底层隔板法壁面剪应力测量技术研究与发展
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摘要
介绍了机械式底层隔板测量流体壁面剪应力的基本原理。重点阐述了基于微机电系统(MEMS)的微型底层隔板的集成化结构及其工作原理,介绍了其研究发展及测试应用情况。最后,简要分析了常规剪应力微传感器在高温测试方面的弊端,并结合已有高温摩阻测试研究,提出了未来壁面剪应力测量技术的发展方向。
This paper is a review of the sublayer fence for wall shear stress measurements in the turbulent boundary layer.A summary is presented of the main techniques for determining the skin friction that makes the sublayer-fence gauge an attractive approach for use in such environments.The directional surface-fence gauge for three-dimensional turbulent boundary layer measurements is also introduced.The micro sublayer fence utilizing Micro Electro-Mechanical Systems(MEMS)technology is a promising approach,and many concepts have been proposed.Finally,challenges faced in the development of process techniques are also outlined.
This paper is a review of the sublayer fence for wall shear stress measurements in the turbulent boundary layer.A summary is presented of the main techniques for determining the skin friction that makes the sublayer-fence gauge an attractive approach for use in such environments.The directional surface-fence gauge for three-dimensional turbulent boundary layer measurements is also introduced.The micro sublayer fence utilizing Micro Electro-Mechanical Systems(MEMS)technology is a promising approach,and many concepts have been proposed.Finally,challenges faced in the development of process techniques are also outlined.
引文
[1]戴昌晖,刘天舒,滕永光,等.湍流附面层壁面摩擦应力的测量方法[J].航空学报,1988,9(5):3-10.Dai C H,Liu T S,Teng Y G,et al.Measureing techniques for wall shearing stress in turbulent boundary layer[J].Acta Aeronautica et Astronautica Sinica,1988,9(5):3-10.
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[3]Patel V C.Calibration of the Preston tube and limitations on its use in pressure gradients[J].Journal of Fluid Mechanics,1965,23(1):185-208.
[4]Vagt J D,Fernholz H.Use of surface fences to measure wall shear stress in three-dimensional boundary layers[J].The Aeronautical Quarterly,1973,24(2):87-91.
[5]Fiore A,Scaggs N.Calibration of a boundary layer fence technique for surface shear stress measurements in a compressible flow field[J].Injury-international Journal of the Care of the Injured,2013,47(1):77-82.
[6]Nitsche W,Haberland C,Thuenker R.Comparative investigations on friction drag measuring techniques in experimental aerodynamics[C].Icas Congress,1984.
[7]Higuchi H.A miniature,directional surface-fence gage for three-dimensional turbulent boundary layer measurements[C].16th Fluid and Plasmadynamics Conference,1983:1722.
[8]Higuchi H.A miniature,directional surface-fence gage[J].AIAA Journal,1985,23(8):1195-1196.
[9]Higuchi H,Peake D J.Bi-directional,buried-wire skin-friction gage[R].NASA TM-78531,1978.
[10]Fernholz H H,Janke G,Schober M,et al.New developments and applications of skin-friction measuring techniques[J].Measurement Science&Technology,1996,7(10):1-2.
[11]Papen T V,Steffes H,Ngo H D,et al.A micro surface fence probe for the application in flow reversal areas[J].Sensors&Actuators A:Physical,2002,s 97-98(01):264-270.
[12]Schober M,Obermeier E,Pirskawetz S,et al.A MEMS skinfriction sensor for time resolved measurements in separated flows[J].Experiments in Fluids,2004,36(4):593-599.
[13]Papen T V,Buder U,Ngo H D,et al.A second generation MEMS surface fence sensor for high resolution wall shear stress measurement[J].Sensors&Actuators A:Physical,2004,113(2):151-155.
[14]Schiffer M,Obermeier E,Grewe F,et al.Aero MEMS surface fence for wall shear stress measurements in turbulent flows[C].AIAA Aerospace Sciences Meeting and Exhibit,2006.
[15]孙海浪,马炳和,邓进军,等.壁面剪应力测量底层隔板数学模型研究[J].航空工程进展,2012,3(3):373-378.Sun H L,Ma B H,Deng J J,et al.Study on mathematical model of sub-layer fence for wall shear stress measurement[J].Advances in Aeronautical Science and Engineering,2012,3(3):373-378.
[16]Ma B H,Ma C Y.A MEMS surface fence for wall shear stress measurement with high sensitivity[J].Microsystem Technologies,2016,22(2):239-246.
[17]马骋宇,马炳和,孙海浪,等.面向壁面剪应力测量的底层隔板微敏感结构设计与制造[J].航空学报,2013,34(4):963-969.Ma C Y,Ma B H,Sun H L,et al.Design and fabrication of sensitive elements of sublayer fence for wall shear stress sensor[J].Acta Aeronautica et Astronautica Sinica,2013,34(4):963-969.
[18]Savelsberg R,Schiffer M,Obermeier E,et al.Calibration and use of a MEMS surface fence for wall shear stress measurements in turbulent flows[J].Experiments in Fluids,2012,53(2):77-80.
