MEMS热膜式壁面剪应力传感器微弱信号检测
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摘要
MEMS热膜式壁面剪应力传感器的输出信号是带有基础电压的微弱电压信号,无法通过放大器直接放大的方法实现高精度测量。文章提出在输出信号放大前增加信号平衡环节,在保留有效信号的前提下减小基础电压,再通过放大的方法实现其高精度测量,有效解决了MEMS热膜式壁面剪应力传感器微弱信号检测的难题。文章介绍了MEMS热膜式壁面剪应力传感器微弱信号检测的技术方案、关键技术、测试检验及试验应用实例。
The weak signal of MEMS hot-film wall shear stress(WSS)sensors is hard to detect by direct amplification due to the inherent basic voltage.An effective method to solve this problem is proposed,which is to add an output-balancing system(OBS)before the signal is amplified.The basic voltage is decreased while the signal is retained.The development of the outputbalancing system is presented,including the technical scheme,key technologies,examination and application.
The weak signal of MEMS hot-film wall shear stress(WSS)sensors is hard to detect by direct amplification due to the inherent basic voltage.An effective method to solve this problem is proposed,which is to add an output-balancing system(OBS)before the signal is amplified.The basic voltage is decreased while the signal is retained.The development of the outputbalancing system is presented,including the technical scheme,key technologies,examination and application.
引文
[1]田于逵,谢华,黄欢,等.MEMS壁面剪应力传感器阵列水下标实验研究[J].实验流体力学,2015,29(2):1-6.Tian Y K,Xie H,Huang H,et al.Calibration of MEMS wall shear-stress-sensors array for underwater applications[J].Journal of Experiments in Fluid Mechanics,2015,29(2):1-6.
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[3]孙海浪.压阻式水下微型壁面剪应力传感器技术[D].西安:西北工业大学,2012.Sun H L.Piezoresistive underwater micro wall shear stress sensor technology[D].Xi’an:Northwestern Polytechnical University,2012.
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[6]Kornilov V I,Litvinenko Y A,Pavlov A A.Skin-friction measurements in an incompressible pressure-gradient turbulent boundary layer.review of techniques and results[R].ADA409118,2002.
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[10]梁婷,夏云峰,徐华,等.波浪作用下床面切应力测量初探[J].水道港口,2010,31(5):425-428.Liang T,Xia Y F,Xu H,et al.Preliminary study of bed shear stress measurement under wave action[J].Journal of Waterway and Harbor,2010,31(5):425-428.
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[12]梁锦敏,李建强,蒋卫民,等.MEMS传感器测量平板表面摩擦应力高速风洞试验[J].实验流体力学,2013,27(1):1-4.Liang J M,Li J Q,Jiang W M,et al.Skin friction measurement of a flat plate in high speed wind tunnel using MEMS sensors[J].Journal of Experiments in Fluid Mechanics,2013,27(1):1-4.
[13]肖同新,马炳和,邓进军,等.基于柔性热膜传感器的流体壁面剪应力测量系统[J].传感器与微系统,2013,32(7):101-105.Xiao T X,Ma B H,Deng J J,et al.Fluid wall shear stress measurement system based on flexible hot film sensor[J].Transducer and Microsystem Technologies,2013,32(7):101-105.
[14]朱鹏飞,马炳和,姜澄宇,等.基于驱动电流的水下热敏剪应力微传感器灵敏度研究[J].传感器与微系统,2014,33(9):52-54.Zhu P F,Ma B H,Jiang C Y,et al.Research on sensitivity of thermal micro sensor for underwater shear stress measurement based on drive current[J].Transducer and Microsystem Technologies,2014,33(9):52-54.
[15]刘奎,苑伟政,马炳和,等.微型热敏传感器系统动态特性理论研究[J].仪器仪表学报,2006,27(6):648-652.Liu K,Yuan W Z,Ma B H,et al.Investigation in the dynamic characteristic of the micro thermal sensor system[J].Chinese Journal of Scientific Instrument,2006,27(6):648-652.
[16]E·约翰芬纳莫尔,约瑟夫B·弗朗兹尼编.流体力学及其工程应用[M].北京:机械工业出版社,2009:279-283.E John F,Joseph B F.Fluid mechanics with engineering applications[M].Beijing:China Machine Press,2009:279-283.
