基于金属介质交替膜超材料窄带滤色片的性能优化
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摘要
超材料窄带滤色片由于结构紧凑、体积小、制备工艺简单和成本较低等优点,其常被用于光电探测和成像系统等领域。利用银和二氧化硅交替膜制备的周期性超材料狭缝阵列,实现了在可见光范围中心波长可调的窄带过滤颜色性能。研究了狭缝宽度、狭缝周期、金属银膜厚度与介质层厚度之间的比值和超材料厚度对该滤色片透射性能的调控规律,得到了具有较高透射效率且中心波长可调的窄带滤色片。最终实现半峰全宽17～30 nm、透射率约50%、在可见光500～760 nm波段实现中心波长可调且色纯度较好的滤色片。该结果为新型窄带滤色片的设计提供了崭新的思路。
Metamaterial narrowband color filters are often used in photoelectric detection and imaging systems because of the compact structure,small size,simple preparation process,low cost and so on.The periodic metamaterial slit array is made of alternating silver and silicon dioxide films,which achieves narrowband color filtering performance with adjustable central wavelength in the visible range.The regulation and control rules of the slit width,slit period,thickness ratio between the silver film and dielectric layer,and thickness of the metamaterial on the transmission performance of the color filter were studied.The narrowband color filter with high transmittance and adjustable center wavelength was obtained.Finally,the color filter with adjustable center wavelength and better color purity was realized in the visible light 500-760 nm band.The full width at half maximum and transmittance of the color filter are 17-30 nm and about 50%,respectively.The result provides a new idea for the design of new narrowband color filters.
Metamaterial narrowband color filters are often used in photoelectric detection and imaging systems because of the compact structure,small size,simple preparation process,low cost and so on.The periodic metamaterial slit array is made of alternating silver and silicon dioxide films,which achieves narrowband color filtering performance with adjustable central wavelength in the visible range.The regulation and control rules of the slit width,slit period,thickness ratio between the silver film and dielectric layer,and thickness of the metamaterial on the transmission performance of the color filter were studied.The narrowband color filter with high transmittance and adjustable center wavelength was obtained.Finally,the color filter with adjustable center wavelength and better color purity was realized in the visible light 500-760 nm band.The full width at half maximum and transmittance of the color filter are 17-30 nm and about 50%,respectively.The result provides a new idea for the design of new narrowband color filters.
引文
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[2]ESFANDYARPOUR M,GARNETT E C,CUI Y,et al.Metamaterial mirrors in optoelectronic devices[J].Nature Nanotechnology,2014,9(7):542-547.
[3]MULLER R,SANTOS M T,ARIZMENDI L,et al.A narrow-band interference filter with photorefractive LiNbO3[J].Journal of Physics:D,1999,27(2):241-246.
[4]GUO Y,NEWMAN W,CORTES C L,et al.Applications of hyperbolic metamaterial substrates[J].Advances in Opto Electronics,2012,2012:452502-1-452502-9.
[5]SHEKHAR P,ATKINSON J,JACOB Z.Hyperbolic metamaterials:fundamentals and applications[J].Nano Convergence,2014,1(1):14-1-14-17.
[6]CARRANZA I E,GRANT J,GOUGH J,et al.Metamaterial-based terahertz imaging[J].IEEE Transactions on Terahertz Science and Technology,2015,5(6):892-901.
[7]MACLEOD H A.Thin-film optical filters[M].3rd Edition.Florida:CRC Press,2001.
[8]MAGNUSSON R,WANG S S.New principle for optical filters[J].Applied Physics Letters,1992,61(9):1022-1024.
[9]SUN J,BHUSHAN B,TONG J.Structural coloration in nature[J].RSC Advances,2013,3(35):14862-14889.
[10]王嘉星,范庆斌,张辉,等.表面等离激元结构色研究进展[J].光电工程,2017,44(1):23-33.
[11]FANG C,DAI B,XU Q,et al.Optofluidic tunable linear narrow-band filter based on bragg nanocavity[J].IEEEPhotonics Journal,2017,9(2):1-8.
[12]WARZANSKYJ W,HEISMANN F,ALFERNESS R C.Polarization-independent electro-optically tunable narrow-band wavelength filter[J].Applied Physics Letters,1988,53(1):1 3-15.
[13]YE M,HU X L,SUN L B,et al.Duty cycle dependency of the optical transmission spectrum in an ultrathin nanostructured Ag film[J].Journal of Alloys and Compounds,2015,621:244-249.
