摘要
采用闭合场非平衡磁控溅射离子镀(CFUMSIP)技术和离子渗氮技术在M2工具钢表面沉积CrMoN渗/镀复合涂层。利用SEM、EDS、XRD、纳米压痕仪、划痕仪和销盘摩擦磨损试验仪研究了该涂层的组织、成分、相结构、硬度、膜/基结合强度和摩擦磨损性能。结果表明,该涂层的表面和截面致密,涂层呈柱状晶生长,为fcc结构,同时图谱中出现了γ-Fe_4N和α-Fe的衍射峰。CrMoN渗/镀复合涂层的膜/基结合强度和摩擦磨损性能明显优于单一制备的CrMoN涂层。
Nitriding/plating CrMoN duplex coatings were deposited on M2 tool steel by closed-field unbalanced magnetron sputtering ion plating (CFUMSIP) and plasma nitriding technique. The microstructure, composition, phase structure, hardness adhesive strength between film and matrix and friction and wear properties of the coatings were studied by SEM, EDS, XRD, nano-indentation, scratch tester and pin-on-disk tribometer. The results show that the surface and cross-section morphologies of the microstructure coatings is compact. The microstructure of the coating grows as columnar crystal, which is fcc structure, the diffraction peaks of γ-Fe_4N and α-Fe appear in the spectra. The adhesive strength between film and matrix and friction and wear properties of nitriding/CrMoN duplex coatings are better than that of single prepared CrMoN coating.
引文
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