热敏式壁面剪应力微传感器技术研究进展
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摘要
基于MEMS技术的热敏式微传感器为壁面剪应力的测量提供了重要手段。本文介绍了国内外热敏式壁面剪应力微传感器技术的研究发展现状,重点从硅基和柔性聚合物基2种结构角度,对其工作原理以及不同热敏式微传感器的结构、关键工艺和性能测试进行了分析。
Micro Electro-Mechanical Systems(MEMS)-based shear stress sensors provide a significant method in wall shear stress measurement.In this paper,the research progress of thermal wall shear sensors is introduced.And the sensing principle,device structure,fabrication processes,and performance test of the silicon-based and flexible polymer-based thermal wall shear stress sensors are analyzed.
Micro Electro-Mechanical Systems(MEMS)-based shear stress sensors provide a significant method in wall shear stress measurement.In this paper,the research progress of thermal wall shear sensors is introduced.And the sensing principle,device structure,fabrication processes,and performance test of the silicon-based and flexible polymer-based thermal wall shear stress sensors are analyzed.
引文
[1]Johnson C B,Carraway D L.A transition detection study at Mach 1.5、2.0and 2.5using a micro-thin hot-film system[C].Instrumentation in Aerospace Simulation Facilities,ICIASF'89Record,International Congress on IEEE,1989:82-94.
[2]Riedl X,Leuckert J,Engert M,et al.Transition measurement with microstructured hot film sensor arrays on a laminar flow airfoil model[M].Berlin Heidelberg:Springer,2013:641-648.
[3]Tokugawa N,Yoshida K.Transition detection on supersonic natural laminar flow wing in the flight[R].AIAA Paper,2006,3165.
[4]Naughton J W,Sheplak M.Modern developments in shearstress measurement[J].Progress in Aerospace Sciences,2002,38(6):515-570.
[5]Sheplak M,Cattafesta L,Nishida T,et al.MEMS shear stress sensors:promise and progress[C].24th AIAA Aerodynamic Measurement Technology Testing Conference,Florida University,2004.
[6]Oudheusden B,Huijsing J.Integrated flow friction sensor[J].Sensors and Actuators,1988,15:135-144.
[7]Liu C,Tai Y C,Huang J,et al.Surface micromachined thermal shear-stress sensor[C]//Proceedings of the ASME Symposium on Application of Microfabrication to Fluid Mechanics,ASME Winter Annual Meeting,Chicago,1994:9-15.
[8]Liu C,Huang J B,Zhu Z,et al.A micromachined flow shearstress sensor based on thermal transfer principles[J].Journal of Microelectromechanical Systems,1999,8(1):90-99.
[9]Huang J B,Jiang F K,Tai Y C,et al.A micro-electro-mechanical-system-based thermal shear-stress sensor with self-frequency compensation[J].Measurement Science and Technology,1999,10(8):687.
[10]Jiang F,Tai Y C,Gupta B,et al.A surface-micromachined shear-stress imager[C]//Proceedings of 1996IEEE Micro Electro Mechanical Systems Workshop(MEMS’96),San Diego,1996:110-115.
[11]Jiang F,Tai Y C,Walsh K,et al.A flexible MEMS technology and its first application to shear-stress sensor skin[C]//Proceedings of 1997 IEEE Micro Electro Mechanical Systems Workshop(MEMS’97),Nagoya,Japan,1997:465-470.
[12]Jiang F,Lee G B,Tai Y C,et al.A flexible micromachinebased shear-stress sensor array and its application to separationpoint detection[J].Sensors and Actuators A:Physical,2000,79(3):194-203.
[13]Jiang F,Xu Y,Weng T,et al.Flexible shear stress sensor skin for aerodynamics applications[C].The Thirteenth Annual International Conference on IEEE,2000:364-369.
[14]Xu Y,Jiang F,Lin Q,et al.Underwater shear-stress sensor[C].IEEE International Conference on Micro Electro Mechanical Systems,2002:340-343.
[15]Xu Y,Tai Y C,Huang A,et al.IC-integrated flexible shearstress sensor skin[J].Journal of Microelectromechanical Systems,2003,12(5):740-747.
[16]Xu Y,Jiang F,Newbern S,et al.Flexible shear-stress sensor skin and its application to unmanned aerial vehicles[J].Sensors&Actuators A:Physical,2003,105(3):321-329.
[17]Xu Y,Lin Q,Lin G,et al.Micromachined thermal shearstress sensor for underwater applications[J].Journal of Microelectromechanical Systems,2005,14(5):1023-1030.
