单根Cu纳米线的制备与原位电学性质
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  • 英文篇名:Preparation of Single Cu Nanowire and in-situ Study of Its Electrical Properties
  • 作者:徐国恒 ; 段敬来 ; 王文丹 ; 刘杰
  • 英文作者:XU Guoheng;DUAN Jinglai;WANG Wendan;LIU Jie;School of Physical Science and Technology, Key Laboratory of Advanced Technologies of Materials, Ministry of Education of China, Southwest Jiaotong University;Materials Research Center, Institute of Modern Physics, Chinese Academy of Sciences;
  • 关键词:单根Cu纳米线 ; 重离子径迹模板 ; 蚀刻 ; 电化学沉积 ; Ⅰ-Ⅴ曲线
  • 英文关键词:single Cu nanowire;;heavy ion-track template;;etching;;electrochemical deposition;;Ⅰ-Ⅴ curve
  • 中文刊名:HWDT
  • 英文刊名:Nuclear Physics Review
  • 机构:西南交通大学物理科学与技术学院材料先进技术教育部重点实验室;中国科学院近代物理研究所材料研究中心;
  • 出版日期:2019-03-20
  • 出版单位:原子核物理评论
  • 年:2019
  • 期:v.36;No.141
  • 基金:中国科学院前沿科学重点研究计划项目(QYZDB-SSW-SLH010);; 国家自然科学基金资助项目(11675233,51402245)~~
  • 语种:中文;
  • 页:HWDT201901010
  • 页数:5
  • CN:01
  • ISSN:62-1131/O4
  • 分类号:93-97
摘要
金属纳米线是未来纳米电子器件中的重要组成部分,因此研究单根金属纳米线的电学性质具有重要的意义。相对于单根纳米线电学性质的移位测量,原位测量精确度更高,结果更可靠。目前,国际上用于原位电学性质测量的单根纳米线的最小直径为80 nm,更小直径的纳米线很难在纳米孔道中生长,其电化学生长动力学过程还不清楚,电阻率数据缺失。本文在单个蚀刻离子径迹孔道中利用电化学沉积技术成功生长了单根Cu纳米线,其直径仅为64 nm,为目前同方法最细。在此基础上,首次测量了该纳米线的电输运性质并获得了其电阻率数值。研究结果表明,利用电导法可以监测模板中单个孔道的形成和扩孔的动力学过程以及最终的孔径大小。电化学沉积时,沉积电流与沉积时间曲线清晰地揭示了纳米线的沉积动力学过程。Ⅰ-Ⅴ曲线研究显示Cu纳米线具有典型的金属特性。其电阻率为3.46μ?·cm,约是Cu块体材料电阻率的两倍。电阻率增大可能与电子在晶界和表面处的散射有关。
        Metal nanowires, as one of the most crucial components of nanoelectronic devices in the future,have attracted enormous attention. Therefore, it is of great significance to investigate the electrical properties of single metal nanowires. Herein, the single Cu nanowire with diameter of 64 nm was successfully prepared by using single-ion track template method combined with electrochemical deposition approach, and its Ⅰ-Ⅴ curve was measured. Such a diameter represents the thinnest one as comparing the reported ones obtained by the same method. The results illustrated that the process of formation and growth, as well as the final diameter of single nanochannel in template can be monitored and measured by conductance method. During the electrochemical deposition, the dynamic evolution of the deposition of nanowire can be clearly reflected through the deposition current and deposition time. At the same time, Ⅰ-Ⅴ measurements reveal that the Cu nanowire has typical metallic characteristic. For the first time, the resistivity of such a thin nanowire is obtained and its resistivity is 3.46 μ?·cm which is around twice that of Cu bulk materials. The increase of resistivity is believed coming from finite size effects and may be related to the electrons scattering at the grain boundaries and surfaces.
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