八氟环丁烷的纯化技术研究进展
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摘要
随着电子工业的迅速发展,八氟环丁烷作为常用的半导体工艺蚀刻或清洗气体,其需求量日益增加,对其纯度要求也越来越苛刻。总结了现有应用最为广泛的四种八氟环丁烷纯化技术:精馏技术、吸附技术、化学转化法、膜分离技术,分析四种纯化技术各自优缺点。在实际生产中,根据八氟环丁烷中所含杂质的种类,选择合适纯化技术联用来获得高纯八氟环丁烷。此外,应不断开发新型、高效电子气体纯化技术,促进我国电子气体行业的发展。
With the rapid development of electronic industry,octafluorocyclobutane as a commonly used semiconductor etching or cleaning gas,its demand is increasing,and its purity requirements are becoming increasingly harsh. In this paper,four widely used purification technologies of octafluorocyclobutane,distillation,adsorption,chemical conversion and membrane separation,were summarized,and their respective advantages and disadvantages were also analyzed. In practical production,according to the kind of impurities in octafluorocyclobutane,a suitable purification technology was selected to obtain high purity octafluorocyclobutane. In addition,new and high-efficiency electronic gas purification technologies should be continuously developed to promote the development of China's electronic gas industry.
With the rapid development of electronic industry,octafluorocyclobutane as a commonly used semiconductor etching or cleaning gas,its demand is increasing,and its purity requirements are becoming increasingly harsh. In this paper,four widely used purification technologies of octafluorocyclobutane,distillation,adsorption,chemical conversion and membrane separation,were summarized,and their respective advantages and disadvantages were also analyzed. In practical production,according to the kind of impurities in octafluorocyclobutane,a suitable purification technology was selected to obtain high purity octafluorocyclobutane. In addition,new and high-efficiency electronic gas purification technologies should be continuously developed to promote the development of China's electronic gas industry.
引文
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[6]齐仲龙,杨会娥,任昊,等.含氟电子气体纯化方法探讨与展望[J].有机氟工业,2018(1):32-35.
[7]马建修,陈艳珊,廖恒易.一种高纯度八氟环丁烷的纯化方法及系统:CN105777483A[P]. 2016-07-20.
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[9]曾本忠,朱德江.一种从四氟乙烯生产工艺的残液中回收八氟环丁烷的方法:CN101134710A[P]. 2006-08-29.
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[12]铃木泰宏,跡辺仁志,堀场美奈子.用于纯化全氟化碳的吸附剂、其生产方法、高纯八氟丙烷和八氟环丁烷、和其用途:CN1455699A[P]. 2001-09-14.
[13]Nippon Oxygen Co Ltd. Method for purification and film-forming of perfluoro-compound:JP20043391187A[P].2003-06-19.
[14]金向华,孙猛,夏致远.一种去除八氟环丁烷中的六氟丙烯的吸附剂及其制备方法:CN107694509A[P]. 2018-02-16.
[15] Solvay Fluor und Derivate Gmb H. Method for separatinggas mixtures:US20050183573A[P]. 2005-01-25.
[16]Union Showa K K. Method for producing high-purity fluo-rine-containing compound and high-purity fluorine-contai-ning compound obtained by the method:JP2011136955A[P]. 2009-12-28.
[17]陈刚,张晓东,叶向荣.一种含氟有机气体纯化的方法:CN106215852A[P]. 2016-12-14.
[18]黄华播,徐海云,孟祥军.一种全氟烷烃中杂质的催化转化方法:CN104529691A[P]. 2015-04-22.
[19] MALIKARJUNA V N. Process for perfluorocyclobutanepurification:US6333440B1[P]. 2001-12-25.
[20]FERNANDEZ RICHARD E,Rao V N MALLIKARJUNA.Purification of saturated halo-carbons:US5001287[P].1991-03-19.
[21]堀场美奈子,铃木泰宏.八氟环丁烷的纯化方法、其制备方法及其用途:CN1503770A[P]. 2004-06-09.
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[25]陈艳珊,廖恒易.浅谈电子级八氟环丁烷纯化技术[J].低温与特气,2014,32(6):28-30.