三氟化氮气体的检测方法研究进展
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摘要
三氟化氮(NF_3)是一种重要的电子气体和常用的氟化剂,广泛应用于微电子工业领域中。介绍了NF_3气体检测技术的发展现状,对比分析了各种技术的优缺点,展望了NF_3气体检测仪的未来发展趋势。目前针对NF_3较为成熟的检测器主要是催化热裂解/电化学原理气体传感器、超高温裂解/电化学原理气体传感器和气相色谱仪,其中热裂解/电化学原理气体传感器检测存在精度不高且需要考虑尾气处理的问题,不是一种理想的检测技术,气相色谱仪受限于较差的便携性及复杂的调试程序,因而主要用于实验室中的气体分析,而基于非色散红外(NDIR)及傅里叶变换红外(FTIR)检测技术的NF_3检测方法具有快速便捷无污染的优点,同时NDIR技术可实现检测仪器的便携化,基于此有望开发出一种环保、便携、快速的检测仪器。在未来,随着检测手段的不断革新和丰富,三氟化氮的定量也必将更加细致和完备,进一步有利于相关行业的发展和质量体系的完善。
The nitrogen trifluoride(NF_3) is an important electronic gas and commonly used as a fluorinating agent,which is widely used in the microelectronics industry. In this paper, the present situation and trend of NF_3 gas detection technology were introduced, the advantages and disadvantages of various technologies were analyzed, and the development trend of NF_3 gas detector was prospected. At present, the more mature detectors for NF_3 are mainly catalytic thermal cracking/electrochemistry principle gas sensors, ultra-high temperature cracking/electrochemistry principle gas sensors and gas chromatographs. Among them, the former has low precision and needs to consider the problem of exhaust gas, it's not an ideal detection technique. Gas chromatographs are limited by poor portability and complex debugging procedures, so it is mainly used for gas analysis in the laboratory. However, based on non-dispersive infrared(NDIR) and Fourier transform infrared(FTIR)detection techniques, NF_3 detection has the advantages of simple, quick and no pollution. At the same time, NDIR technology can realize the portability of instruments; it is expected to develop an environmentally friendly, portable and fast detecting instrument. In the future,with the continuous innovation and enrichment of detection methods, the quantification of NF_3 will be more detailed and complete, which will further benefit the development of related industries and the improvement of quality system..
The nitrogen trifluoride(NF_3) is an important electronic gas and commonly used as a fluorinating agent,which is widely used in the microelectronics industry. In this paper, the present situation and trend of NF_3 gas detection technology were introduced, the advantages and disadvantages of various technologies were analyzed, and the development trend of NF_3 gas detector was prospected. At present, the more mature detectors for NF_3 are mainly catalytic thermal cracking/electrochemistry principle gas sensors, ultra-high temperature cracking/electrochemistry principle gas sensors and gas chromatographs. Among them, the former has low precision and needs to consider the problem of exhaust gas, it's not an ideal detection technique. Gas chromatographs are limited by poor portability and complex debugging procedures, so it is mainly used for gas analysis in the laboratory. However, based on non-dispersive infrared(NDIR) and Fourier transform infrared(FTIR)detection techniques, NF_3 detection has the advantages of simple, quick and no pollution. At the same time, NDIR technology can realize the portability of instruments; it is expected to develop an environmentally friendly, portable and fast detecting instrument. In the future,with the continuous innovation and enrichment of detection methods, the quantification of NF_3 will be more detailed and complete, which will further benefit the development of related industries and the improvement of quality system..
引文
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[18] J. Melendez, Castro A J D, F. Lopez, et al. Spectrally selective gas cell for electrooptical infrared compact multi gas sensor[J]. Sensors and Actuators A(Physical), 1995,47(1-3):417-421.
[19] Corman T,Kalvesten E, Huiku M,et al. An optical IR-source and C02-chamber system for CO_2 measurements[J]. J. Micro. Sys., 2000,9(4):509-516.
[20] Ji X, Zhao X,Jing P, et al. Narrow-band midinfrared thermal emitter based on photonic crystal for NDIR gas sensor[C]. IEEE International Conference on Solid-state&Integrated Circuit Technology. IEEE, 2010.
[21]连晨舟,吕子安,徐旭常.典型毒害气体的FTIR吸收光谱分析[J].中国环境监测.2004, 20(2):17-20.
[22]彭晶.NDIR便携式气体传感器关键技术的研究[D].上海:复旦大学,2011.
[23]张莹,杨曙明.FTIR在物质结构分析方面的研究进展[J].光谱学与光谱分析,2017, 37(1):54-57.
[24]N. Boulaftali, N.Ben Sari-Zizi, U. Wotzel. The v 4=1 State of 14 NF3,at 493 cm~(-1),Studied by High-Resolution FTIR, Centimeter-Wave,and Millimeter-Wave Spectroscopy[J]. Journal of Molecular Spectroscopy,2002, 212(1):41-52.
[25] Beskers T F, Hofe T, Wilhelm M. Development of a chemically sensitive online SEC detector based on FTIR spectroscopy[J]. Polym.Chem. 2015, 6(1):128-142.
