面阵像元细分用于法布里珀罗标准具间隔测量
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摘要
法布里珀罗(F-P)标准具间隔d的高准确度测量对干涉测量结果具有非常重要的影响。论文基于F-P干涉成像图片信息,结合峰位坐标局域细分原理和圆方程回归,尤其应用了一种新型的虚拟面阵像元细分和信号平滑化技术,准确地求出干涉图像各同心圆环直径Di,实现干涉级次整数部分k0和小数部分ε的准确计算,完成F-P间隔d的三波长小数重合法测定。实验对比分析了细分和非细分方式对测量结果的影响,测得细分方式下的d=(2 009.961 91±0.000 06)μm,d的不确定度粗估值(Uε/k0)=9.8×10-7。实验验证了像元细分方法的有效性,为提高间隔d的测量准确度提供了有效的途径和方法。
The high accuracy of Fabry-Perot(F-P)etalon interval dhas a very important influence on the interference measurement.Based on F-P interference imaging information,combined with the local subdivision principle of the peak coordinate and the regression of circular equation,in particular,a new method of virtual plane pixel subdivision and signal smoothing was applied,and the concentric ring diameter Diwas obtained accurately.Then the accurate calculation of the decimal part and the integer part of the interference order was realized,and the measurement of the interval d by excess fraction method with three-standard wavelengths was completed.In addition,the influence of subdivision and non-subdivision on measurement results was analyzed.With the virtual pixel subdivision,the interval dis(2 009.961 91±0.000 06)μm,and(Uε/k0)is 9.8×10-7.Experiments verify the effectiveness of pixel subdivision method,providing effective ways to improve the accuracy of interval d.
The high accuracy of Fabry-Perot(F-P)etalon interval dhas a very important influence on the interference measurement.Based on F-P interference imaging information,combined with the local subdivision principle of the peak coordinate and the regression of circular equation,in particular,a new method of virtual plane pixel subdivision and signal smoothing was applied,and the concentric ring diameter Diwas obtained accurately.Then the accurate calculation of the decimal part and the integer part of the interference order was realized,and the measurement of the interval d by excess fraction method with three-standard wavelengths was completed.In addition,the influence of subdivision and non-subdivision on measurement results was analyzed.With the virtual pixel subdivision,the interval dis(2 009.961 91±0.000 06)μm,and(Uε/k0)is 9.8×10-7.Experiments verify the effectiveness of pixel subdivision method,providing effective ways to improve the accuracy of interval d.
引文
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[2]MA Jian,LIU Bingqi,HUA Wenshen,et al.Designof Fabry-Perot etalon with transmission linear to inci-dent angle[J].Journal of Optics Applications,2009,30(3):397-402.马健,刘秉琦,华文深,等.一种透过率随入射角近似线性变化的F-P标准具设计[J].应用光学,2009,30(3):397-402.
[3]CHANG Chungping,TUNG Picheng,LI Horng-shyu,et al.Fabry-Perot displacement interferometerfor the measuring range up to 100mm[J].Measure-ment,2013,46(10):4094-4099.
[4]XIA Yinqiu,JIANG Yi,LI Xiaowei,et al.Design offiber F-P etalon with high stability.[J].Opticaltechnology,2016,42(6):557-560.夏吟秋,江毅,李晓炜,等.一种高稳定性光纤F-P标准具的设计[J].光学技术,2016,42(6):557-560.
[5]IVAN Padron,ANTHONY Fiory T,NUGGEHAL-LI Ravindra M.Novel MEMS Fabry-Perot interfero-metric pressure sensors[J].Materials Science Fo-rum,2010,884(638):1009-1014.
[6]JIN Huang, RICARDO Gutierrez-Osuna. Activewavelength selection for mixture identification withtunable mid-infrared detectors[J].Analytica Chimi-ca Acta,2016,937:11-20.
[7]LYU Zuokun,QI Jun,LI Yan,et al.Design andimplementation of efficiency temperature control al-gorithm for Fabry-Perot etalon of spaceborne lidar[J].Journal of Optics Applications,2018,39(01):130-134.吕祚坤,戚俊,李燕,等.星载激光雷达F-P标准具高效温控算法的设计与实现[J].应用光学,2018,39(01):130-134.
[8]HUANG Wencai,XIE Jianping,LYU Liang,et al.Spectral method of F-P etalon spacing high precisionmeasurement[J].Chinese Journal of Lasers:2003(8):739-742.黄文财,谢建平,吕亮,等.高精度测量F-P标准具间距的光谱方法[J].中国激光,2003(8):739-742.
[9]LIU Songjiang,CHANG Ying,XIAO Zhigang,et al.Accurate calculation of the spacing of F-P etalon underthe multi-wavelength weighted regression[J].Infraredand Laser Engineering,2011,40(3):529-532.刘松江,常缨,肖志刚,等.多波长加权回归准确计算F-P标准具的间隔[J].红外与激光工程,2011,40(3):529-532.
[10]BORN M,WOLF E.Principles of optics[M].Beijing:Publishing House of Electronics Industry,2009:338-369.
[11]ZHU Henian.Lecture on new concept basic physicsexperiment[M]. Beijing:Tsinghua Universitypress,2013:251-262.朱鹤年.新概念基础物理实验讲义[M].北京:清华大学出版社,2013:251-262.
[12]CHEN Jiafeng,CHEN Haiqing,CHEN Zhuo.Dis-cussion on the nonlinearity of photoelectric transformof CCD pixel[J].Journal of Huazhong University ofScience and Technology(Natural Science Edition),2002(10):99-101.陈家凤,陈海清,陈卓.面阵CCD各像元光电变换非线性度探讨[J].华中科技大学学报(自然科学版),2002(10):99-101.
[13]XIONG Youlun.Mathematical methods of precisionmeasurement[M].Beijing:Chinese metrology press,1989:30.熊有伦.精密测量的数学方法[M].北京:中国计量出版社,1989:30.