基于F-P标准具的透射物镜焦距测量方法
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摘要
研究了一种基于F-P标准具的透射物镜焦距测量新方法。单色光经F-P标准具后产生的系列圆锥光束作为测量的标准光束,系列圆锥光束圆锥角能从有溯源性的小数重合法准确定出,具备自校准特性。该标准光束通过待测物镜在焦平面处成像为规律已知的同心圆环,由同心圆环计算获得透射物镜焦距值。理论推导了透射物镜焦距测量模型;搭建了测量实验装置,以汞灯绿光作为光源,采用面阵器件实现同心圆环数据采集;重点采用虚拟像元内插与细分技术,结合圆半径回归方法对测量数据进行处理。实验中,结合汞灯两条黄光谱线,用小数重合法确定F-P标准具间隔d,用以焦距的溯源;详细分析了焦距测量不确定度分量并进行了不确定度的计算合成。实验获得,用面阵虚拟像元间距w'作单位的透镜焦距测量结果的相对扩展不确定度为0.031%。讨论了测量实验改进与像元间距w定度的方案设计,可望将焦距值的相对扩展不确定度降低到0.020%以下。
In this paper,a new method for measuring focal length of transmission objective lens based on F-P standard is studied. The conical beams produced by monochromatic light transferring through a F-P etalon isadoptedas the standard light beams for measurement.The cone angles of the conical beams can be determined from the excess fraction methodwhich makes the measurement calibration itself.The standard light beams transfer through the transmission objective lens to create the concentric ringsat the focal planeunder the known law. Then,the focal length of the objective lens can be calculated by the concentric rings. The theoretical measurementmodel for the focal length of the transmission objective lens is deduced. Theexperimental test-bedis set up and the green spectral line of a mercury lamp is adopted as the light source. The concentric ringsare acquired by the plane array photoelectric device. The virtual pixel interpolation,subdivision technique and the circle radius regression method are employed to process the image data. In the experiment,the F-P standard interval dis determined by the excess fraction method with other two yellow spectral lines of the mercury lamp. The uncertainty component of focal length measurement is calculatedin detail. Experimental results show that the relative expanded uncertainty of the objective lens is 0. 031% by using the measurement unit of w'(the virtual pixel distance of the plane array device). The improvement of the experiments and the calibration process design of w are is also discussed. It is expected that the relative expansion uncertainty of the focal length can be reduced 0. 020% at least.
In this paper,a new method for measuring focal length of transmission objective lens based on F-P standard is studied. The conical beams produced by monochromatic light transferring through a F-P etalon isadoptedas the standard light beams for measurement.The cone angles of the conical beams can be determined from the excess fraction methodwhich makes the measurement calibration itself.The standard light beams transfer through the transmission objective lens to create the concentric ringsat the focal planeunder the known law. Then,the focal length of the objective lens can be calculated by the concentric rings. The theoretical measurementmodel for the focal length of the transmission objective lens is deduced. Theexperimental test-bedis set up and the green spectral line of a mercury lamp is adopted as the light source. The concentric ringsare acquired by the plane array photoelectric device. The virtual pixel interpolation,subdivision technique and the circle radius regression method are employed to process the image data. In the experiment,the F-P standard interval dis determined by the excess fraction method with other two yellow spectral lines of the mercury lamp. The uncertainty component of focal length measurement is calculatedin detail. Experimental results show that the relative expanded uncertainty of the objective lens is 0. 031% by using the measurement unit of w'(the virtual pixel distance of the plane array device). The improvement of the experiments and the calibration process design of w are is also discussed. It is expected that the relative expansion uncertainty of the focal length can be reduced 0. 020% at least.
引文
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[3]PARHAM T,MCCARVILLE T J,JOHNSON M A,et al.Focal length measurements for the national ignition facility large lenses[C].Optical Fabrication and Testing Conference,2002.
[4]DEBOO B,SASIAN J.Precisefocal-length measurement technique with a reflective Fresnel-zone hologram[J].Applied optics,2003,42(19):3903-3909.
[5]赵琦,蒋泽伟,孟庆安,等.基于泰伯-莫尔干涉技术的焦距测量系统校准技术研究[J].激光与光电子学进展,2014,51(3):115-119.ZHAO Q,JIANG Z W,MENG Q AN,et al.Calibration technology of focal length measurement system based on Talbot moire interferometry[J].Laser and Optoelectronics Progress,2014,51(3):115-119.
[6]KAFRI O.Noncoherent method for mapping phase objects[J].Optics Letters,1980,5(12):555.
[7]GLATT I,KAFRI O.Determination of the focal length of nonparaxial lenses by moiredeflectometry[J].Applied Optics,1987,26(13):2507-2508.
[8]LIAO L Y,PARKS R E.Precision focal-length measurement using imaging conjugates[J].Optical Engineering,2012,155(9):3604.
[9]KUMAR Y P,NEGI S S,KAMATH M P,et al.Interferometric focal length measurement of positive and negative lenses using a lateral-shearing cyclic path optical configuration setup and polarization phase-shifting interferometry[J].Optica Applicata,2017,56(30):8414-8419.
[10]邱丽荣,李佳,赵维谦,等.激光共焦透镜曲率半径测量系统[J].光学精密工程,2013,21(2):246-252.QIU L R,LI J,ZHAO W Q,et al.Laser confocal lens curvature radius measurement system[J].Optics and Precision Engineering,2013,21(2):246-252.
[11]ZHAO W Q,LI Z,QIU L,et al.Large-aperture laser differential confocal ultra-long focal length measurement and its system[J].Optics Express,2015,23(13):17379.
[12]BORN M,WOLF E,Principles of Optics[M].6th Ed.Oxford:Pergamon Press Ltd.,1980:338-369.
[13]朱鹤年,肖志刚,陈强,等.一种法布里-珀罗标准具测量焦距和转角的方法.PCT/CN2016/078164[P].2016.ZHU H N,XIAO ZH G,CHEN Q,et al.A fabri fabry etalon method for measuring focal length and rotation angle.PCT/CN2016/078164[P].2016.
[14]熊有伦.精密测量的数学方法[M].北京:中国计量出版社,1989:30.XIONG Y L.Mathematical Methods of Precision Measurement[M].Beijing:Chinese Metrology Press,1989:30.
[15]朱鹤年.新概念基础物理实验讲义[M].北京:清华大学出版社,2013:251-262.ZHU H N.Lecture on New Concept Basic Physics Experiment[M].Beijing:Tsinghua University Press,2013:251-262.
[16]Physics Dictionary Editorial Committee.Dirctionary of Physics[M].Baifukan Co,Ltd.,1984:2337.
[17]关振铎.无机材料物理性能[M].北京:清华大学出版社,1992:114-118.GUAN ZH D.Physical Properties of Inorganic Materials[M].Beijing:Tsinghua University press,1992.3114-118.