[19]Schlichting H.Boundary-layer theory[M].New York:McGrawHill,1979.
[20]Ma C,Ma B,Deng J,et al.A study of directional MEMS dualfences gauge[C].IEEE International Conference on Nano/micro Engineered and Molecular Systems,2015.
[21]Ma B H,Ren J Z,Deng J J,et al.Flexible thermal sensor array on PI film substrate for underwater applications[C].The 23rd IEEE International Conference on Micro Electro Mechanical System,Hongkong,2010:679-682.
[22]Ma B H,Zhao J G,Deng J J,et al.Fabrication of flexible hot film sensor array and its optimization[J].Guangxue Jingmi Gongcheng/Optics&Precision Engineering,2009,17(8):1971-1977.
[23]Lyu H H,Jiang C Y,Deng J J,et al.Design of micro sensor for wall shear stress measurement[J].Journal of Mechanical Engineering,2010,46(24):54-60.
[24]Padmanabhan A,Sheplak M,Breuer K S,et al.Micromachined sensors for static and dynamic shear-stress measurements in aerodynamic flows[C].Digest of Technical Papers,Transducer’97,The 9th International Conference on Solid State Sensors&Actuators,1997.
[25]Omid A,Julio S.A film-based wall shear stress sensor for wallbounded turbulent flows[J].Experiments in Fluids,2011,51(1):137-147.
[26]Crafton J W,Fonov S D,Jones E G,et al.Measurements of skin friction in water using surface stress sensitive films[J].Measurement Science and Technology,2008,19(7):075801.
[27]Sergey F,Grant J,et al.The development of optical techniques for the measurement of pressure and skin friction[J].Measurement Science and Technology,2006,17(6):1261-1268.
[28]Brücker Ch,Spatz J,Schr9der W.Feasability study of wall shear stress imaging using microstructured surfaces with flexible micropillars[J].Experiments in Fluids,2005,39(2):464-474.
[29]Grobe S,Schroder W.The micro-pillar shear-stress sensor MPS3for turbulent flow[J].Sensors,2009,9(4):2222-2251.
[30]Gnanamanickam E P,Sullivan J P.Manufacture of high aspect ratio micro-pillar wall shear stress sensor arrays[J].Journal of Micromechanics&Microengineering,2012,22(12):125015.
[31]Gnanamanickam E P,Nottebrock B,Groe S,et al.Measurement of turbulent wall shear-stress using micro-pillars[J].Measurement Science&Technology,2013,24(12):124002-124016.
[32]Taira T,Sadatake T,Kenji K,et al.Skin-friction measurements in supersonic combustion flows of a scramjet combustor[C].AIAA/ASME/SAE/ASEE Joint Propulsion Conference&Exhibit,2008.
[33]Tsuru T,Tomioka S,Yamasaki H.Accuracy of direct skinfriction measurements in high-enthalpy supersonic flows[J].AIAA Journal,2011,49(6):1267-1271.
[34]Meritt R J,Schetz J A,Donbar J M,et al.Skin friction sensor for high-speed,high-enthalpy scramjet flow applications[C].AIAA/ASME/SAE/ASEE Joint Propulsion Conference,2014.
[35]Meritt R J,Schetz J A.Skin friction sensor development,validation,and application for high-speed,high-enthalpy flow conditions[J].Journal of Propulsion&Power,2016,32(4):1-13.
[2]Konstantinov N I,Dragnysh G L.The measurement of friction stress on a surface[J].DSIR RTS,1960.
[3]Patel V C.Calibration of the Preston tube and limitations on its use in pressure gradients[J].Journal of Fluid Mechanics,1965,23(1):185-208.
[4]Vagt J D,Fernholz H.Use of surface fences to measure wall shear stress in three-dimensional boundary layers[J].The Aeronautical Quarterly,1973,24(2):87-91.
[5]Fiore A,Scaggs N.Calibration of a boundary layer fence technique for surface shear stress measurements in a compressible flow field[J].Injury-international Journal of the Care of the Injured,2013,47(1):77-82.
[6]Nitsche W,Haberland C,Thuenker R.Comparative investigations on friction drag measuring techniques in experimental aerodynamics[C].Icas Congress,1984.
[7]Higuchi H.A miniature,directional surface-fence gage for three-dimensional turbulent boundary layer measurements[C].16th Fluid and Plasmadynamics Conference,1983:1722.
[8]Higuchi H.A miniature,directional surface-fence gage[J].AIAA Journal,1985,23(8):1195-1196.
[9]Higuchi H,Peake D J.Bi-directional,buried-wire skin-friction gage[R].NASA TM-78531,1978.
[10]Fernholz H H,Janke G,Schober M,et al.New developments and applications of skin-friction measuring techniques[J].Measurement Science&Technology,1996,7(10):1-2.
[11]Papen T V,Steffes H,Ngo H D,et al.A micro surface fence probe for the application in flow reversal areas[J].Sensors&Actuators A:Physical,2002,s 97-98(01):264-270.
