HFCVD硼掺杂复合金刚石薄膜的机械性能研究
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摘要
综合不同种类单层金刚石薄膜的典型优点制备的复合金刚石薄膜具有优异的综合性能,本研究对比了UMCD、BDMCD、UFGD和两类新型硼掺杂复合金刚石薄膜的机械性能。研究结果表明:硼掺杂技术可有效改善金刚石薄膜的附着性能,因此BDM-UMCD和BDM-UM-UFGCD薄膜均具有较好的附着性能;表层为UMCD薄膜的BDM-UMCD薄膜(84.354GPa)具有UMCD薄膜(82.058GPa)表面硬度极高的优点,但是表面粗糙度较高(Ra304.41nm)、表面可抛光性较差;相比之下,表层为UFGD薄膜的BDM-UM-UFGCD薄膜则具有UFGD薄膜优异的表面光洁度(Ra104.71nm)和表面可抛光性,此外由于硬度极高的中间层UMCD对于表层硬度的补充作用,该复合薄膜还具有相比于单层UFGD薄膜(67.925GPa)而言较高的表面硬度(72.657GPa)。
The composite diamond films combining typical merits of different types of monolayer diamond films show excellent comprehensive performance.In this article,mechanical properties of UMCD,BDMCD,UFGCD and two novel boron-doped composite diamond films were respectively evaluated and compared.Research results showed that the boron doping technology could significantly improve the film-substrate adhesion,so BDM-UMCD and BDM-UM-UFGCD films both presented favorable adhesive strength. The surface layer of the BDM-UMCD film was UMCD layer,consequently,such the composite film had extremely high surface hardness(84.354GPa)similar to the monolayer UMCD film(82.058 GPa),relatively high surface roughness(Ra304.41nm)and bad polishability.By contrast,the BDM-UM-UFGCD film with the UFGD layer as the surface performed nice surface smoothness(Ra104.71nm)and polishability,as well as relatively higher surface hardness(72.657GPa)than the monolayer UFGD film(67.925GPa)attributed to the reinforcement effect of the ultra-hard middle UMCD layer.
The composite diamond films combining typical merits of different types of monolayer diamond films show excellent comprehensive performance.In this article,mechanical properties of UMCD,BDMCD,UFGCD and two novel boron-doped composite diamond films were respectively evaluated and compared.Research results showed that the boron doping technology could significantly improve the film-substrate adhesion,so BDM-UMCD and BDM-UM-UFGCD films both presented favorable adhesive strength. The surface layer of the BDM-UMCD film was UMCD layer,consequently,such the composite film had extremely high surface hardness(84.354GPa)similar to the monolayer UMCD film(82.058 GPa),relatively high surface roughness(Ra304.41nm)and bad polishability.By contrast,the BDM-UM-UFGCD film with the UFGD layer as the surface performed nice surface smoothness(Ra104.71nm)and polishability,as well as relatively higher surface hardness(72.657GPa)than the monolayer UFGD film(67.925GPa)attributed to the reinforcement effect of the ultra-hard middle UMCD layer.
引文
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[5]SCHUELKE T,GROTJOHN T A.Diamond polishing[J].Diamond and Related Materials,2013(32):17–26.
[6]SUN F H,MA Y P,SHEN B,et al.Fabrication and application of nano-microcrystalline composite diamond films on the interior hole surfaces of Co cemented tungsten carbide substrates[J].Diamond and Related Materials,2009(18):276–282.
[7]SALGUEIREDO E,ALMEIDA F A,AMARAL M,et al.A multilayer approach for enhancing the erosive wear resistance of CVD diamond coatings[J].Wear,2013(297):1064–1073.