飞秒激光辐照铜箔的材料去除机理及分子动力学模拟
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摘要
利用双温模型来结合分子动力学方法分析研究飞秒激光辐照铜箔烧蚀时产生的传热效应,同时对烧蚀过程进行数值模拟。利用分子动力学的方法对飞秒激光辐照后,铜箔表面发生熔化和喷溅,同时就飞秒激光烧蚀铜箔时的作用机理进行了研究。实验表明,慢慢增加飞秒激光的作用时间,激光的能量被材料渐渐地吸收和传递,铜箔中的铜原子渐渐从面心立方的规则排列向无序松散排列转变。数值模拟研究的结果表明分子动力学已经可以用于研究飞秒激光对材料辐照效应和烧蚀机理。
In this work,the heat transfer effect and ablation of copper foil irradiated by femtosecond lasers are numerically simulated and analyzed by molecular dynamics method in two-temperature model( TTM).After femtosecond laser irradiation via molecular dynamics method,the surface of copper foil melts and sputters. Meanwhile,the mechanism of laser ablation of material is investigated. The results show that the laser energy is gradually absorbed and transferred by the material and the atoms of copper foil slowly change from a regular face-centered cubic arrangement to a chaotic and loose arrangement as the laser ablation continues. On the whole,the numerical simulation results indicate that molecular dynamics can be used to study irradiation effect and ablation mechanism of femtosecond lasers.
In this work,the heat transfer effect and ablation of copper foil irradiated by femtosecond lasers are numerically simulated and analyzed by molecular dynamics method in two-temperature model( TTM).After femtosecond laser irradiation via molecular dynamics method,the surface of copper foil melts and sputters. Meanwhile,the mechanism of laser ablation of material is investigated. The results show that the laser energy is gradually absorbed and transferred by the material and the atoms of copper foil slowly change from a regular face-centered cubic arrangement to a chaotic and loose arrangement as the laser ablation continues. On the whole,the numerical simulation results indicate that molecular dynamics can be used to study irradiation effect and ablation mechanism of femtosecond lasers.
引文
[1]Von der Linde D,Sokolowski-Tinten K,Bialkowski J. Laser-solid in-teraction in the femtosecond time regime[J]. Applied Surface Science,1997,109:1-10.
[2]杨建军.飞秒激光超精细“冷”加工技术及其应用[J].激光与光电子学进展,2004,41(3):42-52.
[3]Li C B,Jia T Q,Sun H Y,et al. Femtosecond laser induced destruction ofhigh reverse film and its ultrafast dynamics[J]. Acta Physica. Sinica,55217.
[4]丁雯钰,汪帮富,王中旺.高频飞秒激光对铜片烧蚀过程热弛豫现象研究[J].激光与红外,2018,48(5),544-549。
[5]Semak V V,Thomas J G,Campbell B R. Melting threshold and melt re-moval dynamics during laserinteraction with steel and Hg CdTe in femto-second regime[J]. Laser and Applications in Science and Engineering,2004:448-453.
[6]Zhang Keyan. Phase transition speed research of metal material at laser irra-diation medium strength[J]. Acta Physica Sinica,2004,53(6):1815-1819.
[7]Falkovsky LA,Mishchenko E G. Electron-lattice kinetics of metals heat-ed by ultrashort laser pulses[J]. Journal of Experimental and TheoreticalPhysics,1999,88:84-88.
[8]Chen J K,Beraun J E. Numerical study of ultrashort laser pulse interac-tions with metal files[J]. Numerical Heat Transfer,2001,40:1-20.
[9]Zhao Shiqiang,Li Ling. Numerical investigation of phase change duringthermal ablation of gold films induced by femtosecond Laser[J]. ActaOptica Sinica,2015,35(12):1214001.
[10]Her T H,Finlay R J,Wu C,et al. Microstructuring of silicon with femto-second laser pulses[J]. Applied Physics Letters,1998,73(12):1673-1675.
[11]Feng P,Zhang N,Wu H,et al. Effcet of ambient air on femtosecondlaser ablation of highly oriented pyrolytic graphite[J]. Optics Letters,2015,40(1):17-20.
