基于双波长法补偿空气折射率的激光追踪系统ZEMAX仿真方法
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摘要
提出了一种基于双波长法补偿空气折射率的激光追踪测量系统的ZEMAX仿真分析方法。利用光学器件对偏振光的变换特性来建立系统的能量模型,建立了基于ZEMAX软件的光学系统模型,分析了光学系统中非理想的光学元件性能对干涉条纹对比度的影响。仿真分析结果表明,当光学系统分光部分、追踪部分和接收部分的分光镜的分光比分别为2…8、6…4和5…5时,条纹对比度达到0.99,光学系统的干涉效果最好。光学系统中的偏振分光镜在非理想条件下,对干涉信号的条纹对比度的影响较小。
In this study,we propose a ZEMAX simulation analysis method for laser tracking measurement using a dual-wavelength method to compensate for the refractive index of air.We first develop an energy model for the system using optical elements to transform its polarization characteristics.We then establish an optical-system model based on ZEMAX to analyze the influence of the non-ideal performance of optical elements on the visibility of fringe pattern.The simulation results show that the interference pattern is most obvious when the splitting ratios of the beam splitters in the spectroscopic part of the system,the tracking part,and the receiving part are 2…8,6…4,and5…5,respectively.The polarization beam splitters in the optical system have little influence on the visibility of the fringe pattern under non-ideal conditions.
In this study,we propose a ZEMAX simulation analysis method for laser tracking measurement using a dual-wavelength method to compensate for the refractive index of air.We first develop an energy model for the system using optical elements to transform its polarization characteristics.We then establish an optical-system model based on ZEMAX to analyze the influence of the non-ideal performance of optical elements on the visibility of fringe pattern.The simulation results show that the interference pattern is most obvious when the splitting ratios of the beam splitters in the spectroscopic part of the system,the tracking part,and the receiving part are 2…8,6…4,and5…5,respectively.The polarization beam splitters in the optical system have little influence on the visibility of the fringe pattern under non-ideal conditions.
引文
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[20]Chen Q H,Yan J Q,Liu Z Y,et al.An air refractometer with dual vacuum chambers based on method of equivalent synthetic wave[J].Acta Metrologica Sinica,2004,25(3):203-206.陈强华,闫聚群,柳忠尧,等.基于等效合成波方法的双真空管空气折射率测量仪[J].计量学报,2004,25(3):203-206.
[21]Chen H F,Ding X M,Zhong Z,et al.Effect of nonlinearity by the rotation of the polarizer in laser heterodyne interferometric[J].Chinese Journal of Lasers,2005,32(9):1281-1285.陈洪芳,丁雪梅,钟志,等.激光外差干涉检偏器旋转误差对非线性误差的影响[J].中国激光,2005,32(9):1281-1285.
[22]Chen H F,Sun Y Q,Wang Y W,et al.Highprecision laser tracking measurement method and experimental study[J].Chinese Journal of Lasers,2018,45(1):0104003.陈洪芳,孙衍强,王亚韦,等.高精度激光追踪测量方法及实验研究[J].中国激光,2018,45(1):0104003.
[23]Liao Y B.Polarization optics[M].Beijing:Science Press,2003:57.廖延彪.偏振光学[M].北京:科学出版社,2003:57.
[24]Deng Y L,Li X J,Geng Y F,et al.Influence of nonpolarizing beam splitters on nonlinear error in heterodyne interferometers[J].Acta Optica Sinica,2012,32(11):1112008.邓元龙,李学金,耿优福,等.非偏振分光镜对外差干涉仪非线性误差的影响[J].光学学报,2012,32(11):1112008.
[25]Zhang S,Huang D X,Yin D L,et al.Design of a novel polarization beam splitting prism and its applications[J].Opto-Electronic Engineering,2003,30(1):46-49.张晟,黄德修,殷东亮,等.一种新型偏振分光棱镜的设计和应用[J].光电工程,2003,30(1):46-49.
[26]Liu Z J,Cui L S,Xie D L.Theory analysis and measurement for interference fringes of laser Doppler velocimeter[J].Chinese Journal of Lasers,2017,44(8):0804001.刘子君,崔骊水,谢代梁.激光多普勒流速仪的干涉条纹理论分析及测量[J].中国激光,2017,44(8):0804001.
[27]ZEMAX Development Corporation.ZEMAX optical design program user′s guide[EB/OL].(2005-02-03)[2018-08-15].http:∥www.zemax.com.
[28]Chen H F,Tang L,Sun Y Q,et al.Zemax simulation based energy analysis of optical system for laser tracking measurement[J].Chinese Journal of Lasers,2018,45(7):0704009.陈洪芳,汤亮,孙衍强,等.基于Zemax仿真的激光追踪测量光学系统能量分析[J].中国激光,2018,45(7):0704009.
[2]Coddington I,Swann W C,Nenadovic L,et al.Rapid and precise absolute distance measurements at long range[J].Nature Photonics,2009,3(6):351-356.
[3]Baumann E,Giorgetta F R,Deschênes J D,et al.Comb-calibrated laser ranging for three-dimensional surface profiling with micrometer-level precision at a distance[J].Optics Express,2014,22(21):24914-24928.
[4]Wendt K,Franke M,Hrtig F.Measuring large 3Dstructures using four portable tracking laser interferometers[J].Measurement,2012,45(10):2339-2345.
[5]Teoh P L,Shirinzadeh B,Foong C W,et al.The measurement uncertainties in the laser interferometrybased sensing and tracking technique[J].Measurement,2002,32(2):135-150.
[6]Lau K,Hocken R J,Haight W C.Automatic laser tracking interferometer system for robot metrology[J].Precision Engineering,1986,8(1):3-8.
