十字形压电振子同型模态振动驱动的平面电机
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摘要
提出十字形压电振子同型模态驱动的压电平面电机新原理,选定该振子的面外弯振、面内横杆弯振、面内纵杆弯振为工作模态,利用面外弯振分别与面内纵杆弯振、面内横杆弯振的振动耦合,在纵、横杆驱动足上生成沿x Oz、y Oz面行进的椭圆轨迹以推动动子沿x、y向移动。阐明电机驱动原理,优化出振子尺寸为60 mm×60 mm×7.8mm,厘定电机最适驱动频率为30 127 Hz。建立振子机电耦合模型,研究驱动足的振动特性,模拟出驱动足的椭圆轨迹,仿真得到在250 V电压激励时驱动足的x、y、z向振幅分别为1.6μm、1.6μm和1.2μm。建立电机的整机分析模型,探析驱动电压、频率、相位差、预紧力对电机速度的影响。在正常驱动条件下,电机速度可达50 mm/s。该电机在平面装置驱动中的应用前景广泛。
A planar motor driven by an X-shaped piezoelectric vibrator is presented. The out-of-plane bending vibration mode and two in-plane bending vibration modes of the vibrator are selected as working modes. Using the vibration coupling of out-of-plane bending mode and the in-plane longitudinal bending and the vibration coupling of out-of-plane bending mode and the in-plane transverse bending, the elliptical trajectories of the driving feet in the x Oz and yOz surfaces are obtained respectively, which push the slider moving in the x-and y-directions. Resonant drive mechanism of the motor is clarified, and the size of the vibrator is determined to be 60 mm × 60 mm × 7.8 mm based on the optimization of the working modes frequency consistency. The optimal motor drive frequency is 30 127 Hz. A finite element model for electromechanical coupling analysis of the vibrator is established. The vibration response of the driving feet is studied. And the elliptical trajectories of the driving feet are simulated. It is found that under the 250 V applied voltage, the vibration amplitudes of the driving feet in the x-, y-and z-directions are 1.6 μm, 1.6 μm and 1.2 μm respectively. The influence of the amplitude,frequency, phase difference and preload on the motor's speed is explored. The results show that the motor speed can reach50 mm/s when the driving voltage is 250 V and the preload is 100 N, and the motor amplitude modulation and commutation ability is very good. This motor has a wide application prospect in plane motion drive.
A planar motor driven by an X-shaped piezoelectric vibrator is presented. The out-of-plane bending vibration mode and two in-plane bending vibration modes of the vibrator are selected as working modes. Using the vibration coupling of out-of-plane bending mode and the in-plane longitudinal bending and the vibration coupling of out-of-plane bending mode and the in-plane transverse bending, the elliptical trajectories of the driving feet in the x Oz and yOz surfaces are obtained respectively, which push the slider moving in the x-and y-directions. Resonant drive mechanism of the motor is clarified, and the size of the vibrator is determined to be 60 mm × 60 mm × 7.8 mm based on the optimization of the working modes frequency consistency. The optimal motor drive frequency is 30 127 Hz. A finite element model for electromechanical coupling analysis of the vibrator is established. The vibration response of the driving feet is studied. And the elliptical trajectories of the driving feet are simulated. It is found that under the 250 V applied voltage, the vibration amplitudes of the driving feet in the x-, y-and z-directions are 1.6 μm, 1.6 μm and 1.2 μm respectively. The influence of the amplitude,frequency, phase difference and preload on the motor's speed is explored. The results show that the motor speed can reach50 mm/s when the driving voltage is 250 V and the preload is 100 N, and the motor amplitude modulation and commutation ability is very good. This motor has a wide application prospect in plane motion drive.
引文
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[9]王京山,赵学涛.平面超声波电动机的研究[J].微特电机,2013,41(7):8-9.
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[11]贺红林,廖永林,凌普.双兰杰文振子纵弯复合模态驱动的压电平面电机[J].电机与控制学报,2016,20(12):42-50.
[2]ZHAO CHUNSHENG.Ultrasonic motors technologies and applications[M].Springer Berlin Heidelberg,2011.
[3]M KUROSAWA,O KODAIRA.Transducer for high speed and large thrust ultrasonic linear motor using two sandwich-type vibrators[J].IEEE Trans.Ultra.Ferro.Freq.Cntl.,1998,45(5):1186-1195.
[4]DEMBELE S,ROCHDI K.A 3-DOF linear ultrasonic motor for transport and micropositioning[J].Sensors and Actuators A:Physical,2006,25(2):486-493.
[5]V D VIJVER,W V BRUSSE,H REYNAERTS.A MultiDOF Positioning stage based on novel piezoelectric resonant drive modules[J].In Proceedings-IEEEUltrasonics Symposium,2006(1):164-167.
[6]SCUOR N,GALLINA P.Design and testing of a 5-DOF,large working range micropositioning stage[J].Robotics and Autonomous Systems,2012,60(4):620-627.
[7]LI ZHIRONG,LIU JUNBIAO,HUANG WEIQING,et al.New type of linear ultrasonic motor with two degrees of freedom using longitudinal and bending mode[J].Trans.Nanjing University of Aeronautics&Astronantics,2005,21(1):7-11.
[8]刘俊标,黄卫清,赵淳生.一种新型的二自由度直线型超声电机[J].压电与声光,2001,(5):346-348.
[9]王京山,赵学涛.平面超声波电动机的研究[J].微特电机,2013,41(7):8-9.
[10]YAN L,HU Y Y.A novel two degree-of-freedom ultrasonic planar motor driven by single stator[J].2012IEEE Int.Conf.Industrial Informatics,2012:550-553.
[11]贺红林,廖永林,凌普.双兰杰文振子纵弯复合模态驱动的压电平面电机[J].电机与控制学报,2016,20(12):42-50.