水下MEMS壁面剪应力传感器标定不确定度分析研究
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摘要
针对MEMS壁面剪应力传感器进行了标定及其不确定度分析工作。标定基于压力梯度法,使用扁平校验水槽作为主要的试验装置。测量不同壁面剪应力下的MEMS输出电压信号,通过最小二乘拟合可获得标定系数。反复进行壁面剪应力及电压测量,同时查找相关产品说明书获得壁面剪应力及标定系数的不确定度。试验结果表明,剪应力测量的相对扩展不确定度小于7%,且外流速度越大,剪应力测量的不确定度越小,因此扁平校验水槽能够提供较高精度的剪应力输入;电压测量的相对扩展不确定度小于7%,且外流速度越大,电压测量的不确定度越小,因此传感器能够可靠地用于流体壁面剪应力的测量;标定曲线具有合理的形态且拟合相关性较高,因此标定公式具有较好的可靠性。
In this paper,the calibration and uncertainty analysis of the MEMS shear stress sensor are undertaken.Shear stress is generated by the pressure gradient method,the main test equipment is the flat verification water channel.Different voltage outputs are measured under different wall shear stress conditions,and the calibration coefficient can be got through matching the shear stress and voltage with the least square method.The shear stress uncertainty and calibration coefficient uncertainty can be got through measuring the pressure and voltage repeatedly and checking the related product manual.As the result indicated,the uncertainty of the shear stress measurement is within 7%,it tends to be smaller as the free-stream velocity gets higher.The uncertainty of the voltage measurement is within 7%,and it also tends to be smaller as the free-stream velocity gets higher,so that the sensor can be used to wall shear stress measurement reliably.The shape of calibration curve is reasonable,its correlation coefficient of fitting is large enough,it means that the calibration equation is reliably.
In this paper,the calibration and uncertainty analysis of the MEMS shear stress sensor are undertaken.Shear stress is generated by the pressure gradient method,the main test equipment is the flat verification water channel.Different voltage outputs are measured under different wall shear stress conditions,and the calibration coefficient can be got through matching the shear stress and voltage with the least square method.The shear stress uncertainty and calibration coefficient uncertainty can be got through measuring the pressure and voltage repeatedly and checking the related product manual.As the result indicated,the uncertainty of the shear stress measurement is within 7%,it tends to be smaller as the free-stream velocity gets higher.The uncertainty of the voltage measurement is within 7%,and it also tends to be smaller as the free-stream velocity gets higher,so that the sensor can be used to wall shear stress measurement reliably.The shape of calibration curve is reasonable,its correlation coefficient of fitting is large enough,it means that the calibration equation is reliably.
引文
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[2]Zuckerwar A,Michael A S.A rotary flow channel for shear stress sensor calibration[C]//24th AIAA Aerodynamic Measurement Technology and Ground Testing Conference,Portland,28June-1July,2004.
[3]Bellhouse B J,Schultz D L.Determination of mean and dynamic skin friction,separation and transition in low-speed flow with a thin-film heated element[J].Journal of Fluid Mechanics,1966,24:379-400.
[4]Khoo B C,Chew Y T,Lim C P,et al.The flow between a rotating and a stationary disc:application to near-wall hot-wire calibration[J].Measurement Science&Technology,1998,9(4):650-658.
[5]L9fdahl L,Chernoray V,Haasl S,et al.Characteristics of a hotwire microsensor for time-dependent wall shear stress measurements[J].Experiments in Fluids,2003,35(3):240-251.
[6]项志杰,马炳和,邓进军,等.浮动式剪应力微传感器的标定[J].微纳电子技术,2014,(4):236-242.Xiang Z J,Ma B H,Deng J J,et al.Calibration of floating-element micro wall shear stress sensor[J].Micro-nano-electronic Technology,2014,(4):236-242.
[7]Padmanabhan A.Silicon micromachined sensors and sensor arrays for shear-stress measurements in aerodynamic flows[R].Aerospace Computational Design Laboratory,Dept of Aeronautics&Astronautics,Massachusetts Institute of Technology,1997.
[8]De Luca A,Haneef I,Coull J,et al.High sensitivity single thermopile SOI CMOS MEMS thermal wall shear stress sensor[J].IEEE Xplore,2015:1.
[9]黄欢,孙海浪,田于逵,等.水下MEMS剪应力标定试验压力监测方案设计[C].全国水动力学学术会议暨全国水动力学研讨会,青岛:2014.Huang H,Sun H L,Tian Y K,et al.Pressure monitor project design of under water MEMS shear stress cabibration test[C].Proceedings of National Congress on Hydrodynamics&National Conference on Hydrodynamics,Qingdao:2014.
[10]田于逵,谢华,黄欢,等.MEMS壁面剪应力传感器阵列水下标定实验研究[J].实验流体力学,2015,29(2):8-12,25.Tian Y K,Xie H,Huang H,et al.Calibration research of MEMS shear stress sensor array[J].Experimental Fluid Mechanics,2015,29(2):8-12,25.
[11]Tian Y K,Xie H,Huang H,et al.Calibration of MEMS wall shear-stress-sensors array for underwater applications[J].Journal of Experiments in Fluid Mechanics,2015:8-12.
[12]李晓莹,李雁冰,马炳和,等.微型热膜传感器的水下壁面剪应力标定研究[J].传感器与微系统,2014,33(10):11-13.Li X Y,Li Y B,Ma B H,et al.Under water wall shear stress calibration reserch of micro thermal sensor[J].Transducer and Microsystem Technologies,2014,33(10):11-13.
[13]国家质量监督检验检疫总局.JJF1059-1999测量不确定度评定与表示[S].北京:中国计量出版社,1999.JJF1059-1999.Evaluation and expression of measurement uncertainties[S].Beijing:State Administration for Quality Supervision and Inspection and Quarantine,1999.
[14]钱绍圣.测量不确定度[M].北京:清华大学出版社,2002.Qian S S.Measurement uncertainty[M].Beijing:Tinghua University Press,2002.
[15]林洪桦.测量误差与不确定度评估[M].北京:机械工业出版社,2010.Lin H Y.Measurement error and uncertainty evaluation[M].Beijing:China Machine Press,2010.
[16]范影乐.MATLAB仿真应用详解[M].北京:人民邮电出版社,2001.Fan Y L.MATLAB simulation and application examples[M].Beijing:Posts and Telecom Press,2001.