[18]Cain A,Chandrasekaran V,Nishida T,et al.Development of a wafer-bonded,silicon nitride membrane thermal shear-stress sensor with platinum sensing element[C].Technical Digest,Solid-State Sensor and Actuator Workshop,2000:300-303.
[19]Chandrasekaran V,Cain A,Nishida T,et al.Characterization of a micromachined thermal shear stress sensor[C].39th Aerospace sciences Meeting and Exhibit,2001.
[20]Chandrasekaran V.Dynamic calibration technique for thermal shear-stress sensors with variable mean flow[D].Gainesville:University of Florida,2000.
[21]Jang S L.A model of 1/f noise in polysilicon resistors[J].SolidState Electron,1990,33:1155-1162.
[22]Sheplak M,Padmanabhan A,Schmidt M A,et al.Dynamic calibration of a shear-stress sensor using Stokes-layer excitation[J].AIAA Journal,2001,39(5):819-823.
[23]Ou Y,Qu F,Wang G,et al.A MEMS thermal shear stress sensor produced by a combination of substrate-free structures with anodic bonding technology[J].Applied Physics Letters,2016,109(2):023512.
[24]Buder U,Berns A,Obermeier E,et al.Aero MEMS wall hotwire anemometer on polyimide foil for measurement of high frequency fluctuations[C].Sensors,2005IEEE,2005.
[25]Buder U,Henning L,Neumann A,et al.Aeromems wall hotwire sensor arrays on polyimide with through foil vias and bottom side electrical contacts[C].Solid-State Sensors,Actuators and Microsystems Conference,2007:2333-2336.
[26]Buder U,Petz R,Kittel M,et al.Aero MEMS polyimide based wall double hot-wire sensors for flow separation detection[J].Sensors&Actuators A:Physical,2008,142(1):130-137.
[27]刘奎,苑伟政,邓进军,等.微型热敏传感器的薄膜电阻设计研究[J].中国机械工程,2005,(z1):202-204.Liu K,Yuan W Z,Deng J J,et al.Design investigation on micro thermal sensor film resistor[J].China Mechanical Engineering,2005,(z1):202-204.
[28]刘奎,苑伟政,邓进军,等.基于微型剪应力传感器阵列的边界层分离点测定方法研究[J].航空学报,2006,27(1):142-146.Liu K,Yuan W Z,Deng J J,et al.Investigation of using micro shear stress sensor array to detect boundary-layer separation point[J].Chinese Journal of Aeronautics,2006,27(1):142-146.
[29]刘奎,苑伟政,马炳和,等.微型热敏传感器系统动态特性理论研究[J].仪器仪表学报,2006,27(6):648-652.Liu K,Yuan W Z,Ma B H,et al.Investigation in the dynamic characteristic of the micro thermal sensor system[J].Chinese Journal of Scientific Instrument,2006,27(6):648-652.
[30]刘奎,苑伟政,邓进军,等.微型热敏传感器的结构设计及仿真分析[J].航空学报,2007,28(2):476-480.Liu K,Yuan W Z,Deng J J,et al.Design and simulation of structure of micro thermal sensor device[J].Chinese Journal of Aeronautics,2007,28(2):476-480.
[31]Liu K,Yuan W Z,Deng J J,et al.Detecting boundary-layer separation point with a micro shear stress sensor array[J].Sensors and Actuators A:Physical,2007,139(1):31-35.
[32]Liu K,Yuan W Z,Deng J J,et al.Sensing flow separation on a typical aerofoil by mems flexible thermal sensor array[C].First International Conference on Integration and Commercialization of Micro and Nanosystems,American Society of Mechanical Engineers,2007:235-239.
[33]Liu K,Yuan W Z,Ma B H,et al.The fabrication and integration of a novel shear stress sensor array and its wind tunnel test[J].Journal of Micro-Bio Robotics,2008,4(3):115-120.
[34]马炳和,赵建国,邓进军,等.全柔性热膜微传感器阵列制造工艺及性能优化[J].光学精密工程,2009,17(8):1971-1977.Ma B H,Zhao J G,Deng J J,et al.Fabrication of flexible hot film sensors arrary and its optimization[J].Optics and Precision Engineering,2009,17(8):1971-1977.
[35]马炳和,傅博,李建强,等.溅射-电镀微成型制造柔性热膜传感器阵列[J].航空学报,2011,32(11):2147-2152.Ma B H,Fu B,Li J Q,et al.Flexible hot-film sensor array fabricated with sputtering-electroplating micromachining[J].Chinese Journal of Aeronautics,2011,32(11):2147-2152.