[14]KAPLAN A F,XU T,JAY G L.High efficiency resonancebased spectrum filters with tunable transmission bandwidth fabricated using nanoimprint lithography[J].Applied Physics Letters,2011,99(14):143111-1-143111-3.
[15]YOON Y T,LEE S S.Transmission type color filter incorporating a silver film based etalon[J].Optics Express,2010,18(5):5344-5349.
[16]XU T,LEZEC H J.Visible-frequency asymmetric transmission devices incorporating a hyperbolic metamaterial[J].Nature Communications,2014,5:4141-1-4141-7.
[17]赵思聪.人工超材料光传输特性的研究[D].成都:电子科技大学,2013.
[18]XU Y W,XU J C.Design and experimentally measure a high performance metamaterial filter[J].Infrared Physics&Technology,2018,89:398-402.
[19]PORTO J A,GARCA-VIDAL F J,PENDRY J B.Transmission resonances on metallic gratings with very narrow slits[J].Physical Review Letters,1999,83(14):2845-2848.
[20]HONMA H,ISHIDA M,TAKAHASHI K,et al.Freestanding aluminium nanowire arrays for high-transmission plasmonic colour filters[J].Micro&Nano Letters,2014,9(12):891-895.
[21]SHRESTHA V R,LEE S S,KIM E S,et al.Polarizationtuned dynamic color filters incorporating a dielectric-loaded aluminum nanowire array[J].Scientific Reports,2015,5(1):45-55.
[22]NIE J,ZHANG W,LUO L,et al.Extraordinary optical transmission properties of multilayer metallic slit arrays[J].Scientia Sinica Physica,Mechanica&Astronomica,2015,45(2):024202-1-024202-7.
[23]李辉,冀婷,崔艳霞,等.基于一维周期性金属-介质薄膜多波段高效吸收体的制备及其光学特性研究[J].红外与激光工程,2019,48(2):0203004-1-0203004-6.
[24]FISCHER P B,CHOU S Y.10 nm electron beam lithography scanning electron microscope[J].Applied Physics Letters,1993,62(23):2989-2991.
[25]李群庆,张立辉,陈墨,等.纳米级电子束光刻技术及ICP深刻蚀工艺技术的研究[J].中国科学:E辑,2009(6):1047-1053.
[26]YANG I Y,ANTONIADIS D A,SMITH H I.Fabrication of back-gated complementary metal-oxide semiconductor devices using mixed and matched optical and X-ray lithographies[J].Journal of Vacuum Science&Technology:B,1996,14(6):4024-4028.
[27]ROSS C A,SMITH H I,SAVAS T,et al.Fabrication of patterned media for high density magnetic storage[J].Microelectronic Engineering,2000,53(1/2/3/4):3168-3176.
[28]FARHOUD M,FERRERA J,LOCHTEFELD A J,et al.Fabrication of 200 nm period nanomagnet arrays using interference lithography and a negative resist[J].Journal of Vacuum Science&Technology:B,1999,17(6):3182-3185.
[29]夏丁福.激光干涉光刻制备纳米尺度光栅[D].南京:南京大学,2012.
[30]CHEN C,WANG F,SHENG Y,et al.Enhancement transmittance of a metamaterial filter based on local surface plasma resonance[J].MRS Communications,2018,8(1):194-198.
[31]LU D,KAN J J,FULLERTON E E,et al.Enhancing spontaneous emission rates of molecules using nanopatterned multilayer hyperbolic metamaterials[J].Nature Nanotechnology,2014,9(1):48-53.
[32]FREY L,PARREIN P,RABY J,et al.Color filters including infrared cut-off integrated on CMOS image sensor[J].Optics Express,2011,19(14):13073-13080.
[33]KRISTENSEN A,YANG J K W,BOZHEVOLNYI S I,et al.Plasmonic colour generation[J].Nature Reviews Materials,2016,2(1):16088-1-16088-14.
[34]GENET C,EBBESEN T W.Light in tiny holes[J].Nature,2007,445(7123):39-46.
[35]ORBONS S M,ROBERTS A.Resonance and extraordinary transmission in annular aperture arrays[J].Optics Express,2006,14(26):12623-12628.
[36]KOERKAMP K,ENOCH S,SEGERINK F,et al.Strong influence of hole shape on extraordinary transmission through periodic arrays of subwavelength holes[J].Physical Review Letters,2004,92(18):183901-1-183901-4.