电容式环形微机电振动陀螺的设计
|
摘要
针对环形振动陀螺结构对称、模态特性参数相同与抗干扰特性好的特点,提出了一种新型的电容式环形微机电振动陀螺。设计了S形弹性支撑梁形式的硅基环形振动陀螺敏感结构,并仿真分析了陀螺的工作模态与幅频响应特性。根据环形振动陀螺的动力学特性,研究了陀螺的机电接口形式与硅基电极的设置方法,建立了硅基电极的电学参数模型与陀螺的角速度敏感模型。基于深离子刻蚀技术设计了简单可行的传感器制备流程,并成功制备了陀螺的敏感结构。实验测试结果显示,该环形微机电振动陀螺驱动与检测模态的谐振频率分别为9 028.86Hz与9 036.15Hz,品质因数分别为25 051与25 026,标度因数为0.589 7mV/((°)·s~(-1))。实验结果验证了陀螺设计与研究方法的正确性,为高性能硅基微机电陀螺的研制提供了一种可行的方案。
A novel MEMS capacitive vibrating ring gyroscope was proposed in this paper based on the advantageous of the ring gyroscope:symmetric resonator,identical mode parameters and excellent anti-interference ability.The sensitive structure of silicon-based capacitive vibrating ring gyroscope with S-shaped elastic supporting beams was designed,and the operating mode and amplitudefrequency response characteristics of the gyroscope were simulated and analyzed. The electromechanical interface and the silicon electrodes setting of the gyroscope were studied,and the electrical parameter model of silicon-based electrodes and theoretical model of gyroscope angular velocity detection were established according to its dynamic characteristics.A simple and feasible processing flow of the gyroscope was prepared by using DRIE technology,and the gyroscope prototype was manufactured successfully.Test results show that the resonance frequency of the gyroscope are 9 028.86 Hz and 9 036.15 Hz with Q-factors of 25 051 and 25 026 in vacuum packaged,respectively,and the scale factor is 0.589 7 mV/((°)·s~(-1)).The experimental results demonstrate the validity and feasibility of the proposed method,which provides an approach to the high-performance silicon-based MEMS gyroscope.
A novel MEMS capacitive vibrating ring gyroscope was proposed in this paper based on the advantageous of the ring gyroscope:symmetric resonator,identical mode parameters and excellent anti-interference ability.The sensitive structure of silicon-based capacitive vibrating ring gyroscope with S-shaped elastic supporting beams was designed,and the operating mode and amplitudefrequency response characteristics of the gyroscope were simulated and analyzed. The electromechanical interface and the silicon electrodes setting of the gyroscope were studied,and the electrical parameter model of silicon-based electrodes and theoretical model of gyroscope angular velocity detection were established according to its dynamic characteristics.A simple and feasible processing flow of the gyroscope was prepared by using DRIE technology,and the gyroscope prototype was manufactured successfully.Test results show that the resonance frequency of the gyroscope are 9 028.86 Hz and 9 036.15 Hz with Q-factors of 25 051 and 25 026 in vacuum packaged,respectively,and the scale factor is 0.589 7 mV/((°)·s~(-1)).The experimental results demonstrate the validity and feasibility of the proposed method,which provides an approach to the high-performance silicon-based MEMS gyroscope.
引文
[1]XIA D Z,YU C,KONG L.The development of micromachined gyroscope structure and circuitry technology[J].Sensors,2014,14:1394-1473.
[2]HU Z X,GALLACHER B J,BURDESS J S,et al..A systematic approach for precision electrostatic mode tuning of a MEMS gyroscope[J].Journal of Micromechanics&Microengineering,2014,24(12):125003.
[3]PUTTY M W.A Micromachined Vibrating Ring Gyroscope[D].Michigan:University of Michigan,1995.
[4]ZAMAN M F,SHARMA A,AYAZI F.The resonating star gyroscope:a novel multiple-shell silicon gyroscope with sub-5deg/hr Allan deviation bias instability[J].IEEE Sensors Journal,2009,9(6):616-624.
[5]AYAZI F,NAJAFI K.High aspect-ratio polysilicon micromachining technology[J].Sensors&Actuators A Physical,2000,87(1-2):46-51.
[6]LIU J L,CHEN D Y,WANG J B.Fabrication and test of an electromagnetic vibrating ring gyroscope based on SOI wafer[J].Journal of Electronics,2014,31(2):168-173.
[7]ZHOU X,WU Y L,WU X Z,et al..A novel ring vibrating gyroscope based on side piezo-electrodes[J].Journal of Central South University,2016,23:555-561.