[36]马炳和,王毅,姜澄宇,等.柔性热膜剪应力传感器水下测量温度修正[J].实验流体力学,2014,28(2):39-44.Ma B H,Wang Y,Jiang C Y,et al.Temperature correction of flexible thermal shear stress sensor for underwater measurements[J].Journal of Experiments in Fluid Mechanics,2014,28(2):39-44.
[37]肖同新,马炳和,邓进军,等.基于柔性热膜传感器的流体壁面剪应力测量系统[J].传感器与微系统,2013,32(7):101-105.Xiao T X,Ma B H,Deng J J,et al.Fluid wall shear stress measurement system based on flexible hot film sensor[J].Transducer and Microsystem Technologies,2013,32(7):101-105.
[38]Li X Y,Li Y B,Ma B H,et al.Modelling and calibration of microthermal sensor for underwater wall shear stress measurement[J].Micro&Nano Letters,2014,9(7):486-489.
[39]Zhu P F,Ma B H,Jiang C Y,et al.Improved sensitivity of micro thermal sensor for underwater wall shear stress measurement[J].Microsystem Technologies,2015,21(4):785-789.
[40]Beutel T,Leester-Schdel M,Dietzel A.Manufacturing of flexible micro hot-film probes for aeronautical purposes[J].Microelectronic Engineering,2013,111(11):238-241.
[41]Beutel T,Schwerter M,Leesterschdel M.Flexible hot-film anemometer arrays for flow measurements on curved structures[C].SPIE 8763Smart Sensors,Actuators,and MEMS VI.2013:87630N-87630N-8.
[42]Schwerter M,Beutel T,Leester-Schdel M,et al.Flexible hotfilm anemometer arrays on curved structures for active flow control on airplane wings[J].Microsystem Technologies,2014,20(4-5):821-829.
[43]Hasegawa Y,Yamada T,Shikida M.Fabrication of smoothsurfaced flexible thermal sensor for detecting wall shear stress[C].IEEE,International Conference on MICRO Electro Mechanical Systems,2016.
[44]Yu H,Ai L,Rouhanizadeh M,et al.Flexible polymer sensors for in vivo intravascular shear stress analysis[J].Journal of Microelectromechanical Systems,2008,17(5):1178-1186.
[45]Ai L,Yu H,Takabe W,et al.Optimization of intravascular shear stress assessment in vivo[J].Journal of Biomechanics,2009,42(10):1429-1437.
[46]Tang R,Huang H,Yang Y M,et al.Three-dimensional flexible thermal sensor for intravascular flow monitoring[J].IEEE Sensors Journal,2013,13(10):3991-3998.
[47]Li C,Wu P M,Han J,et al.A flexible polymer tube lab-chip integrated with microsensors for smart microcatheter[J].Biomedical Microdevices,2008,10(5):671-679.
[2]Riedl X,Leuckert J,Engert M,et al.Transition measurement with microstructured hot film sensor arrays on a laminar flow airfoil model[M].Berlin Heidelberg:Springer,2013:641-648.
[3]Tokugawa N,Yoshida K.Transition detection on supersonic natural laminar flow wing in the flight[R].AIAA Paper,2006,3165.
[4]Naughton J W,Sheplak M.Modern developments in shearstress measurement[J].Progress in Aerospace Sciences,2002,38(6):515-570.
[5]Sheplak M,Cattafesta L,Nishida T,et al.MEMS shear stress sensors:promise and progress[C].24th AIAA Aerodynamic Measurement Technology Testing Conference,Florida University,2004.
[6]Oudheusden B,Huijsing J.Integrated flow friction sensor[J].Sensors and Actuators,1988,15:135-144.
[7]Liu C,Tai Y C,Huang J,et al.Surface micromachined thermal shear-stress sensor[C]//Proceedings of the ASME Symposium on Application of Microfabrication to Fluid Mechanics,ASME Winter Annual Meeting,Chicago,1994:9-15.
[8]Liu C,Huang J B,Zhu Z,et al.A micromachined flow shearstress sensor based on thermal transfer principles[J].Journal of Microelectromechanical Systems,1999,8(1):90-99.
[9]Huang J B,Jiang F K,Tai Y C,et al.A micro-electro-mechanical-system-based thermal shear-stress sensor with self-frequency compensation[J].Measurement Science and Technology,1999,10(8):687.
