红外激光与微水束耦合对准工艺研究
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摘要
红外激光与微水束耦合划切技术是激光划切应用的前沿领域,在硅晶圆、宝石、陶瓷等材料高精度切割方面具有优势,有效地减小了材料的热损伤和熔渣残留。红外激光束与微水束的耦合对准是研究的关键技术。为保证微水束光纤与激光光束耦合的效果,本文设计了高精度三维耦合对准调整结构,结构主要由准直聚焦光路系统、微孔CCD观测系统、二维微位移平台、耦合装置组成;研究了汇聚激光焦平面与微水束起始端(喷口元件)共面调整的关键工艺和激光光束与喷口元件对准的关键工艺;提出了借助屏幕十字线实现两次对准的工艺方法。经试验验证,微水束耦合激光长度稳定,质量良好,可实现对硅基衬底晶圆等材料的高效无损、高精密划切。
Water-jet guided laser processing technology is the frontier of laser cutting application.It has advantages in the high-precision cutting of silicon wafer,gemstone,ceramic and other materials,and effectively reduces the thermal damage and slag residue of materials.The coupling alignment of infrared laser beam and microwater beam is the key technology.In order to ensure the coupling effect of microbeam fiber and laser beam,a high-precision three-dimensional coupling alignment adjustment mechanism is designed in the paper,which mainly consists of a quasi-straight focus light path system,a microhole CCD observation system,a two-dimensional microdisplacement platform,and a coupling device.The key technology of coplanar adjustment of laser focal plane and microbeam starting end(nozzle element) and alignment of laser beam and nozzle element are studied.The technology method of realizing two alignment by screen crossover is put forward in the paper.The experiments show that the microbeam coupling laser has stable length and good quality,and can achieve high efficiency and high precision cutting of silicon substrate wafers and other materials.
Water-jet guided laser processing technology is the frontier of laser cutting application.It has advantages in the high-precision cutting of silicon wafer,gemstone,ceramic and other materials,and effectively reduces the thermal damage and slag residue of materials.The coupling alignment of infrared laser beam and microwater beam is the key technology.In order to ensure the coupling effect of microbeam fiber and laser beam,a high-precision three-dimensional coupling alignment adjustment mechanism is designed in the paper,which mainly consists of a quasi-straight focus light path system,a microhole CCD observation system,a two-dimensional microdisplacement platform,and a coupling device.The key technology of coplanar adjustment of laser focal plane and microbeam starting end(nozzle element) and alignment of laser beam and nozzle element are studied.The technology method of realizing two alignment by screen crossover is put forward in the paper.The experiments show that the microbeam coupling laser has stable length and good quality,and can achieve high efficiency and high precision cutting of silicon substrate wafers and other materials.
引文
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[3] DUSHKINA N,Wagner F,Boillat C.Water Jet guided laser vs saw dicing[J].Photon Processing in Microelectronics and Photonics,2003,(4977):75-85.
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[5] LI Ling.Study on water-jet guided lasermicronaching technology[D].Harbin:Institute of Technology,2008.(in Chinese)李灵.水导激光微细加工技术研究[D].哈尔滨:哈尔滨工业大学,2008.
[6] ZHAN Caijuan.Analysis of fluid flow in micowater jet guided laser precision drilling process[D].Zhenjiang:Jiangsu University,2009:41-52.(in Chinese)詹才娟.微水射流导引激光精密打孔过程的传热与流动分析[D].镇江:江苏大学,2009:41-52.
[7] YE Ruifang,SHEN Yang,WANG Lei.Study on a new water-guided laser coupling system[J].Journal of Xiamen University,2009,48(3):369-372.(in Chinese)叶瑞芳,沈阳,王磊,等.新型水导引激光耦合系统研究[J].厦门大学学报,2009,48(3):369-372.
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[10] SU D,Boechat A A,Jones J.Dependence of output beam profile on launching conditions in fibre optic beam delivery systems for Nd ∶YAG lasers[C].Proceedings of SPIE,1991(1502):41-51.
[11] SU D,Boechat A A,Jones J.Beam delivery by large-core fibers:effect of launching conditions on near-field output profile[J].Applied Optics,1992(31):5816-5821.
