动态特性可调的微动平台优化设计
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摘要
针对目前柔性铰链主要靠局部变形来工作,其存在应力集中,且微动平台的动态特性受材料特性、设计制造等误差影响,难以满足变工况条件下的高精密位移输出。基于应力刚化原理,采用对称布置的带倒角的弹片式柔性铰链,设计张紧力调节机构,实现微动平台的动态特性可调。采用COMSOL Multiphysics和MATLAB联合仿真对张紧力调节机构进行参数优化,让调节机构保持线性调节关系,使柔性铰链的应力分布最小化。结果表明,所设计的微动平台能够进行高度线性固有频率调节,与有限元分析结果相比,频率调节范围相差2.55%,在理论设计范围内。
Since the flexure hinge mainly works by the local deformation,and the stress concentration exists,and the dynamic characteristics of the micro-motion stage are influenced by material properties,designing and manufacturing errors,it is difficult to meet the high precision displacement output under variable working conditions.Based on the principle of stress stiffening,a tension adjusting mechanism is designed by using symmetrically arranged elastic flake flexible hinge with chamfering angle to realize the adjustable dynamic characteristics.The co-simulation of COMSOL Multiphysics and MATLAB is used to optimize the parameters of the tension adjustment mechanism so that the adjustment mechanism can maintain the linear adjustment relationship and minimize the stress distribution of the flexible hinge.The results show that the designed micro-motion stage can perform highly linear natural frequency adjustment.Compared with the finite element analysis results,the range of frequency adjustment is different by2.55%,which is within the theoretical design range.
Since the flexure hinge mainly works by the local deformation,and the stress concentration exists,and the dynamic characteristics of the micro-motion stage are influenced by material properties,designing and manufacturing errors,it is difficult to meet the high precision displacement output under variable working conditions.Based on the principle of stress stiffening,a tension adjusting mechanism is designed by using symmetrically arranged elastic flake flexible hinge with chamfering angle to realize the adjustable dynamic characteristics.The co-simulation of COMSOL Multiphysics and MATLAB is used to optimize the parameters of the tension adjustment mechanism so that the adjustment mechanism can maintain the linear adjustment relationship and minimize the stress distribution of the flexible hinge.The results show that the designed micro-motion stage can perform highly linear natural frequency adjustment.Compared with the finite element analysis results,the range of frequency adjustment is different by2.55%,which is within the theoretical design range.
引文
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[2]于靖军,裴旭,毕树生,等.柔性铰链机构设计方法的研究进展[J].机械工程学报,2010,46(13):2-13.YU Jingjun,PEI Xu,BI Shusheng,et al.State-of-arts ofdesign method for flexure mechanisms[J].Journal of Mechanical Engineering,2010,46(13):2-13.
[3]WEN Chunming,CHENG Mingyang.Development of a recurrent fuzzy CMAC with adjustable input space quantization and self-tuning learning rate for control of a dual-axis piezoelectric actuated micro motion stage[J].IEEE Transactions on Industrial Electronics,2013,60(11):5105-5115.
[4]赵新龙,谭永红,董建萍.基于扩展输入空间法的压电执行器迟滞特性动态建模[J].机械工程学报,2010,46(20):169-174.ZHAO Xinlong,TAN Yonghong,DONG Jianping.Dynamic modeling of rate-dependent hysteresis in piezoelectric actuators based on expanded input space method[J].Journal of Mechanical Engineering,2010,46(20):169-174.
[5]QIN Y,TIAN Y,ZHANG D,et al.A novel direct inverse modeling approach for hysteresis compensation of piezoelectric actuator in feedforward applications[J].Transactions on Mechatronics,2013,18(3):981-989.
[6]RAKOTONDRABE M.Bouc-wen modeling and inverse multiplicative structure to compensate hysteresis nonlinearity in piezoelectric actuators[J].Transactions on Automation Science and Engineering,2011,8(2):428-431.
[7]XU Q.Design and development of a compact flexurebased XYprecision positioning system with centimeter range[J].IEEE Transactions on Industrial Electronics,2014,61(2):893-903.
[8]杨志军,白有盾,陈新,等.预应力梁等效刚度与固有频率的近似解析解[J].中国科学:物理学,力学,天文学,2015,45(7):98-104.YANG Zhijun,BAI Youdun,CHEN Xin,et al.Approximate analytical solution of equivalent stiffness and natural frequency for prestressed beams[J].Scientia Sinica Physica,Mechanica&Astronomica,2015,45(7):98-104.
[9]丁晓辉,董再励,刘柱,等.纳米级微动平台的结构力学特性及实验研究[J].机器人,2010,32(3):321-325.DING Xiaohui,DONG Zaili,LIU Zhu,et al.Structure mechanics characteristics and experiment of the micromotion stage with nanometer resolution[J].Robot,2010,32(3):321-325.
[10]SHI H,FAN S,XING W,et al.Design and FEM simulation study of the electro-thermal excitation resonant beam with slit-structure[J].Microsyst Technol,2013,19:979-987.
[11]杨志军,白有盾,陈新,等.基于应力刚化效应的动态特性可调微动平台设计新方法[J].机械工程学报,2015(23):153-159.YANG Zhijun,BAI Youdun,CHEN Xin,et al.A new design method of dynamic characteristics adjustable micro motion stage based on tension stiffening[J].Journal of Mechanical Engineering,2015(23):153-159.