[10]Jiang F,Tai Y C,Gupta B,et al.A surface-micromachined shear-stress imager[C]//Proceedings of 1996IEEE Micro Electro Mechanical Systems Workshop(MEMS’96),San Diego,1996:110-115.
[11]Jiang F,Tai Y C,Walsh K,et al.A flexible MEMS technology and its first application to shear-stress sensor skin[C]//Proceedings of 1997 IEEE Micro Electro Mechanical Systems Workshop(MEMS’97),Nagoya,Japan,1997:465-470.
[12]Jiang F,Lee G B,Tai Y C,et al.A flexible micromachinebased shear-stress sensor array and its application to separationpoint detection[J].Sensors and Actuators A:Physical,2000,79(3):194-203.
[13]Jiang F,Xu Y,Weng T,et al.Flexible shear stress sensor skin for aerodynamics applications[C].The Thirteenth Annual International Conference on IEEE,2000:364-369.
[14]Xu Y,Jiang F,Lin Q,et al.Underwater shear-stress sensor[C].IEEE International Conference on Micro Electro Mechanical Systems,2002:340-343.
[15]Xu Y,Tai Y C,Huang A,et al.IC-integrated flexible shearstress sensor skin[J].Journal of Microelectromechanical Systems,2003,12(5):740-747.
[16]Xu Y,Jiang F,Newbern S,et al.Flexible shear-stress sensor skin and its application to unmanned aerial vehicles[J].Sensors&Actuators A:Physical,2003,105(3):321-329.
[17]Xu Y,Lin Q,Lin G,et al.Micromachined thermal shearstress sensor for underwater applications[J].Journal of Microelectromechanical Systems,2005,14(5):1023-1030.
[18]Cain A,Chandrasekaran V,Nishida T,et al.Development of a wafer-bonded,silicon nitride membrane thermal shear-stress sensor with platinum sensing element[C].Technical Digest,Solid-State Sensor and Actuator Workshop,2000:300-303.
[19]Chandrasekaran V,Cain A,Nishida T,et al.Characterization of a micromachined thermal shear stress sensor[C].39th Aerospace sciences Meeting and Exhibit,2001.
[20]Chandrasekaran V.Dynamic calibration technique for thermal shear-stress sensors with variable mean flow[D].Gainesville:University of Florida,2000.
[21]Jang S L.A model of 1/f noise in polysilicon resistors[J].SolidState Electron,1990,33:1155-1162.
[22]Sheplak M,Padmanabhan A,Schmidt M A,et al.Dynamic calibration of a shear-stress sensor using Stokes-layer excitation[J].AIAA Journal,2001,39(5):819-823.
[23]Ou Y,Qu F,Wang G,et al.A MEMS thermal shear stress sensor produced by a combination of substrate-free structures with anodic bonding technology[J].Applied Physics Letters,2016,109(2):023512.
[24]Buder U,Berns A,Obermeier E,et al.Aero MEMS wall hotwire anemometer on polyimide foil for measurement of high frequency fluctuations[C].Sensors,2005IEEE,2005.
[25]Buder U,Henning L,Neumann A,et al.Aeromems wall hotwire sensor arrays on polyimide with through foil vias and bottom side electrical contacts[C].Solid-State Sensors,Actuators and Microsystems Conference,2007:2333-2336.
[26]Buder U,Petz R,Kittel M,et al.Aero MEMS polyimide based wall double hot-wire sensors for flow separation detection[J].Sensors&Actuators A:Physical,2008,142(1):130-137.
[27]刘奎,苑伟政,邓进军,等.微型热敏传感器的薄膜电阻设计研究[J].中国机械工程,2005,(z1):202-204.Liu K,Yuan W Z,Deng J J,et al.Design investigation on micro thermal sensor film resistor[J].China Mechanical Engineering,2005,(z1):202-204.
[28]刘奎,苑伟政,邓进军,等.基于微型剪应力传感器阵列的边界层分离点测定方法研究[J].航空学报,2006,27(1):142-146.Liu K,Yuan W Z,Deng J J,et al.Investigation of using micro shear stress sensor array to detect boundary-layer separation point[J].Chinese Journal of Aeronautics,2006,27(1):142-146.
[29]刘奎,苑伟政,马炳和,等.微型热敏传感器系统动态特性理论研究[J].仪器仪表学报,2006,27(6):648-652.Liu K,Yuan W Z,Ma B H,et al.Investigation in the dynamic characteristic of the micro thermal sensor system[J].Chinese Journal of Scientific Instrument,2006,27(6):648-652.
