微细电铸制造技术的研究进展
|
摘要
介绍了微细电铸技术的基本原理,阐述了超声微细电铸、磁电微细电铸、超临界微细电铸和屏蔽模板随动式微细电铸这4种新型制造工艺的原理及研究进展,指出了今后的研究重点。
The basic principle of micro-electroforming was introduced. The mechanism and research progress of four kinds of novel manufacturing processes including ultrasound-assisted micro-electroforming, magnetic field-assisted microelectroforming, supercritical fluid micro-electroforming, and micro-electroforming using a movable patterned anode were reviewed. The research focuses in the future were pointed out.
The basic principle of micro-electroforming was introduced. The mechanism and research progress of four kinds of novel manufacturing processes including ultrasound-assisted micro-electroforming, magnetic field-assisted microelectroforming, supercritical fluid micro-electroforming, and micro-electroforming using a movable patterned anode were reviewed. The research focuses in the future were pointed out.
引文
[1]王剑秋,吴宇列,张勇猛.基于MEMS声传感器的圆柱壳体振动陀螺振型检测技术[J].传感技术学报,2014,27(10):1305-1309.
[2]KOLESAR V,EL KAMMOUNI R,KUBLIHA M,et al.Temperature microsensor/microactuator based on magnetic microwire for MEMS applications[J].IEEE Transactions on Magnetics,2017,53(4):1-4.
[3]李巧梅,罗北平,黄锋,等.液相等离子体电沉积制备类金刚石薄膜[J].电镀与涂饰,2013,32(10):1-4.
[4]王星星,龙伟民,韩爽,等.超临界流体金属微结构电铸的传质特性[J].电镀与环保,2013,33(5):24-27.
[5]LAJEVARDI S A,SHAHRABI T,HASANNAEIMI V.Synthesis and mechanical properties of nickel–titania composite coatings[J].Materials and Corrosion,2015,62(1):29-34.
[6]GARCíA-LECINA E,GARCíA-URRUTIA I,DíEZ J A,et al.A comparative study of the effect of mechanical and ultrasound agitation on the properties of electrodeposited Ni/Al2O3,nanocomposite coatings[J].Surface and Coatings Technology,2012,206(s11/s12):2998-3005.
[7]LIU W Q,LEI W N,WANG C Y,et al.Ni–Si C nanocomposites electroplating process under ultrasonic and agitation[J].Integrated Ferroelectrics,2015,167(1):192-198.
[8]DIETRICH D,SCHARF I,NICKEL D,et al.Ultrasound technique as a tool for high-rate incorporation of Al2O3,in Ni Co layers[J].Journal of Solid State Electrochemistry,2011,15(5):1041-1048.
[9]明平美,朱荻,胡洋洋,等.高深宽比微细结构电铸时传质过程数值分析[J].机械工程学报,2008,44(8):195-201.
[10]明平美,朱荻,胡洋洋,等.超声微细电铸试验研究[J].中国机械工程,2008,19(6):644-647.
[11]明平美,朱荻,胡洋洋,等.UV-LIGA技术制备微型柔性镍接触探针[J].光学精密工程,2007,15(5):735-740.
[12]DU L Q,WANG Q J.Experimental study on ultrasonic stress relief for cured SU-8 photoresist layer[J].Microelectronic Engineering,2010,87(12):2555-2560.
[13]杜立群,刘亚萍,李永辉,等.超声处理对UV-LIGA工艺中SU-8胶溶胀的影响[J].光学精密工程,2012,20(9):2006-2013.
[14]杜立群,李成斌,李永辉,等.超声时效技术在微注塑模具制作中的应用[J].光学精密工程,2012,20(6):1250-1256.
[15]刘志勇,孙孟良,范峰,等.磁场下镍电沉积层织构及表面形貌[J].功能材料,2010,41(8):1422-1426.
[16]贾卫平,杨帆,吴蒙华.磁场下电沉积镍晶微铸件表面形貌与织构研究[J].机械设计与制造,2013(1):254-257.
