压电驱动三自由度柔顺精密定位平台研究
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摘要
设计了一种由压电陶瓷驱动的整体式平面3-PRR柔顺并联定位平台,平台每条支链采用半圆型柔性转动铰链和直角型柔性直线铰链代替传统的转动副和移动副,消除了传统机构的铰链配合间隙和摩擦,通过Ansys软件对两种铰链进行了刚度分析,并在支链的输入端设计了柔性杠杆位移放大机构以提高平台的工作空间。基于"伪刚体模型法"建立了柔顺定位平台的运动学模型,采用Ansys软件对柔顺并联平台进行有限元分析,得到其静力学特性,最后搭建了平台测试实验系统进行了验证实验。通过运动学模型解析结果和有限元仿真结果与实验结果对比,得到在x方向、y方向和转动角φp的最大误差分别为10.81%,9.66%和9.79%,验证了运动学理论模型建模方法的可行性。
In this paper,a novel 3-PRR planar parallel compliant stage driven by piezoelectric actuators is proposed.In order to eliminate the assembly clearance and friction of the traditional joints,the semi-circular flexure hinge and the right-angle flexure hinge are chosen as the flexible rotation joint and flexible prismatic joint in each chain of the stage,respectively,and then the finite element analysis is used to analyze the stiffness of the two types of hinges.In order to achieve larger workspace in a given size,a lever displacement amplification mechanism is planned in each branch.Based on the " Pseudo-rigid Body Model Method",the kinematic model of the compliant positioning stage is established.Then the finite element analysis of the compliant parallel stage is performed using ANSYS software,and its static characteristics are obtained.Finally,the 3-PRR planar parallel compliant stage experimental test system is set to verify the kinematic model.The maximum error results between the theoretical kinematic analysis,the finite element analysis and the experimental tests in x,y,and φ_p directions are 10.81%,9.66%and 9.79%,respectively,which validate the correctness of the kinematic model.
In this paper,a novel 3-PRR planar parallel compliant stage driven by piezoelectric actuators is proposed.In order to eliminate the assembly clearance and friction of the traditional joints,the semi-circular flexure hinge and the right-angle flexure hinge are chosen as the flexible rotation joint and flexible prismatic joint in each chain of the stage,respectively,and then the finite element analysis is used to analyze the stiffness of the two types of hinges.In order to achieve larger workspace in a given size,a lever displacement amplification mechanism is planned in each branch.Based on the " Pseudo-rigid Body Model Method",the kinematic model of the compliant positioning stage is established.Then the finite element analysis of the compliant parallel stage is performed using ANSYS software,and its static characteristics are obtained.Finally,the 3-PRR planar parallel compliant stage experimental test system is set to verify the kinematic model.The maximum error results between the theoretical kinematic analysis,the finite element analysis and the experimental tests in x,y,and φ_p directions are 10.81%,9.66%and 9.79%,respectively,which validate the correctness of the kinematic model.
引文
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[13]杨春辉.平行板型柔性移动副的刚度计算及分析[J].现代制造工程,2013(12):30-32.Yang Chunhui.Stiffness calculation and analysis for straight beam parallel plate flexible prismatic pair[J].Modern Manufacturing Engineering,2013(12):30-32.(in Chinese)
[2]Feng Jin,Gao Feng,Zhao Xiaochao,et al.A new macro-micro dual drive parallel robot for chromosome dissection[J].Journal of Mechanical Science and Technology,2012,26(1):187-194.
[3]张爱梅.平面梁大挠度非线性问题的完备解与柔顺机构精确建模[D].西安:西安电子科技大学,2013.
[4]张鸿阳.基于压电陶瓷驱动器的平面三自由度微动平台研究[D].广州:华南理工大学,2015.
[5]ZhangLijun,Yang Lixin,Sun Lining,et al.Adaptive kalman filter and dynamic recurrent neural networksbased control design of macro-micro manipulator[J].Journal of Control Theory and Applications,2012,10(4):504-510.
[6]胡俊峰,郝亚洲,徐贵阳.传递矩阵法分析平面柔顺机构的振动特性[J].振动、测试与诊断,2015,35(6):1145-1151.Hu Junfeng,Hao Yazhou,Xu Guiyang.Transfer matrix method for analyzing vibration characteristics of planar compliant mechanism[J].Journal of Vibration,Measurement&Diagnosis,2015,35(6):1145-1151.(in Chinese)
[7]Zhu Dachang,Feng Wenjie,An Ziming.Topology optimization integrated design of 3-DOF fully compliant planar parallel manipulator[J].Journal of Mechanical Engineering,2015,51(5):30-36.
[8]Zhu Dachang,Song Majun.Configuration design with topology optimization and vibration frequency analysis for 3-DOF planar integrated fully compliant parallel mechanism[J].Journal of Vibration and Shock,2016,35(3):27-33.
[9]张宪民,龙学俊,林容周.基于视觉的三自由度微动平台输入耦合研究[J].振动、测试与诊断,2013(1):1-5.Zhang Xianmin,Long Xuejun,Lin Rongzhou.Research on the input coupling of three-degree-of-freedom micro-motion platform based on vision[J].Journal of Vibration,Measurement&Diagnosis,2013(1):1-5.(in Chinese)
[10]Wang Ruizhou,Zhang Xianmin.A planar 3-DOF nanopositioning platform with large magnification[J].Precision Engineering,2016,46:221-231.
[11]Jin Mohui,Zhang Xianmin.A new topology optimization method for planar compliant parallel mechanisms[J].Mechanism and Machine Theory,2016,95:42-58.
[12]马立,杨斌,田应仲,等.3-PRR平面三自由度纳米定位平台的设计[J].光学精密工程,2017,25(7):1866-1873.Ma Li,Yang Bin,Tian Yingzhong,et al.Design of 3-DOF nano-positioning platform with 3-PRR structure[J].Optics Precision Engineering,2017,25(7):1866-1873.(in Chinese)
[13]杨春辉.平行板型柔性移动副的刚度计算及分析[J].现代制造工程,2013(12):30-32.Yang Chunhui.Stiffness calculation and analysis for straight beam parallel plate flexible prismatic pair[J].Modern Manufacturing Engineering,2013(12):30-32.(in Chinese)