采用三稳频激光源实现绝对长度测量
|
摘要
合成波长法利用多个波长构建数值足够大的合成波长,从而可实现绝对测量.然而实际应用中要找到波长值合适且波长稳定性足够高的多个波长难度很大.本文研究了一种长度绝对测量光路,采用三个高精度稳频波长构建合成波长链,建立合成波长链测量公式及其级间过渡条件,搭建相移干涉光路测量各单一波长的干涉级次小数值,最后实现绝对长度的高精度测量.对零膨胀微晶玻璃样品进行了长度测量实验,实验结果及误差分析表明长度测量不确定度约为3 nm.所提方法对样品的初测精度要求较低,而测量范围仅受干涉光路的长度限制.
To measure absolute length, the synthetic wavelength methods must construct a long enough synthetic wavelength made use of several single wavelengths, and make integer of the interference order be zero or a deterministic value. However, it is not easy to find corresponding wavelengths with appropriate values and high wavelength stability in practice. In this paper, a synthetic wavelength absolute measurement method was presented, adopting three high frequency stability lasers to form the synthetic wavelength chain. The measurement equations as well as the transition conditions between grades were derived. And a corresponding phase shift interference optical path was built to make high precision measurement for the absolute length value of the sample. The experiment and error analysis results show the measurement uncertainty is about 3 nm(at 0.3 m sample). In this method the requirement for initial measurement accuracy of the length is low and the measurement range is only limited by the length of the interferometric optical path.
To measure absolute length, the synthetic wavelength methods must construct a long enough synthetic wavelength made use of several single wavelengths, and make integer of the interference order be zero or a deterministic value. However, it is not easy to find corresponding wavelengths with appropriate values and high wavelength stability in practice. In this paper, a synthetic wavelength absolute measurement method was presented, adopting three high frequency stability lasers to form the synthetic wavelength chain. The measurement equations as well as the transition conditions between grades were derived. And a corresponding phase shift interference optical path was built to make high precision measurement for the absolute length value of the sample. The experiment and error analysis results show the measurement uncertainty is about 3 nm(at 0.3 m sample). In this method the requirement for initial measurement accuracy of the length is low and the measurement range is only limited by the length of the interferometric optical path.
引文
[1] Kenichi Hibino.Phase-shifting algorithm inside an optical cavity for absolute length measurement [J].Applied Optics,2016,55(5):1101-1106.
[2] Shupei Shiada,Makoto Shizuka,Neisei Hayashi,et al.Measurement of the optical path length difference in an interferometer using a sinusoidally frequency-modulated light source [J].Applied Optics,2016,55(11):2904-2908.
[3] 周森,郭永彩,高潮,等.基于三维激光扫描的移动大尺寸圆柱体工件长度快速检测系统[J].光学精密工程,2014,22(6):1524-1530.Zhou Sen,Guo Yongcai,Gao Chao,et al.Rapid length measuring system for mobile and large scale cylinder workpieces based on 3D laser scanning [J].Optics and Precision Engineering,2014,22(6):1524-1530.(in Chinese)
[4] 李楚瑞,王超,肖倩.基于全光纤干涉的新型光纤长度测量系统 [J].仪器仪表学报,2011,32(2):415-419.Li Churui,Wang Chao,Xiao Qian.Novel fiber length measurement system based on fiber interferometer [J].Chinese Journal of Scientific Instrument,2011,32(2):415-419.(in chinese)
[5] Liu Wei,Liu Zhengjun,Liu Shutian.Optical security validatin using Michelson interferometer [J].Applied Optics,2015,54(7):1802-1807.
[6] Fang Guangyu,Li Huang,Li Xin,et al.Geometric explanatin of conic-section interference fringes in a Michelson interferometer [J].American Journal of Physics,2013,81(9):670-675.
[7] 陈强华,徐东,张孟策,等.基于三稳频激光波长的相移干涉测量法修正空气折射率湿度参数 [J].北京理工大学学报,2017,37(11):1108-1113.Chen Qianghua,Xu Dong,Zhang Mengce,et al.Humidity correction of air refractive index based on a phase shift interferometry with three stabilized laser wavelengths [J].Transacitons of Beijing Institute of Technology,2017,37(11):1108-1113.(in Chinese)
[8] 康岩辉,张恒.圆锥量规锥度的高精度光学干涉法测量 [J].光学精密工程,2011,19(11):2551-2557.Kang Yanhui,Zhang Heng.High precison measurement of taper for taper gauge by optical interference method[J].Optics and Precision Engineering,2011,19(11):2551-2557.(in Chinese)
[9] Lee Joohyung,Han Seongheum,Lee Keunwoo,et al.Absolute distance measurement by dual-comb interferometry with adjustable synthetic wavelength [J].Measurement Science and Technology,2013,24(4):045201.