[17]KOZA J A,UHLEMANN M,MICKEL C,et al.The effect of magnetic fields on the electrodeposition of Co Fe alloys[J].Journal of Magnetism and Magnetic Materials,2009,321(14):2265-2268.
[18]ISPAS A,MATSUSHIMA H,BUND A,et al.Nucleation and growth of thin nickel layers under the influence of a magnetic field[J].Journal of Electroanalytical Chemistry,2009,626(1/2):174-182.
[19]苗斌,贾卫平,吴蒙华.不同磁场方向作用下电沉积工艺参数对镀镍层性能影响[J].机械设计与制造,2013(7):144-146.
[20]贾卫平,贾振元,苗斌,等.垂直磁场作用下电沉积数值分析与实验[J].大连理工大学学报,2013,53(5):671-677.
[21]杨帆,贾卫平,吴蒙华.磁场作用下微电铸工艺参数对铸层表面形貌的影响[J].材料保护,2012,45(9):48-51.
[22]贾卫平,吴蒙华,杨帆.复合电沉积工艺参数对镍晶微铸件表面性能的影响[J].表面技术,2014,43(5):55-60.
[23]雷卫宁,刘维桥,王江涛,等.一种基于超临界CO2的电化学沉积新方法及其应用研究[J].材料导报,2009,23(21):91-95.
[24]姜博,雷卫宁,刘维桥,等.超临界流体制备纳米Al2O3/镍基复合电铸层及其微观结构和显微硬度[J].机械工程材料,2013,37(3):58-60.
[25]王星星,龙伟民,雷卫宁,等.CO2超临界流体中制备镍基复合电铸层的微观组织和显微硬度[J].稀有金属材料与工程,2013,42(9):1931-1935.
[26]WANG J K,CHAR J M,LIEN P J.Optimization study on supercritical electrodeposition of nickel nanowire arrays using AAO template[J].ISRN Chemical Engineering,2012:610510.
[27]曾永彬,朱荻,明平美,等.屏蔽膜板随动式微细电铸技术基础研究[J].中国机械工程,2007,18(16):1891-1895.
[28]ZHU D,ZENG Y B.Micro electroforming of high-aspect-ratio metallic microstructures by using a movable mask[J].CIRP Annals,2008,57(1):227-230.
[29]曾永彬,胡洋洋,曲宁松.屏蔽阳极模板随动式微细电铸的定域性研究[J].南京航空航天大学学报,2014,46(5):786-792.
[2]KOLESAR V,EL KAMMOUNI R,KUBLIHA M,et al.Temperature microsensor/microactuator based on magnetic microwire for MEMS applications[J].IEEE Transactions on Magnetics,2017,53(4):1-4.
[3]李巧梅,罗北平,黄锋,等.液相等离子体电沉积制备类金刚石薄膜[J].电镀与涂饰,2013,32(10):1-4.
[4]王星星,龙伟民,韩爽,等.超临界流体金属微结构电铸的传质特性[J].电镀与环保,2013,33(5):24-27.
[5]LAJEVARDI S A,SHAHRABI T,HASANNAEIMI V.Synthesis and mechanical properties of nickel–titania composite coatings[J].Materials and Corrosion,2015,62(1):29-34.
[6]GARCíA-LECINA E,GARCíA-URRUTIA I,DíEZ J A,et al.A comparative study of the effect of mechanical and ultrasound agitation on the properties of electrodeposited Ni/Al2O3,nanocomposite coatings[J].Surface and Coatings Technology,2012,206(s11/s12):2998-3005.
[7]LIU W Q,LEI W N,WANG C Y,et al.Ni–Si C nanocomposites electroplating process under ultrasonic and agitation[J].Integrated Ferroelectrics,2015,167(1):192-198.
