基于菲涅尔衍射的圆孔直径测量
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摘要
本文提出一种新的圆孔直径测量的方法。平行光照射下,圆孔直径和菲涅尔衍射光强分布中峰值轮廓直径存在一定的关系,根据该关系可以实现圆孔直径的测量。仿真和实验数据证明,该方法对于直径5~10 mm的圆孔可以达到亚微米级的测量精度。
A new diameter measurering method of circular aperture based on Fresnel diffraction is proposed. Under the irradiation of parallel light,there is a special relationship between the diameter of peak contour in Fresnel diffraction light intensity distribution and the diameter of circular aperture to be measured,and then the diameter of the circular aperture can be measured according to the relationship. Simulations and experiments show that the accuracy of this method can reach up to submicro order for the measurement of the circular apertures with diameter of 5 ~ 10 mm.
A new diameter measurering method of circular aperture based on Fresnel diffraction is proposed. Under the irradiation of parallel light,there is a special relationship between the diameter of peak contour in Fresnel diffraction light intensity distribution and the diameter of circular aperture to be measured,and then the diameter of the circular aperture can be measured according to the relationship. Simulations and experiments show that the accuracy of this method can reach up to submicro order for the measurement of the circular apertures with diameter of 5 ~ 10 mm.
引文
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[11]LUO Xiaohe,HUI Mei,ZHU Qiudong,et al.Quantummathematical model of edge and peak point in Fresnel diffraction through a slit[J].Chin.Phys.B,2017,26(5):054202.
[2]JIE Sanxia,FAN Weijun.Research on application of image method detection based on visualuniversal tool-microscope[J].Laser&Infrared,2010,40(9):997-1000.(in Chinese)解三霞,范伟军.目视万能工具显微镜的影像测量应用研究[J].激光与红外,2010,40(9):997-1000.
[3]LI Yan.Technology of precision measurement[M].Beijing:Standards Press of China,2008.(in Chinese)李岩.精密测量技术[M].北京:中国标准出版社,2008.
[4]ZHANG Jianrong,JIANG Yuming.Research into a method for on-line CCD imaging measurement of the diameter of glass rod[J].J.Applied Optics,2004,25(3):53-56.(in Chinese)张建荣,姜昱明.CCD成像在线测量玻璃棒直径的方法研究[J].应用光学,2004,25(3):53-56.
[5]ZHANG Tieying,BAI Fuzhong,SONG Xiaoyan,et al.Image measuring method for width of straight-edge object[J].Laser&Infrared,2014,44(2):222-226.(in Chinese)张铁英,百福忠,宋小燕,等.一种直边缘物体宽度的图像测量法[J].激光与红外,2014,44(2):222-226.
[6]ZHAO Bin,YAN Weibin.Measurement of wire diameter by two point sources projection[J].Optics and Precision Engineering,2003,11(2):171-175.(in Chinese)赵斌,颜伟彬.双光源投影法细丝直径测量[J].光学精密工程,2003,11(2):171-175.
[7]ZHAO Yuliang,XU Zhaolin.Amelioration and precision improving of slit width measurement system based on the orthogonal linear CCD[J].Infrared and Laser Engineering,2006,35(1):75-77.(in Chinese)赵育良,许兆林.基于CCD的微缝宽激光测量系统的改进[J].红外与激光工程,2006,35(1):75-77.
[8]YANG Ping,ZHANG Yujie.Research on laser diffraction in pass measurement of wire drawing dies[J].Laser&Infrared,2017,47(2):150-153.(in Chinese)杨萍,张玉杰.激光衍射在拉丝模孔型测量中的研究[J].激光与红外,2017,47(2):150-153.
[9]YANG Sa.Using CCD censor to receive the Laser diffraction andmeasure the precise slot width and round hole radius[J].Journal of the Hebei Academy of Sciences,2009,26(3):13-15.(in Chinese)杨飒.利用CCD接收激光衍射的方法测量精密缝宽和圆孔直径[J].河北省科学院学报,2009,26(3):13-15.
[10]XIE Jinghui,ZHAO Dazun,YAN Jixiang.Physical optics course[M].Beijing:Beijing Institute of Technology Press,2012.(in Chinese)谢敬辉,赵达尊,阎吉祥.物理光学教程[M].北京:北京理工大学出版社,2012.
[11]LUO Xiaohe,HUI Mei,ZHU Qiudong,et al.Quantummathematical model of edge and peak point in Fresnel diffraction through a slit[J].Chin.Phys.B,2017,26(5):054202.