TRIZ理论在真空热处理测量装置研究中的应用
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摘要
在真空热处理测量装置中,传统的四极质谱计由于结构缺陷存在残余气体检测不充分的问题,而标准真空计和被校真空计之间使用的T型三通同样由于结构问题存在真空度检测效率低的问题,导致大容量真空炉的真空度和残余气体测不准。文章从TRIZ理论方法的角度出发,对传统的四极质谱计结构进行不对称式优化,将T型三通变为球面结构并作加热和气压控制改进,优化和改进提高了真空热处理测量装置的工作效率。
In the vacuum heat treatment unit,the traditional quadrupole mass spectrometer( QMS) has the problem of inadequate residual gas detection due to structural defects,and the connector between the standard vacuum gauge and the vacuum gauge to be calibrated also has low vacuum detection efficiency due to structural problems,which leads to the inaccurate measurements of vacuum degree and residual gas in the large-capacity vacuum furnace. This article starts with TRIZ theory to make an asymmetric optimization of the structure of QMS,and transforms the T-shaped structure into a spherical structure and improves the heating and pressure control. The efficiency of vacuum heat treatment measuring device has been improved by the optimization and improvement.
In the vacuum heat treatment unit,the traditional quadrupole mass spectrometer( QMS) has the problem of inadequate residual gas detection due to structural defects,and the connector between the standard vacuum gauge and the vacuum gauge to be calibrated also has low vacuum detection efficiency due to structural problems,which leads to the inaccurate measurements of vacuum degree and residual gas in the large-capacity vacuum furnace. This article starts with TRIZ theory to make an asymmetric optimization of the structure of QMS,and transforms the T-shaped structure into a spherical structure and improves the heating and pressure control. The efficiency of vacuum heat treatment measuring device has been improved by the optimization and improvement.
引文
[1]洪宝林.力学计量[M].北京:原子能出版社,2002.
[2]赵朝前.力学计量[M].北京:中国计量出版社,2004.
[3]李得天.真空计量新技术[M].北京:机械工业出版社,2013.
[4]刘训涛,曹贺,陈国晶. TRIZ理论及应用[M].北京:北京大学出版社,2011.
[5]成思源,周金平.技术创新方法—TRIZ理论及应用[M].北京:清华大学出版社,2014.
[6](韩)金昊宗.实用TRIZ研究与实践[M].北京:中国科学技术出版社,2014.
[7]朱萍.四极质谱计数据采集及处理系统的设计[D].江苏:东南大学,2004.
[8]成永军.极高真空校准室内残余气体的成分分析[J].真空科学与技术学报,2010,30(1):54-59.
[9]卢耀文,陈旭,李得天,等.复合型便携式真空计校准装置[J].真空科学与技术学报,2013,50(3):1-5.
[10]国家质量技术监督局. JJF 1062-1999电离真空计校准规范[S].北京,1999.
[2]赵朝前.力学计量[M].北京:中国计量出版社,2004.
[3]李得天.真空计量新技术[M].北京:机械工业出版社,2013.
[4]刘训涛,曹贺,陈国晶. TRIZ理论及应用[M].北京:北京大学出版社,2011.
[5]成思源,周金平.技术创新方法—TRIZ理论及应用[M].北京:清华大学出版社,2014.
[6](韩)金昊宗.实用TRIZ研究与实践[M].北京:中国科学技术出版社,2014.
[7]朱萍.四极质谱计数据采集及处理系统的设计[D].江苏:东南大学,2004.
[8]成永军.极高真空校准室内残余气体的成分分析[J].真空科学与技术学报,2010,30(1):54-59.
[9]卢耀文,陈旭,李得天,等.复合型便携式真空计校准装置[J].真空科学与技术学报,2013,50(3):1-5.
[10]国家质量技术监督局. JJF 1062-1999电离真空计校准规范[S].北京,1999.