用于能量收集器的不锈钢基PZT厚膜制备研究
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摘要
采用了溶胶-凝胶技术在不锈钢基体上制备了厚为10μm、结构致密的锆钛酸铅(PZT)厚膜。研究了不同退火条件对厚膜结晶状况的影响,X射线衍射分析表明,采用700℃退火处理20min后得到了PZT厚膜的纯钙钛矿相结构。厚膜的电学性能测试结果显示,厚膜的剩余极化强度(Pr)为7.5μC/cm~2,矫顽场强(Ec)为7.2V/μm,压电常数(d_(33))为73pC/N。设计制作了长20mm、宽4mm的压电悬臂梁结构振动能量收集器。输出性能测试结果显示,振动频率为95Hz,采集器输出电压最高,输出电压值为862mV。
A dense PZT thick film with a thickness of 10μm was prepared on a stainless steel substrate using a Sol-Gel technique.The effects of annealing conditions on the crystallization of thick films were investigated.X ray diffraction analysis showed that the pure perovskite phase of the PZT thick films was obtained after annealing at700 ℃ with 20 min.The electrical properties of the films showed that the residual polarization(Pr)was 7.5μC/cm~2,the coercive field strength(Ec)was 7.2 V/μm,and the piezoelectric constant(d_(33))was 73 pC/N.A vibration energy harvester with piezoelectric cantilever structure of length of 20 mm and width of 4 mm was designed and manufactured.The output performance test results showed that the vibration frequency was 95 Hz,the collector output voltage was the highest,and the output voltage value was 862 mV.
A dense PZT thick film with a thickness of 10μm was prepared on a stainless steel substrate using a Sol-Gel technique.The effects of annealing conditions on the crystallization of thick films were investigated.X ray diffraction analysis showed that the pure perovskite phase of the PZT thick films was obtained after annealing at700 ℃ with 20 min.The electrical properties of the films showed that the residual polarization(Pr)was 7.5μC/cm~2,the coercive field strength(Ec)was 7.2 V/μm,and the piezoelectric constant(d_(33))was 73 pC/N.A vibration energy harvester with piezoelectric cantilever structure of length of 20 mm and width of 4 mm was designed and manufactured.The output performance test results showed that the vibration frequency was 95 Hz,the collector output voltage was the highest,and the output voltage value was 862 mV.
引文
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[10]张淼,孟庆丰,王宏金.悬臂梁式压电振动能量收集器的疲劳分析[J].压电与声光,2014,36(5):757-760.ZHANG Miao,MENG Qingfeng,WANG Hongjin.Fatigue analysis for cantilever piezoelectric vibration energy harvester[J].Piezoelectrics&Acoustooptics,2014,36(5):757-760.
[2]LOU-MOELLER R,HINDRICHSEN C C,THAMDRUP L H,et al.Screen-printed piezoceramic thick films for miniaturised devices[J].Journal of Electroceramics,2007,19(4):333-338.
[3]FAN K K,WANG Y P,YANG Y.Co-firing of PZTPMS-PZN/Ag multilayer actuator prepared by tapecasting method[J].Energy Harvesting and Systems,2015,2(3/4):113-117.
[4]ABELLARD A P,KUSCER D,LETHIECQ M,et al.Processing and electromechanical properties of lead zirconate titanate thick films by electrophoretic deposition[J].Advances in Applied Ceramics,2015,114(4):198-204.
[5]郑慈航,唐刚,刘景全,等.利用PZT块材制备微型压电悬臂梁采能器的研究[J].压电与声光,2011,33(3):418-421.ZHENG Cihang,TANG Gang,LIU Jingquan.Study on MEMS-based piezoelectric cantilever generator fabricated by bulk PZT[J].Piezoelectrics&Acoustooptics,2011,33(3):418-421.
[6]PARK J,BANG K,PARK C.Fabrication of piezoelectric PZT thick film by Sol-Gel process[J].Journal of Ocean Engineering and Technology,2015,29(1):94-99.
[7]鲁健,褚家如.高取向PZT铁电薄膜的溶胶-凝胶法制备[J].中国科学技术大学学报,2002,134(6):748-753.LU Jian,ZHU Jiaru.Preparation of strongly(100)-oriented Pb(Zr0.53,Ti0.47)O3(PZT)film by Sol-Gel method[J].Journal of University of Science and Technology of China,2002,134(6):748-753.
[8]毛剑波,易茂祥.PZT压电陶瓷极化工艺研究[J].压电与声光,2006,28(6):736-740.MAO Jianbo,YI Maoxiang.Research on the polarization technology of PZT piezoelectric ceramic[J].Piezoelectrics&Acoustooptics,2006,28(6):736-740.
[9]KIM S G,PRIYA S,ISAKU K.Peizoelectric MEMS for energy harvesting[J].Materials Research Society,2012,37(12):1039-1050.
[10]张淼,孟庆丰,王宏金.悬臂梁式压电振动能量收集器的疲劳分析[J].压电与声光,2014,36(5):757-760.ZHANG Miao,MENG Qingfeng,WANG Hongjin.Fatigue analysis for cantilever piezoelectric vibration energy harvester[J].Piezoelectrics&Acoustooptics,2014,36(5):757-760.