[26]张晓丹.手持式傅里叶变换红外光谱技术的特点及其在无损检测方面的应用[J].现代科学仪器,2013(4):269-272.
[2] Takagi T,Tamura M, Shibakami M, et al. Preparation of tetrafluorohydrazine from nitrogen trifluoride with iron or iron(Ⅱ)fluoride[J]. Journal of Fluorine Chemistry, 2000, 105(1):45-47.
[3] Ferraris M. Different processes for the preparation of fluorozirconate glasses[J]. Materials Research Bulletin, 1990, 25(7):891-897.
[4] Mcnamara B K,Buck E C,Soderquist C Z, et al. Separation of metallic residues from the dissolution of a high-burnup BWR fuel using nitrogen trifluoride[J]. Journal of Fluorine Chemistry, 2014,162:1-8.
[5] Nitrogen Trifluoride Market Research Report-Global Forecast to2027[R]. PR Newswire US, 05/20/2016.
[6] Dillon T J, Horowitz A, Crowley J N. Cross-sections and quantum yields for the atmospheric photolysis of the potent greenhouse gas nitrogen trifluoride[J]. Atmospheric Environment, 2010,44(9):1186-1191.
[7] Chu Z Z, You L B, Wang Q S, et al. Development of optical fiber sensing technology for harmful gases detecting[J]. Transducer&Microsystem Technologies, 2016.
[8]宫克,冷俊,潘一,等.输气管道泄露检测技术进展[J].当代化工,2014(12):2663-2665.
[9] Claudino D, Gargano R, Carvalho,silva V H, et al. Investigation of the Abstraction and Dissociation Mechanism in the Nitrogen Trifluoride Channels:Combined Post-Hartree-Fock and Transition State Theory Approaches[J]. Journal of Physical Chemistry A, 2016,120(28):5464-5473.
[10]张小水,祁明锋,刘建钢,等.基于热裂解与电化学反应原理的SF6气体检测器设计[J].陶瓷学报,2008, 29(3):309-311.
[11]杜海波,田亮亮,王祥斌,等.一种检测三氟化氮气体的方法[J].科技传播,2014(14).
[12]张晓勇,杨国庆,李程.两种便携式仪器在应急监测中的应用[J].中国资源综合利用,2018(3).
[13]姜杰,肖奎硕,高静,等.基于低热容色谱技术便携式气相色谱仪的研制[J].分析仪器,2017(5).
[14] Robson J I, Gohar L K, Hurley M D, et al. Revised IR spectrum,radiative efficiency and global warming potential of nitrogen trifluoride[J]. Geophysical Research Letters, 2006, 33(10).
[15]林喆,于洋.新型非分光红外CO_2气体浓度分析仪的开发与研究[J].传感器世界,2008, 14(7):13-16.
[16] Yang W B, Yuan C S, Huang B Q, et al. Emission Characteristics of Greenhouse Gases and Their Correlation with Water Quality at an Estuarine Mangrove Ecosystem-the Application of an In-situ On-site NDIR Monitoring Technique[J]. Wetlands, 2018(4):1-16.
[17] Frodl R, Tille T. A High-Precision NDIR CO2 Gas Sensor for Automotive Applications[J]. IEEE Sensors Journal, 2006,6(6):1697-1705.
[18] J. Melendez, Castro A J D, F. Lopez, et al. Spectrally selective gas cell for electrooptical infrared compact multi gas sensor[J]. Sensors and Actuators A(Physical), 1995,47(1-3):417-421.
[19] Corman T,Kalvesten E, Huiku M,et al. An optical IR-source and C02-chamber system for CO_2 measurements[J]. J. Micro. Sys., 2000,9(4):509-516.
[20] Ji X, Zhao X,Jing P, et al. Narrow-band midinfrared thermal emitter based on photonic crystal for NDIR gas sensor[C]. IEEE International Conference on Solid-state&Integrated Circuit Technology. IEEE, 2010.
[21]连晨舟,吕子安,徐旭常.典型毒害气体的FTIR吸收光谱分析[J].中国环境监测.2004, 20(2):17-20.
[22]彭晶.NDIR便携式气体传感器关键技术的研究[D].上海:复旦大学,2011.
[23]张莹,杨曙明.FTIR在物质结构分析方面的研究进展[J].光谱学与光谱分析,2017, 37(1):54-57.
[24]N. Boulaftali, N.Ben Sari-Zizi, U. Wotzel. The v 4=1 State of 14 NF3,at 493 cm~(-1),Studied by High-Resolution FTIR, Centimeter-Wave,and Millimeter-Wave Spectroscopy[J]. Journal of Molecular Spectroscopy,2002, 212(1):41-52.
[25] Beskers T F, Hofe T, Wilhelm M. Development of a chemically sensitive online SEC detector based on FTIR spectroscopy[J]. Polym.Chem. 2015, 6(1):128-142.
[26]张晓丹.手持式傅里叶变换红外光谱技术的特点及其在无损检测方面的应用[J].现代科学仪器,2013(4):269-272.