[8]李建华,徐立新,付博,等.电容式MEMS环形振动陀螺结构设计及加工[J].中国惯性技术学报,2017,25(2):240-243.LI J H,XU L X,FU B,et al..Structure design and processing of capacitive MEMS vibrating ring gyroscope[J].Journal of Chinese Inertial Technology,2017,25(2):240-243.(in Chinese)
[9]HU Z,GALLACHER B.Control and damping imperfection compensation for a rate integrating MEMS gyroscope[C].Inertial Sensors and Systems Symposium.IEEE,2015:1-15.
[10]陈志勇,宋霖,张嵘,等.高Q值微机电陀螺的快速起振控制[J].光学精密工程,2018,26(5):1070-1077.CHEN ZH Y,SONG L,ZHANG R,et al..Rapid start-up control of high Q-factor MEMS gyroscope[J].Opt.Precision Eng.,2018,26(5):1070-1077.(in Chinese)
[11]刘益芳,陈丹儿,戴婷婷.无源MEMS压力开关的设计与制备[J].光学精密工程,2018,26(5):1133-1139.LIU Y F,CHEN D E,DAI T T.Design and fabrication of passive mems pressure switch[J].Opt.Precision Eng.,2018,26(5):1133-1139.(in Chinese)
[12]孙玉洁,段俊萍,王雄师,等.多孔耦合型太赫兹波导定向耦合器的设计[J].红外与激光工程,2017,46(1):255-261.SUN Y J,DUAN J P,WANG X SH,et al..Design of multi-hole terahertz waveguide directional couplers[J].Infrared and Laser Engineering,2017,46(1):255-261.(in Chinese)
[2]HU Z X,GALLACHER B J,BURDESS J S,et al..A systematic approach for precision electrostatic mode tuning of a MEMS gyroscope[J].Journal of Micromechanics&Microengineering,2014,24(12):125003.
[3]PUTTY M W.A Micromachined Vibrating Ring Gyroscope[D].Michigan:University of Michigan,1995.
[4]ZAMAN M F,SHARMA A,AYAZI F.The resonating star gyroscope:a novel multiple-shell silicon gyroscope with sub-5deg/hr Allan deviation bias instability[J].IEEE Sensors Journal,2009,9(6):616-624.
[5]AYAZI F,NAJAFI K.High aspect-ratio polysilicon micromachining technology[J].Sensors&Actuators A Physical,2000,87(1-2):46-51.
[6]LIU J L,CHEN D Y,WANG J B.Fabrication and test of an electromagnetic vibrating ring gyroscope based on SOI wafer[J].Journal of Electronics,2014,31(2):168-173.
[7]ZHOU X,WU Y L,WU X Z,et al..A novel ring vibrating gyroscope based on side piezo-electrodes[J].Journal of Central South University,2016,23:555-561.
[8]李建华,徐立新,付博,等.电容式MEMS环形振动陀螺结构设计及加工[J].中国惯性技术学报,2017,25(2):240-243.LI J H,XU L X,FU B,et al..Structure design and processing of capacitive MEMS vibrating ring gyroscope[J].Journal of Chinese Inertial Technology,2017,25(2):240-243.(in Chinese)
[9]HU Z,GALLACHER B.Control and damping imperfection compensation for a rate integrating MEMS gyroscope[C].Inertial Sensors and Systems Symposium.IEEE,2015:1-15.
[10]陈志勇,宋霖,张嵘,等.高Q值微机电陀螺的快速起振控制[J].光学精密工程,2018,26(5):1070-1077.CHEN ZH Y,SONG L,ZHANG R,et al..Rapid start-up control of high Q-factor MEMS gyroscope[J].Opt.Precision Eng.,2018,26(5):1070-1077.(in Chinese)
[11]刘益芳,陈丹儿,戴婷婷.无源MEMS压力开关的设计与制备[J].光学精密工程,2018,26(5):1133-1139.LIU Y F,CHEN D E,DAI T T.Design and fabrication of passive mems pressure switch[J].Opt.Precision Eng.,2018,26(5):1133-1139.(in Chinese)
[12]孙玉洁,段俊萍,王雄师,等.多孔耦合型太赫兹波导定向耦合器的设计[J].红外与激光工程,2017,46(1):255-261.SUN Y J,DUAN J P,WANG X SH,et al..Design of multi-hole terahertz waveguide directional couplers[J].Infrared and Laser Engineering,2017,46(1):255-261.(in Chinese)