[12] ZHAO Xinghai,GAO Yang,XU Meijian.Power delicery characteristics of fibers for high-peak power pulse laser[J].Infrared and Laser Engineering 2008(37):444-448.(in Chinese)赵兴海,高杨,徐美健,等.高峰值功率脉冲激光的光纤传能特性[J].红外与激光工程,2008(37):444-448.
[13] LI Chunqi,YANG Lijun,WANG Yang.Analysis of the present status on water-jet guided laser processing[DB/OL].China Science and Technology Papers Online,2011:1-8.http://www.paper.edu.cn.(in Chinese)李春奇,杨立军,王扬.水导激光加工技术现状分析[DB/OL].中国科技论文在线,2011:1-8.http://www.paper.edu.cn/.
[14] LI Chunqi.Research on coupling processing technology of laser and micro water jet[D].Harbin:Harbin Institute of Technology,2012.(in Chinese)李春奇,基于激光与微细水射流相耦合的加工技术研究[D].哈尔滨:哈尔滨工业大学,2012.
[2] Richer Zhagen B.Method and apparatus for machining material with a liquid-guided laser beam[P].United States Patent,1999.
[3] DUSHKINA N,Wagner F,Boillat C.Water Jet guided laser vs saw dicing[J].Photon Processing in Microelectronics and Photonics,2003,(4977):75-85.
[4] KAAKKUNEN J,Silvennoinen M,Paivasaari K,et al.Water-assisted femtosecond laser pulse ablation of high aspect ratio holes[J].Physics Procedia,2011,(12):89-93.
[5] LI Ling.Study on water-jet guided lasermicronaching technology[D].Harbin:Institute of Technology,2008.(in Chinese)李灵.水导激光微细加工技术研究[D].哈尔滨:哈尔滨工业大学,2008.
[6] ZHAN Caijuan.Analysis of fluid flow in micowater jet guided laser precision drilling process[D].Zhenjiang:Jiangsu University,2009:41-52.(in Chinese)詹才娟.微水射流导引激光精密打孔过程的传热与流动分析[D].镇江:江苏大学,2009:41-52.
[7] YE Ruifang,SHEN Yang,WANG Lei.Study on a new water-guided laser coupling system[J].Journal of Xiamen University,2009,48(3):369-372.(in Chinese)叶瑞芳,沈阳,王磊,等.新型水导引激光耦合系统研究[J].厦门大学学报,2009,48(3):369-372.
[8] Kocher R C,Jose S,Calif.Fiber optic beam delivery system for high-power laser[P].United States Patent,1987.
[9] Snyder A W.Coupled-mode theory for optical fibers[J].Journal of The Optical Society of America,1972(62):1267-1277.
[10] SU D,Boechat A A,Jones J.Dependence of output beam profile on launching conditions in fibre optic beam delivery systems for Nd ∶YAG lasers[C].Proceedings of SPIE,1991(1502):41-51.
[11] SU D,Boechat A A,Jones J.Beam delivery by large-core fibers:effect of launching conditions on near-field output profile[J].Applied Optics,1992(31):5816-5821.
[12] ZHAO Xinghai,GAO Yang,XU Meijian.Power delicery characteristics of fibers for high-peak power pulse laser[J].Infrared and Laser Engineering 2008(37):444-448.(in Chinese)赵兴海,高杨,徐美健,等.高峰值功率脉冲激光的光纤传能特性[J].红外与激光工程,2008(37):444-448.
[13] LI Chunqi,YANG Lijun,WANG Yang.Analysis of the present status on water-jet guided laser processing[DB/OL].China Science and Technology Papers Online,2011:1-8.http://www.paper.edu.cn.(in Chinese)李春奇,杨立军,王扬.水导激光加工技术现状分析[DB/OL].中国科技论文在线,2011:1-8.http://www.paper.edu.cn/.
[14] LI Chunqi.Research on coupling processing technology of laser and micro water jet[D].Harbin:Harbin Institute of Technology,2012.(in Chinese)李春奇,基于激光与微细水射流相耦合的加工技术研究[D].哈尔滨:哈尔滨工业大学,2012.