[2]黄欢,孙海浪,田于逵,等.水下MEMS壁面剪应力传感器标定方案仿真分析与实验验证[J].实验流体力学,2016,30(2):79-83.Huang H,Sun H L,Tian Y K,et al.CFD analysis and experimental validation on the scheme of calibration for MEMS wall shear stress sensors array for underwater applications[J].Journal of Experiments in Fluid Mechanics,2016,30(2):79-83.
[3]孙海浪.压阻式水下微型壁面剪应力传感器技术[D].西安:西北工业大学,2012.Sun H L.Piezoresistive underwater micro wall shear stress sensor technology[D].Xi’an:Northwestern Polytechnical University,2012.
[4]Mark S,Louis C,Toshi N.MEMS shear stress sensors:promise and progress[C].24th AIAA Aerodynamic Measurement Technology and Ground Testing Conference,Portland,2014:1-13.
[5]Ali E.Recent innovations in wall shear stress sensor technologies[J].Recent Patents on Mechanical Engineering,2008,1(1):22-28.
[6]Kornilov V I,Litvinenko Y A,Pavlov A A.Skin-friction measurements in an incompressible pressure-gradient turbulent boundary layer.review of techniques and results[R].ADA409118,2002.
[7]Xu Y,Lin Q,Lin G Y,et al.Micromachined thermal shear stress sensor for underwater applications[J].Journal of Microelectromechanical Systems,2005,14(5):1023-1030.
[8]刘奎,苑伟政,钟军威,等.微型柔性热敏传感器阵列应用研究[J].仪器仪表学报,2007,28(9):1583-1587.Liu K,Yuan W Z,Zhong J W,et al.Design and fabrication of micro thermal sensor array[J].Chinese Journal of Scientific Instrument,2007,28(9):1583-1587.
[9]刘奎,苑伟政,钟军威,等.低速流体边界层分离检测试验[J].机械工程学报,2008,44(1):139-143.Liu K,Yuan W Z,Zhong J W,et al.Experiments of low speed fluid boundary-layer separation[J].Chinese Journal of Mechanical Engineering,2008,44(1):139-143.
[10]梁婷,夏云峰,徐华,等.波浪作用下床面切应力测量初探[J].水道港口,2010,31(5):425-428.Liang T,Xia Y F,Xu H,et al.Preliminary study of bed shear stress measurement under wave action[J].Journal of Waterway and Harbor,2010,31(5):425-428.
[11]Ma B H,Ren J Z,Deng J J,et al.Flexible thermal sensor array on PI film substrate for underwater applications[C].23rd IEEE International Conference on Micro Electro Mechanical Systems(MEMS),Hong Kong,2010:679-682.
[12]梁锦敏,李建强,蒋卫民,等.MEMS传感器测量平板表面摩擦应力高速风洞试验[J].实验流体力学,2013,27(1):1-4.Liang J M,Li J Q,Jiang W M,et al.Skin friction measurement of a flat plate in high speed wind tunnel using MEMS sensors[J].Journal of Experiments in Fluid Mechanics,2013,27(1):1-4.
[13]肖同新,马炳和,邓进军,等.基于柔性热膜传感器的流体壁面剪应力测量系统[J].传感器与微系统,2013,32(7):101-105.Xiao T X,Ma B H,Deng J J,et al.Fluid wall shear stress measurement system based on flexible hot film sensor[J].Transducer and Microsystem Technologies,2013,32(7):101-105.
[14]朱鹏飞,马炳和,姜澄宇,等.基于驱动电流的水下热敏剪应力微传感器灵敏度研究[J].传感器与微系统,2014,33(9):52-54.Zhu P F,Ma B H,Jiang C Y,et al.Research on sensitivity of thermal micro sensor for underwater shear stress measurement based on drive current[J].Transducer and Microsystem Technologies,2014,33(9):52-54.
[15]刘奎,苑伟政,马炳和,等.微型热敏传感器系统动态特性理论研究[J].仪器仪表学报,2006,27(6):648-652.Liu K,Yuan W Z,Ma B H,et al.Investigation in the dynamic characteristic of the micro thermal sensor system[J].Chinese Journal of Scientific Instrument,2006,27(6):648-652.
[16]E·约翰芬纳莫尔,约瑟夫B·弗朗兹尼编.流体力学及其工程应用[M].北京:机械工业出版社,2009:279-283.E John F,Joseph B F.Fluid mechanics with engineering applications[M].Beijing:China Machine Press,2009:279-283.