基于螺旋扫描的表面三维形貌快速测量
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摘要
为实现精密表面三维形貌的快速测量,提出一种螺旋式扫描测量方法.首先,基于x、y、z向直线运动平台、DD马达旋转平台以及激光位移传感器,搭建三维形貌测量系统,其中被测试件表面形貌的平面位置信息通过x向平台与DD马达同步运动所形成的螺旋扫描运动来获得,被测试件表面形貌的高度信息由激光位移传感器来获得;然后,基于所搭建的测量系统,对表面形貌为凸凹扇形的圆形试件的表面进行测量.结果表明:测量直径为15 mm的圆形区域所用的时间为420 s,能较好地实现被测试件表面形貌的快速测量.
A spiral scanning measurement method is proposed in order to realize rapid measurement of the three-dimensional topography of the precision surface. First of all, a three-dimensional topography measurement system is setup based on x, y, z linear motion platform, DD motor rotation platform and laser displacement sensor. the plane position information of the specimen's surface morphology is obtained by the spiral scanning formed by x platform and DD motor synchronous motion, at the same time the height information of the specimen's surface morphology is obtained by laser displacement sensor. Then, based on the built threedimensional topography measurement system, a circular specimen with convex and concave fan shaped surface is measured. The results show that when the measured circular area of diameter is(37)15 mm, the total time is 420 s, so the spiral scanning measurement method can better realize rapid measurement of surface topography of the specimen.
A spiral scanning measurement method is proposed in order to realize rapid measurement of the three-dimensional topography of the precision surface. First of all, a three-dimensional topography measurement system is setup based on x, y, z linear motion platform, DD motor rotation platform and laser displacement sensor. the plane position information of the specimen's surface morphology is obtained by the spiral scanning formed by x platform and DD motor synchronous motion, at the same time the height information of the specimen's surface morphology is obtained by laser displacement sensor. Then, based on the built threedimensional topography measurement system, a circular specimen with convex and concave fan shaped surface is measured. The results show that when the measured circular area of diameter is(37)15 mm, the total time is 420 s, so the spiral scanning measurement method can better realize rapid measurement of surface topography of the specimen.
引文
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[14]Liu J,Chen W Y,Chen F.Three-dimensional wheel topography measurement with laser triangulation[J].Key Engineering Materials,2012,499:384-389.
[2]Sakaguchi A,Kawashita T,Matsuo S.Three dimensional analysis of a grinding wheel surface with image processing[J].Advanced Materials Research,2012,565:177-182.
[3]郭隐彪,杨炜,王振忠,等.大口径光学元件超精密加工技术与应用[J].机械工程学报,2013,49(19):171-178.
[4]Zhou L,Xia L,Chen P,et al.Three-dimensional measuring technique for surface topography using a light-sectioning microscope[J].Applied Optics,2012,51(8):1162-1170.
[5]Li Z,Brand U,Ahbe T.Step height measurement of microscale thermoplastic polymer specimens using contact stylus profilometry[J].Precision Engineering,2016,45:110-117.
[6]Leach R K,Giusca C L,Naoi K.Development and characterization of a new instrument for the traceable measurement of areal surface texture[J].Measurement Science&Technology,2009,20(12):314-317.
[7]涂龙,余锦,樊仲维,等.基于小孔阵列的并行激光共焦显微检测技术研究[J].光电子·激光,2013(10):1989-1994.
[8]Jabbour J M,Malik B H,Olsovsky C,et al.Optical axial scanning in confocal microscopy using an electrically tunable lens[J].Biomedical Optics Express,2014,5(2):645-652.
[9]陈力,王军华,徐敏.像散法离焦检测系统的分析与校准[J].激光与光电子学进展,2016(5):219-225.
[10]Zhao J,Liu W.Visualization measurements of the morphology parameters in a parallel confocal system based on astigmatism method[J].Optical Instruments,2012,34(5):5-10.
[11]崔长彩,余卿,张遨,等.金刚石砂轮表面形貌测量系统[J].光学精密工程,2014,22(12):3167-3174.
[12]Lei Z,Liu X,Chen L,et al.A novel surface recovery algorithm in white light interferometry[J].Measurement,2016,80:1-11.
[13]李兵,孙彬,陈磊,等.激光位移传感器在自由曲面测量中的应用[J].光学精密工程,2015,23(7):1939-1947.
[14]Liu J,Chen W Y,Chen F.Three-dimensional wheel topography measurement with laser triangulation[J].Key Engineering Materials,2012,499:384-389.