[7]Li D G,Zhang G X.Measurement and compensation for refractive index of air using a pre-evacuated airtight sealed cavity[J].Optics and Precision Engineering,2001,9(1):80-84.李东光,张国雄.用预抽气真空腔法测量及补偿空气折射率的研究[J].光学精密工程,2001,9(1):80-84.
[8]Ma B T,Pei C Y,Li X C.Modified formula of environmental conditions in precision measurement of optical glass refractive index[J].Journal of Applied Optics,2012,33(5):936-939.马伯涛,裴春艳,李小春.光学玻璃折射率精密测量中环境条件修正公式的研究[J].应用光学,2012,33(5):936-939.
[9]Ni Y C.Modification of air derivative Edlén formula[J].Metrology Technology,1998(3):22-27.倪育才.空气折射率埃德林公式的修改[J].计量技术,1998(3):22-27.
[10]Cui J J.Research on high precision temperature control and PTF measurement[D].Beijing:China Institute of Metrology,2006.崔建军.高精度温度控制及PTF测量的研究[D].北京:中国计量科学研究院,2006.
[11]Lu Q,Shi L,Mao Q H.Research advances in dualcomb spectroscopy[J].Chinese Journal of Lasers,2018,45(4):0400001.路桥,时雷,毛庆和.双光梳光谱技术研究进展[J].中国激光,2018,45(4):0400001.
[12]Owens J C.Optical refractive index of air:Dependence on pressure,temperature and composition[J].Applied Optics,1967,6(1):51-59.
[13]Jones F E.Simplified equation for calculating the refractivity of air[J].Applied Optics,1980,19(24):4129-4130.
[14]Birch K P,Downs M J.An updated Edlén equation for the refractive index of air[J].Metrologia,1993,30(3):155-162.
[15]Birch K P,Downs M J.Correction to the updated Edlén equation for the refractive index of air[J].Metrologia,1994,31(4):315-316.
[16]Matsumoto H,Zhu Y C,Iwasaki S,et al.Measurement of the changes in air refractive index and distance by means of a two-color interferometer[J].Applied Optics,1992,31(22):4522-4526.
[17]Matsumoto H,Honda T.High-accuracy lengthmeasuring interferometer using the two-colour method of compensating for the refractive index of air[J].Measurement Science and Technology,1992,3(11):1084-1086.
[18]Meiners-Hagen K,Abou-Zeid A.Refractive index determination in length measurement by two-colour interferometry[J].Measurement Science and Technology,2008,19(8):084004.
[19]Vacharanukul K,Sudatham W,Tonmueanwai A.Real-time air refractive index compensation of laser interferometer system for step gauge calibration with CMM technique[C].2011International Quantum Electronics Conference(IQEC)and Conference on Lasers and Electro-Optics(CLEO)Pacific Rim Incorporating the Australian Conference on Optics,2011:1978-1980.
[20]Chen Q H,Yan J Q,Liu Z Y,et al.An air refractometer with dual vacuum chambers based on method of equivalent synthetic wave[J].Acta Metrologica Sinica,2004,25(3):203-206.陈强华,闫聚群,柳忠尧,等.基于等效合成波方法的双真空管空气折射率测量仪[J].计量学报,2004,25(3):203-206.
[21]Chen H F,Ding X M,Zhong Z,et al.Effect of nonlinearity by the rotation of the polarizer in laser heterodyne interferometric[J].Chinese Journal of Lasers,2005,32(9):1281-1285.陈洪芳,丁雪梅,钟志,等.激光外差干涉检偏器旋转误差对非线性误差的影响[J].中国激光,2005,32(9):1281-1285.
[22]Chen H F,Sun Y Q,Wang Y W,et al.Highprecision laser tracking measurement method and experimental study[J].Chinese Journal of Lasers,2018,45(1):0104003.陈洪芳,孙衍强,王亚韦,等.高精度激光追踪测量方法及实验研究[J].中国激光,2018,45(1):0104003.
[23]Liao Y B.Polarization optics[M].Beijing:Science Press,2003:57.廖延彪.偏振光学[M].北京:科学出版社,2003:57.
[24]Deng Y L,Li X J,Geng Y F,et al.Influence of nonpolarizing beam splitters on nonlinear error in heterodyne interferometers[J].Acta Optica Sinica,2012,32(11):1112008.邓元龙,李学金,耿优福,等.非偏振分光镜对外差干涉仪非线性误差的影响[J].光学学报,2012,32(11):1112008.
[25]Zhang S,Huang D X,Yin D L,et al.Design of a novel polarization beam splitting prism and its applications[J].Opto-Electronic Engineering,2003,30(1):46-49.张晟,黄德修,殷东亮,等.一种新型偏振分光棱镜的设计和应用[J].光电工程,2003,30(1):46-49.
[26]Liu Z J,Cui L S,Xie D L.Theory analysis and measurement for interference fringes of laser Doppler velocimeter[J].Chinese Journal of Lasers,2017,44(8):0804001.刘子君,崔骊水,谢代梁.激光多普勒流速仪的干涉条纹理论分析及测量[J].中国激光,2017,44(8):0804001.
[27]ZEMAX Development Corporation.ZEMAX optical design program user′s guide[EB/OL].(2005-02-03)[2018-08-15].http:∥www.zemax.com.
[28]Chen H F,Tang L,Sun Y Q,et al.Zemax simulation based energy analysis of optical system for laser tracking measurement[J].Chinese Journal of Lasers,2018,45(7):0704009.陈洪芳,汤亮,孙衍强,等.基于Zemax仿真的激光追踪测量光学系统能量分析[J].中国激光,2018,45(7):0704009.