微波功分网络集成工艺技术
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摘要
本文主要阐述了微波功分网络集成工艺的关键技术和途径,包括层间电气互联、盲槽结构实现,以及内埋平面集成电阻等。设计制作了工作频段在6~18GHz的四层典型功分网络样件,该功分网络幅度一致性1dB,相位一致性15°,同套网络各端口间隔离≥20dB。采用该工艺制作的功分网络可以在有限尺寸内实现通道的相位和幅度控制以及不同组件间的幅相一致性补偿,这是采用传统的混合集成工艺完全无法实现的。
This paper mainly discussed the key techniques and processes of microwave integrated power division network, which involve electric connection of layers, blind cave, and embedding planar integrated resistors. Typical four layer power division network working on 6~18GHz is designed and produced. The consistency of amplitude and phase is 1dB and 15° separately, isolation between each port on the same network is ≥20dB. The power division network manufactured with such technics could achieve channel's phase and amplitude controlling, and the amplitude and phase consistency compensation between different modules in limited dimension. This cannot be realized by traditional mixed integrated technics.
This paper mainly discussed the key techniques and processes of microwave integrated power division network, which involve electric connection of layers, blind cave, and embedding planar integrated resistors. Typical four layer power division network working on 6~18GHz is designed and produced. The consistency of amplitude and phase is 1dB and 15° separately, isolation between each port on the same network is ≥20dB. The power division network manufactured with such technics could achieve channel's phase and amplitude controlling, and the amplitude and phase consistency compensation between different modules in limited dimension. This cannot be realized by traditional mixed integrated technics.
引文
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[3]杨维生.聚四氟乙烯平面埋电阻台阶式多层板制造技术研究[J].印制电路信息2007,(6):41-46.
[4]彭高森,汪邦金.一种功分网络与均衡网络的一体化实践研究[J].现代电子技术,2007,247(8):109-111.
[2]陈文录,李海.平面电阻技术在高速信号传输中的应用[J].计算机工程与科学,2001,23(2):94-100.
[3]杨维生.聚四氟乙烯平面埋电阻台阶式多层板制造技术研究[J].印制电路信息2007,(6):41-46.
[4]彭高森,汪邦金.一种功分网络与均衡网络的一体化实践研究[J].现代电子技术,2007,247(8):109-111.