[12]Wang Limei,Zeng,Xinwu. Molecular dynamics simulation of 266nmfemtosecond laser ablation of monocrystalline silicon[J]. High Power La-ser and Particle Beams,2008,20(8):1360-1364.
[13]Wang Zhijun. The interaction of femtosecond laser and metal material[D]. Tianjin:Tianjin University,2007.
[14]Boulmerleborgne C,Benzerga R,Perrière J. Nanoparticle formation byfemtosecond laser ablation[J]. Journal of Physics D-Applied Physics,2007,40(22):7069-7076.
[15]闫焱,李凌.飞秒激光照射金箔的分子动力学模拟[J].光学学报,2016(8):166-171.
[16]Feng Peipei,Wu Han,Zhang Nan. Study of the time-resolved emissionspectra of the ejected plume generated by ultrashort laser ablation ofgraphite[J]. Acta Physica Sinica,2015,64(21):214201.
[17]Xia B,Jiang L,Wang S M,et al. Femtosecond laser drilling of micro-holes[J]. Chinese Journal of Lasers,2013,40(2):0201001.
[18]Zhao Q L,Jiang T,Dong Z H,et al. Ablation threshold and materialremova lmechanisms of SiC processed by femtosecond laser[J]. Pro-ceedings of the Institution of Mechanical Engineers Part H-Journal ofEngineering in Medicine,2010,46(21):172-177.
[19]Zhigilei L V,Kodali P B S,Garrison B J. Moleecular dynamics modelfor laser ablation and desorption of organic solids[J]. Journal of PhysicalChemistry B,1997,101:2028.
[20]姜琛昱.铅的激光诱导击穿光谱研究:形貌模拟与检测应用[D].天津:天津大学,2009.
[21]Mei J,Davenport J W. Free-energy calculations and the melting pointof Al[J]. Physical Review B,1992,46:21-25.
[22]Tersoff J. New empirical approach for the structure and energy ofcovalent systems[J]. Physical Review B,1988,37(12):6991.
[23]Balamane H,Halicioglu T,and Tiller W A. Comparative study ofsilicon empirical interatomic potentials[J]. Physical Review B,1992,46(4):2250.
[24]辛建婷,祝文军,刘仓理.飞秒激光辐照铝材料的分子动力学数值模拟[J].爆炸与冲击,2004,24(3):207.
[25]Chcn J K,Tzou D Y,Beraun J E. A semiclassical two-temperaturemodel for ultrafast laser heating[J]. International Journal of Heat andMass Transfer,2006,49(1):307-316.
[26]Anisimov S I,Kapcliovich B L,Perel'man TL. Electron emission frommetal surface exposed to ultrashort laser pulses[J]. Soviet Journal of Ex-perimental and Theoretical Physics,1974,39:375-377.
[27]陈安民,姜远飞,刘航,等.双温方程用于飞秒激光烧蚀金属的模拟分析[J].激光与红外,2012,42(8):847-851.
[28]王丽梅.飞秒激光烧蚀硅的分子动力学模拟[D].长沙:国防科学技术大学,2008.
[2]杨建军.飞秒激光超精细“冷”加工技术及其应用[J].激光与光电子学进展,2004,41(3):42-52.
[3]Li C B,Jia T Q,Sun H Y,et al. Femtosecond laser induced destruction ofhigh reverse film and its ultrafast dynamics[J]. Acta Physica. Sinica,55217.
[4]丁雯钰,汪帮富,王中旺.高频飞秒激光对铜片烧蚀过程热弛豫现象研究[J].激光与红外,2018,48(5),544-549。
[5]Semak V V,Thomas J G,Campbell B R. Melting threshold and melt re-moval dynamics during laserinteraction with steel and Hg CdTe in femto-second regime[J]. Laser and Applications in Science and Engineering,2004:448-453.
[6]Zhang Keyan. Phase transition speed research of metal material at laser irra-diation medium strength[J]. Acta Physica Sinica,2004,53(6):1815-1819.