[30]刘奎,苑伟政,邓进军,等.微型热敏传感器的结构设计及仿真分析[J].航空学报,2007,28(2):476-480.Liu K,Yuan W Z,Deng J J,et al.Design and simulation of structure of micro thermal sensor device[J].Chinese Journal of Aeronautics,2007,28(2):476-480.
[31]Liu K,Yuan W Z,Deng J J,et al.Detecting boundary-layer separation point with a micro shear stress sensor array[J].Sensors and Actuators A:Physical,2007,139(1):31-35.
[32]Liu K,Yuan W Z,Deng J J,et al.Sensing flow separation on a typical aerofoil by mems flexible thermal sensor array[C].First International Conference on Integration and Commercialization of Micro and Nanosystems,American Society of Mechanical Engineers,2007:235-239.
[33]Liu K,Yuan W Z,Ma B H,et al.The fabrication and integration of a novel shear stress sensor array and its wind tunnel test[J].Journal of Micro-Bio Robotics,2008,4(3):115-120.
[34]马炳和,赵建国,邓进军,等.全柔性热膜微传感器阵列制造工艺及性能优化[J].光学精密工程,2009,17(8):1971-1977.Ma B H,Zhao J G,Deng J J,et al.Fabrication of flexible hot film sensors arrary and its optimization[J].Optics and Precision Engineering,2009,17(8):1971-1977.
[35]马炳和,傅博,李建强,等.溅射-电镀微成型制造柔性热膜传感器阵列[J].航空学报,2011,32(11):2147-2152.Ma B H,Fu B,Li J Q,et al.Flexible hot-film sensor array fabricated with sputtering-electroplating micromachining[J].Chinese Journal of Aeronautics,2011,32(11):2147-2152.
[36]马炳和,王毅,姜澄宇,等.柔性热膜剪应力传感器水下测量温度修正[J].实验流体力学,2014,28(2):39-44.Ma B H,Wang Y,Jiang C Y,et al.Temperature correction of flexible thermal shear stress sensor for underwater measurements[J].Journal of Experiments in Fluid Mechanics,2014,28(2):39-44.
[37]肖同新,马炳和,邓进军,等.基于柔性热膜传感器的流体壁面剪应力测量系统[J].传感器与微系统,2013,32(7):101-105.Xiao T X,Ma B H,Deng J J,et al.Fluid wall shear stress measurement system based on flexible hot film sensor[J].Transducer and Microsystem Technologies,2013,32(7):101-105.
[38]Li X Y,Li Y B,Ma B H,et al.Modelling and calibration of microthermal sensor for underwater wall shear stress measurement[J].Micro&Nano Letters,2014,9(7):486-489.
[39]Zhu P F,Ma B H,Jiang C Y,et al.Improved sensitivity of micro thermal sensor for underwater wall shear stress measurement[J].Microsystem Technologies,2015,21(4):785-789.
[40]Beutel T,Leester-Schdel M,Dietzel A.Manufacturing of flexible micro hot-film probes for aeronautical purposes[J].Microelectronic Engineering,2013,111(11):238-241.
[41]Beutel T,Schwerter M,Leesterschdel M.Flexible hot-film anemometer arrays for flow measurements on curved structures[C].SPIE 8763Smart Sensors,Actuators,and MEMS VI.2013:87630N-87630N-8.
[42]Schwerter M,Beutel T,Leester-Schdel M,et al.Flexible hotfilm anemometer arrays on curved structures for active flow control on airplane wings[J].Microsystem Technologies,2014,20(4-5):821-829.
[43]Hasegawa Y,Yamada T,Shikida M.Fabrication of smoothsurfaced flexible thermal sensor for detecting wall shear stress[C].IEEE,International Conference on MICRO Electro Mechanical Systems,2016.
[44]Yu H,Ai L,Rouhanizadeh M,et al.Flexible polymer sensors for in vivo intravascular shear stress analysis[J].Journal of Microelectromechanical Systems,2008,17(5):1178-1186.
[45]Ai L,Yu H,Takabe W,et al.Optimization of intravascular shear stress assessment in vivo[J].Journal of Biomechanics,2009,42(10):1429-1437.
[46]Tang R,Huang H,Yang Y M,et al.Three-dimensional flexible thermal sensor for intravascular flow monitoring[J].IEEE Sensors Journal,2013,13(10):3991-3998.
[47]Li C,Wu P M,Han J,et al.A flexible polymer tube lab-chip integrated with microsensors for smart microcatheter[J].Biomedical Microdevices,2008,10(5):671-679.