[8]DIETRICH D,SCHARF I,NICKEL D,et al.Ultrasound technique as a tool for high-rate incorporation of Al2O3,in Ni Co layers[J].Journal of Solid State Electrochemistry,2011,15(5):1041-1048.
[9]明平美,朱荻,胡洋洋,等.高深宽比微细结构电铸时传质过程数值分析[J].机械工程学报,2008,44(8):195-201.
[10]明平美,朱荻,胡洋洋,等.超声微细电铸试验研究[J].中国机械工程,2008,19(6):644-647.
[11]明平美,朱荻,胡洋洋,等.UV-LIGA技术制备微型柔性镍接触探针[J].光学精密工程,2007,15(5):735-740.
[12]DU L Q,WANG Q J.Experimental study on ultrasonic stress relief for cured SU-8 photoresist layer[J].Microelectronic Engineering,2010,87(12):2555-2560.
[13]杜立群,刘亚萍,李永辉,等.超声处理对UV-LIGA工艺中SU-8胶溶胀的影响[J].光学精密工程,2012,20(9):2006-2013.
[14]杜立群,李成斌,李永辉,等.超声时效技术在微注塑模具制作中的应用[J].光学精密工程,2012,20(6):1250-1256.
[15]刘志勇,孙孟良,范峰,等.磁场下镍电沉积层织构及表面形貌[J].功能材料,2010,41(8):1422-1426.
[16]贾卫平,杨帆,吴蒙华.磁场下电沉积镍晶微铸件表面形貌与织构研究[J].机械设计与制造,2013(1):254-257.
[17]KOZA J A,UHLEMANN M,MICKEL C,et al.The effect of magnetic fields on the electrodeposition of Co Fe alloys[J].Journal of Magnetism and Magnetic Materials,2009,321(14):2265-2268.
[18]ISPAS A,MATSUSHIMA H,BUND A,et al.Nucleation and growth of thin nickel layers under the influence of a magnetic field[J].Journal of Electroanalytical Chemistry,2009,626(1/2):174-182.
[19]苗斌,贾卫平,吴蒙华.不同磁场方向作用下电沉积工艺参数对镀镍层性能影响[J].机械设计与制造,2013(7):144-146.
[20]贾卫平,贾振元,苗斌,等.垂直磁场作用下电沉积数值分析与实验[J].大连理工大学学报,2013,53(5):671-677.
[21]杨帆,贾卫平,吴蒙华.磁场作用下微电铸工艺参数对铸层表面形貌的影响[J].材料保护,2012,45(9):48-51.
[22]贾卫平,吴蒙华,杨帆.复合电沉积工艺参数对镍晶微铸件表面性能的影响[J].表面技术,2014,43(5):55-60.
[23]雷卫宁,刘维桥,王江涛,等.一种基于超临界CO2的电化学沉积新方法及其应用研究[J].材料导报,2009,23(21):91-95.
[24]姜博,雷卫宁,刘维桥,等.超临界流体制备纳米Al2O3/镍基复合电铸层及其微观结构和显微硬度[J].机械工程材料,2013,37(3):58-60.
[25]王星星,龙伟民,雷卫宁,等.CO2超临界流体中制备镍基复合电铸层的微观组织和显微硬度[J].稀有金属材料与工程,2013,42(9):1931-1935.
[26]WANG J K,CHAR J M,LIEN P J.Optimization study on supercritical electrodeposition of nickel nanowire arrays using AAO template[J].ISRN Chemical Engineering,2012:610510.
[27]曾永彬,朱荻,明平美,等.屏蔽膜板随动式微细电铸技术基础研究[J].中国机械工程,2007,18(16):1891-1895.
[28]ZHU D,ZENG Y B.Micro electroforming of high-aspect-ratio metallic microstructures by using a movable mask[J].CIRP Annals,2008,57(1):227-230.
[29]曾永彬,胡洋洋,曲宁松.屏蔽阳极模板随动式微细电铸的定域性研究[J].南京航空航天大学学报,2014,46(5):786-792.