Effect of Parallel-Plate Geometry on Mode Transition Behavior in Argon Microplasmas: Two-Dimensional Simulation

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英文篇名：Effect of Parallel-Plate Geometry on Mode Transition Behavior in Argon Microplasmas: Two-Dimensional Simulation 作者：刘相梅 ; 宋远红 ; 姜巍 ; 贾文柱 英文作者：Xiang-Mei Liu;Yuan-Hong Song;Wei Jiang;Wen-Zhu Jia;School of Science, Qiqihar University;School of Physics, Dalian University of Technology;School of Physics, Huazhong University of Science and Technology; 中文刊名：WLKB 英文刊名：中国物理快报(英文版) 机构：School of Science, Qiqihar University;School of Physics, Dalian University of Technology;School of Physics, Huazhong University of Science and Technology; 出版日期：2018-04-12 出版单位：Chinese Physics Letters 年：2018 期：v.35 基金：Supported by the Fundamental Research Funds in Heilongjiang Provincial Universities of China under Grant No 135209312 语种：英文; 页：WLKB201804017 页数：4 CN：04 ISSN：11-1959/O4 分类号：74-77

摘要

A two-dimensional self-consistent fluid model is employed to investigate radio-frequency process parameters on the plasma properties in Ar microdischarges. The neutral gas density and temperature balance equations are taken into account. We mainly investigate the effect of the electrode gap on the spatial distribution of the electron density and electron temperature profiles, due to a mode transition from the regime(secondary electrons emission is responsible for the significant ionization) to the regime(sheath oscillations and bulk electrons are responsible for sustaining discharge) induced by a sudden decrease of electron density and electron temperature.The pressure, radio-frequency sources frequency and voltage effects on the electron density are also elaborately investigated.
        A two-dimensional self-consistent fluid model is employed to investigate radio-frequency process parameters on the plasma properties in Ar microdischarges. The neutral gas density and temperature balance equations are taken into account. We mainly investigate the effect of the electrode gap on the spatial distribution of the electron density and electron temperature profiles, due to a mode transition from the regime(secondary electrons emission is responsible for the significant ionization) to the regime(sheath oscillations and bulk electrons are responsible for sustaining discharge) induced by a sudden decrease of electron density and electron temperature.The pressure, radio-frequency sources frequency and voltage effects on the electron density are also elaborately investigated.

引文

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