[12]Schober M,Obermeier E,Pirskawetz S,et al.A MEMS skinfriction sensor for time resolved measurements in separated flows[J].Experiments in Fluids,2004,36(4):593-599.
[13]Papen T V,Buder U,Ngo H D,et al.A second generation MEMS surface fence sensor for high resolution wall shear stress measurement[J].Sensors&Actuators A:Physical,2004,113(2):151-155.
[14]Schiffer M,Obermeier E,Grewe F,et al.Aero MEMS surface fence for wall shear stress measurements in turbulent flows[C].AIAA Aerospace Sciences Meeting and Exhibit,2006.
[15]孙海浪,马炳和,邓进军,等.壁面剪应力测量底层隔板数学模型研究[J].航空工程进展,2012,3(3):373-378.Sun H L,Ma B H,Deng J J,et al.Study on mathematical model of sub-layer fence for wall shear stress measurement[J].Advances in Aeronautical Science and Engineering,2012,3(3):373-378.
[16]Ma B H,Ma C Y.A MEMS surface fence for wall shear stress measurement with high sensitivity[J].Microsystem Technologies,2016,22(2):239-246.
[17]马骋宇,马炳和,孙海浪,等.面向壁面剪应力测量的底层隔板微敏感结构设计与制造[J].航空学报,2013,34(4):963-969.Ma C Y,Ma B H,Sun H L,et al.Design and fabrication of sensitive elements of sublayer fence for wall shear stress sensor[J].Acta Aeronautica et Astronautica Sinica,2013,34(4):963-969.
[18]Savelsberg R,Schiffer M,Obermeier E,et al.Calibration and use of a MEMS surface fence for wall shear stress measurements in turbulent flows[J].Experiments in Fluids,2012,53(2):77-80.
[19]Schlichting H.Boundary-layer theory[M].New York:McGrawHill,1979.
[20]Ma C,Ma B,Deng J,et al.A study of directional MEMS dualfences gauge[C].IEEE International Conference on Nano/micro Engineered and Molecular Systems,2015.
[21]Ma B H,Ren J Z,Deng J J,et al.Flexible thermal sensor array on PI film substrate for underwater applications[C].The 23rd IEEE International Conference on Micro Electro Mechanical System,Hongkong,2010:679-682.
[22]Ma B H,Zhao J G,Deng J J,et al.Fabrication of flexible hot film sensor array and its optimization[J].Guangxue Jingmi Gongcheng/Optics&Precision Engineering,2009,17(8):1971-1977.
[23]Lyu H H,Jiang C Y,Deng J J,et al.Design of micro sensor for wall shear stress measurement[J].Journal of Mechanical Engineering,2010,46(24):54-60.
[24]Padmanabhan A,Sheplak M,Breuer K S,et al.Micromachined sensors for static and dynamic shear-stress measurements in aerodynamic flows[C].Digest of Technical Papers,Transducer’97,The 9th International Conference on Solid State Sensors&Actuators,1997.
[25]Omid A,Julio S.A film-based wall shear stress sensor for wallbounded turbulent flows[J].Experiments in Fluids,2011,51(1):137-147.
[26]Crafton J W,Fonov S D,Jones E G,et al.Measurements of skin friction in water using surface stress sensitive films[J].Measurement Science and Technology,2008,19(7):075801.
[27]Sergey F,Grant J,et al.The development of optical techniques for the measurement of pressure and skin friction[J].Measurement Science and Technology,2006,17(6):1261-1268.
[28]Brücker Ch,Spatz J,Schr9der W.Feasability study of wall shear stress imaging using microstructured surfaces with flexible micropillars[J].Experiments in Fluids,2005,39(2):464-474.
[29]Grobe S,Schroder W.The micro-pillar shear-stress sensor MPS3for turbulent flow[J].Sensors,2009,9(4):2222-2251.
[30]Gnanamanickam E P,Sullivan J P.Manufacture of high aspect ratio micro-pillar wall shear stress sensor arrays[J].Journal of Micromechanics&Microengineering,2012,22(12):125015.
[31]Gnanamanickam E P,Nottebrock B,Groe S,et al.Measurement of turbulent wall shear-stress using micro-pillars[J].Measurement Science&Technology,2013,24(12):124002-124016.
[32]Taira T,Sadatake T,Kenji K,et al.Skin-friction measurements in supersonic combustion flows of a scramjet combustor[C].AIAA/ASME/SAE/ASEE Joint Propulsion Conference&Exhibit,2008.
[33]Tsuru T,Tomioka S,Yamasaki H.Accuracy of direct skinfriction measurements in high-enthalpy supersonic flows[J].AIAA Journal,2011,49(6):1267-1271.
[34]Meritt R J,Schetz J A,Donbar J M,et al.Skin friction sensor for high-speed,high-enthalpy scramjet flow applications[C].AIAA/ASME/SAE/ASEE Joint Propulsion Conference,2014.
[35]Meritt R J,Schetz J A.Skin friction sensor development,validation,and application for high-speed,high-enthalpy flow conditions[J].Journal of Propulsion&Power,2016,32(4):1-13.