半导体激光器双波长光纤耦合模块的ZEMAX设计
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摘要
为了发挥单管半导体激光器的优势,获得光纤耦合模块多波长、高功率、高亮度的光束输出,利用ZEMAX软件仿真模拟,设计了一种单管光纤耦合模块。此模块将32支输出波长分别为915 nm、975 nm,输出功率为15 W的单管半导体激光器,经过微透镜组快慢轴光束整形、空间合束、偏振合束、波长合束以及光束聚焦等一系列工艺后,耦合进芯径200μm、数值孔径0.22的光纤。模拟结果显示,光纤输出功率467.46 W,光纤前后耦合效率大于98.47%,总耦合效率高于97.39%,光功率密度高于12.86 MW/(cm2·sr),达到了泵浦激光器和功率型器件的性能要求。使用Solidworks软件设计了相应的底板结构,并结合ANSYS软件进行散热模拟分析,结果显示该模块散热性能良好,可行性较高。
In order to make full use of the advantages of single emitter semiconductor diode laser and obtain a light beam of more wavelengths,higher power,higher optical power density,a fiber coupled diode laser module was designed,which consisted of 32 single emitter semiconductor diode lasers using incoherent multiplexing by ZEMAX.The wavelengths of semiconductor diode laser were 975 nm and915 nm,the power was 15 W.After the simulation of fast axis collimation,slow axis collimation,spatial multiplexing,polarization multiplexing,wavelength multiplexing,focusing and fiber coupling,this module can produce 467.46 W from a standard optical fiber with core diameter of 200 μm and numerical aperture(NA) of 0.22.The coupling efficiency before-after fiber was above 98.47%,the total coupling efficiency was above 97.39%.The optical power density was above 12.86 MW/(cm2·sr),module can be used as pump laser and high power device.The corresponding packaging structure was designed by Solidworks and its thermal performance was simulated by ANSYS.The final result demonstrates that this module plays a great heat dissipation performance and is of high feasibility.
In order to make full use of the advantages of single emitter semiconductor diode laser and obtain a light beam of more wavelengths,higher power,higher optical power density,a fiber coupled diode laser module was designed,which consisted of 32 single emitter semiconductor diode lasers using incoherent multiplexing by ZEMAX.The wavelengths of semiconductor diode laser were 975 nm and915 nm,the power was 15 W.After the simulation of fast axis collimation,slow axis collimation,spatial multiplexing,polarization multiplexing,wavelength multiplexing,focusing and fiber coupling,this module can produce 467.46 W from a standard optical fiber with core diameter of 200 μm and numerical aperture(NA) of 0.22.The coupling efficiency before-after fiber was above 98.47%,the total coupling efficiency was above 97.39%.The optical power density was above 12.86 MW/(cm2·sr),module can be used as pump laser and high power device.The corresponding packaging structure was designed by Solidworks and its thermal performance was simulated by ANSYS.The final result demonstrates that this module plays a great heat dissipation performance and is of high feasibility.
引文
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[13]Xia Xiaoyu,Gao Xin,Xu Liuyang,et al.Output far field characteristics of high power fiber coupling diode laser based on single emitter devices[J].Chinese Journal of Luminescence,2017,38(2):170-176.(in Chinese)夏晓宇,高欣,许留洋,等.基于单发光区芯片的大功率光纤耦合激光器的输出远场特征分析[J].发光学报,2017,38(2):170-176.
[2]Tong Cunzhu,Wang Lijie,Tian Sicong,et al.Study on Bragg reflection waveguide diode laser[J].Chinese Optics,2015,8(3):480-498.(in Chinese)佟存柱,汪丽杰,田思聪,等.布拉格反射波导半导体激光器的研究[J].中国光学,2015,8(3):480-498.
[3]Liu Youqiang,Cao Yinhua,Li Jing,et al.5 k W fiber coupling diode laser for laser processing[J].Optics and Precision Engineering,2015,23(5):1279-1287.(in Chinese)刘友强,曹银花,李景,等.激光加工用5 k W光纤耦合半导体激光器[J].光学精密工程,2015,23(5):1279-1287.
[4]Zhang Jun,Peng Hangyu,Wang Lijun.High power diode laser beam combining technology and applications[J].Infrared and Laser Engineering,2012,41(12):3193-3197.(in Chinese)张俊,彭航宇,王立军.半导体激光合束技术及应用[J].红外与激光工程,2012,41(12):3193-3197.
[5]Wang Lijun,Peng Hangyu,Zhang Jun.Advance on high power diode laser coupling[J].Chinese Optics,2015,8(4):517-534.(in Chinese)王立军,彭航宇,张俊.大功率半导体激光合束进展[J].中国光学,2015,8(4):517-534.
[6]Ni Yuxi,Ma Xiaoyu,Jing Hongqi,et al.Finite element analysis of expansion-matched submounts for high-power laser diodes packaging[J].Journal of Semiconductors,2016,37(6):064005.
[7]Zhu Hongbo,Li Yanhua,Hao Mingming,et al.Fiber coupled diode laser module for laser processing by polarization multiplexing[J].Optics and Precision Engineering,2013,21(5):1137-1143.(in Chinese)朱洪波,李艳华,郝明明,等.基于偏振复用技术的半导体激光加工光纤耦合模块[J].光学精密工程,2013,21(5):1137-1143.
[8]Zhu Hongbo,Hao Mingming,Peng Hangyu,et al.Module of fiber coupled diode laser based on 808 nm single emitters combination[J].Chinese Journal of Lasers,2012,39(5):1-5.(in Chinese)朱洪波,郝明明,彭航宇,等.基于808 nm半导体激光器单管合束技术的光纤耦合模块[J].中国激光,2012,39(5):1-5.
[9]Xu Dan,Huang Xuesong,Jiang Menghua,et al.500 W fiber-coupled semiconductor laser module[J].Infrared and Laser Engineering,2016,45(6):0606003.(in Chinese)徐丹,黄雪松,姜梦华,等.500 W光纤耦合半导体激光模块[J].红外与激光工程,2016,45(6):0606003.
[10]Wang Xin,Wang Cuiluan,Wu Xia,et al.Researching the915 nm high-power and high-brightness semiconductor laser single chip coupling module[J].Journal of Semiconductors,2017,38(2):024006.
[11]Jing Hongqi,Zhong Li,Ni Yuxi,et al.Design and simulation of a novel high-efficiency cooling heat-sink structure using fluid-thermodynamics[J].Journal of Semiconductors,2015,36(10):122006.
[12]Zhou Zepeng,Bo Baoxue,Gao Xin,et al.Fiber coupling design of high power semiconductor laser based on ZEMAX[J].Chinese Journal of Luminescence,2013,34(9):1208-1212.(in Chinese)周泽鹏,薄报学,高欣,等.基于ZEMAX高功率半导体激光器光纤耦合设计[J].发光学报,2013,34(9):1208-1212.
[13]Xia Xiaoyu,Gao Xin,Xu Liuyang,et al.Output far field characteristics of high power fiber coupling diode laser based on single emitter devices[J].Chinese Journal of Luminescence,2017,38(2):170-176.(in Chinese)夏晓宇,高欣,许留洋,等.基于单发光区芯片的大功率光纤耦合激光器的输出远场特征分析[J].发光学报,2017,38(2):170-176.