[7]Falkovsky LA,Mishchenko E G. Electron-lattice kinetics of metals heat-ed by ultrashort laser pulses[J]. Journal of Experimental and TheoreticalPhysics,1999,88:84-88.
[8]Chen J K,Beraun J E. Numerical study of ultrashort laser pulse interac-tions with metal files[J]. Numerical Heat Transfer,2001,40:1-20.
[9]Zhao Shiqiang,Li Ling. Numerical investigation of phase change duringthermal ablation of gold films induced by femtosecond Laser[J]. ActaOptica Sinica,2015,35(12):1214001.
[10]Her T H,Finlay R J,Wu C,et al. Microstructuring of silicon with femto-second laser pulses[J]. Applied Physics Letters,1998,73(12):1673-1675.
[11]Feng P,Zhang N,Wu H,et al. Effcet of ambient air on femtosecondlaser ablation of highly oriented pyrolytic graphite[J]. Optics Letters,2015,40(1):17-20.
[12]Wang Limei,Zeng,Xinwu. Molecular dynamics simulation of 266nmfemtosecond laser ablation of monocrystalline silicon[J]. High Power La-ser and Particle Beams,2008,20(8):1360-1364.
[13]Wang Zhijun. The interaction of femtosecond laser and metal material[D]. Tianjin:Tianjin University,2007.
[14]Boulmerleborgne C,Benzerga R,Perrière J. Nanoparticle formation byfemtosecond laser ablation[J]. Journal of Physics D-Applied Physics,2007,40(22):7069-7076.
[15]闫焱,李凌.飞秒激光照射金箔的分子动力学模拟[J].光学学报,2016(8):166-171.
[16]Feng Peipei,Wu Han,Zhang Nan. Study of the time-resolved emissionspectra of the ejected plume generated by ultrashort laser ablation ofgraphite[J]. Acta Physica Sinica,2015,64(21):214201.
[17]Xia B,Jiang L,Wang S M,et al. Femtosecond laser drilling of micro-holes[J]. Chinese Journal of Lasers,2013,40(2):0201001.
[18]Zhao Q L,Jiang T,Dong Z H,et al. Ablation threshold and materialremova lmechanisms of SiC processed by femtosecond laser[J]. Pro-ceedings of the Institution of Mechanical Engineers Part H-Journal ofEngineering in Medicine,2010,46(21):172-177.
[19]Zhigilei L V,Kodali P B S,Garrison B J. Moleecular dynamics modelfor laser ablation and desorption of organic solids[J]. Journal of PhysicalChemistry B,1997,101:2028.
[20]姜琛昱.铅的激光诱导击穿光谱研究:形貌模拟与检测应用[D].天津:天津大学,2009.
[21]Mei J,Davenport J W. Free-energy calculations and the melting pointof Al[J]. Physical Review B,1992,46:21-25.
[22]Tersoff J. New empirical approach for the structure and energy ofcovalent systems[J]. Physical Review B,1988,37(12):6991.
[23]Balamane H,Halicioglu T,and Tiller W A. Comparative study ofsilicon empirical interatomic potentials[J]. Physical Review B,1992,46(4):2250.
[24]辛建婷,祝文军,刘仓理.飞秒激光辐照铝材料的分子动力学数值模拟[J].爆炸与冲击,2004,24(3):207.
[25]Chcn J K,Tzou D Y,Beraun J E. A semiclassical two-temperaturemodel for ultrafast laser heating[J]. International Journal of Heat andMass Transfer,2006,49(1):307-316.
[26]Anisimov S I,Kapcliovich B L,Perel'man TL. Electron emission frommetal surface exposed to ultrashort laser pulses[J]. Soviet Journal of Ex-perimental and Theoretical Physics,1974,39:375-377.
[27]陈安民,姜远飞,刘航,等.双温方程用于飞秒激光烧蚀金属的模拟分析[J].激光与红外,2012,42(8):847-851.
[28]王丽梅.飞秒激光烧蚀硅的分子动力学模拟[D].长沙:国防科学技术大学,2008.