a faint object[J].Optical Engineering,1994,33(7):2331-2335.
[10]Shen Feng,Jiang Hanwen.Detection error of wavefront phase of shack Hartmann wavefront sensor[J].Acta Optica Sinica,2000,20(5):666-671.沈峰,姜汉文.夏克-哈特曼波前传感器的波前相位探测误差[J].光学学报,2000,20(5):666-671.
[11]Yan Peiguo,Liu Shuchang,Wang Xiaoman.Automatic precise positioning of the spot of Hartmann wavefront sensor[J].Journal of Changchun University of Science and Technology,2013,36(5):123-126.颜佩国,刘树昌,王晓曼.夏克一哈特曼波前传感器光斑自动精确定位[J].长春理工大学学报,2013,36(5):123-126.
[12]Ren Jianfeng,Rao Changhui,Li Mingquan.An adaptive threshold selection method for Hartmann-Shack wavefront sensor images[J].Optoelectronic Engineering Journal,2002,29(1):1-5.任剑峰,饶长辉,李明全.一种Hartmann-Shack波前传感器图像的自适应阈值选取方法[J].光电工程,2002,29(1):1-5.
[13]Zhou Wenchao,Peng Yong,You Anqing.A computational method to improve the centroid detection accuracy of Hartmann wavefront sensor[J].Laser&Optoelectronics Progress,2012,49(6):061203.周文超,彭勇,游安清.提高哈特曼波前传感器质心探测精度的一种计算方法[J].激光与光电子学进展,2012,49(6):061203.
[14]Xia Aili,Ma Caiwen.Higher order moment method for improving the accuracy of wavefront sensing[J].Infrared and Laser Engineering,2012,41(1):472-477.夏爱利,马彩文.提高波前探测精度的高阶矩方法[J].红外与激光工程,2012,41(1):472-477.