[10] 梁晶,龙兴武,张斌.一种新型多波长绝对距离干涉测量系统的研究[J].光学技术,2008,34(5):681-686.Liang Jing,Long Xingwu,Zhang Bin.Study on a new kind of multi-wavelength absolute distance interferometer [J].Optical Technique,2008,34(5):681-686.(in Chinese)
[11] 华卿,周维虎,许艳.飞秒激光频率梳绝对测距技术综述 [J].计测技术,2012,32(1):1-5.Hua Qing,Zhou Weihu,Xu Yan.Review of absolute distance measurement with femtosecond optical frequency comb [J].Metrology & Measurement Technology,2012,32(1):1-5.(in Chinese)
[12] Wu Hanzhong,Zhang Fumin,Liu Tingyang,et al.Absolute distance measurement by chirped pulse interferometry using a femtosecond pulse laser [J].Optics Express,2015,23(24):251753.
[13] Xu Yan,Zhou Weihu,Liu Deming,et al.Absolute distance measurement by spectrally resolved interferometry based on a femtosecond pulse laser [J].Optical Engineering,2012,51(8):081509.
[14] Kaoru Minoshima,Hirokazu Matsuoto.High-accuracy measurement of 240m distance in an optical tunnel by use of a compact femtosecond laser [J].Applied Optics,2000,39(30):5512-5517.
[15] Khaled Alzahrani,David Burton,Francis Lilley,et al.Absolute distance measurement with micrometer accuracy using a Michelson interferometer and the iterative synthetic wavelength principle [J].Optics Express,2012,20(5):5658-5682.
[16] Chen Junbao,Zhu Hongbin,Xia Wei,et al.Synthetic-wavelength self-mixing interferometry for displacement measurement [J].Optics Communications,2016,368:73-80.
[17] Chen Qianghua,Luo Huifu,Wang Sumei,et al.Measurement of air refractive index fluctuation based on interferometry with two different reference cavity lengths[J].Applied Optics,2012,51(25):6106-6110.
[18] Yan Liping,Chen Benyong,Zhang Enzheng,et al.Precision measurement of refractive index of air based on laser synthetic wavelength interferometry with Edlen equation estimation[J].Review of Scientific Instruments,2015,86(8):085111.
[19] Wu Guanhao,Takahashi Mayumi,Inaba Hajime,et al.Pulse-to-pulse alignment technique based on synthetic-wavelength interferometry of optical frequency combs for distance measurement [J].Optics Letters,2013,38(12):2410-2413.
[20] Chen Qianghua,Liu Jinghai,He Yongxi,et al.Humidity coefficient correction in the calculation equations of air refractive index by He-Ne laser based on phase step interferometry [J].Applied Optics,2015,54(5):1109-1113.
[2] Shupei Shiada,Makoto Shizuka,Neisei Hayashi,et al.Measurement of the optical path length difference in an interferometer using a sinusoidally frequency-modulated light source [J].Applied Optics,2016,55(11):2904-2908.
[3] 周森,郭永彩,高潮,等.基于三维激光扫描的移动大尺寸圆柱体工件长度快速检测系统[J].光学精密工程,2014,22(6):1524-1530.Zhou Sen,Guo Yongcai,Gao Chao,et al.Rapid length measuring system for mobile and large scale cylinder workpieces based on 3D laser scanning [J].Optics and Precision Engineering,2014,22(6):1524-1530.(in Chinese)
[4] 李楚瑞,王超,肖倩.基于全光纤干涉的新型光纤长度测量系统 [J].仪器仪表学报,2011,32(2):415-419.Li Churui,Wang Chao,Xiao Qian.Novel fiber length measurement system based on fiber interferometer [J].Chinese Journal of Scientific Instrument,2011,32(2):415-419.(in chinese)
[5] Liu Wei,Liu Zhengjun,Liu Shutian.Optical security validatin using Michelson interferometer [J].Applied Optics,2015,54(7):1802-1807.
[6] Fang Guangyu,Li Huang,Li Xin,et al.Geometric explanatin of conic-section interference fringes in a Michelson interferometer [J].American Journal of Physics,2013,81(9):670-675.
[7] 陈强华,徐东,张孟策,等.基于三稳频激光波长的相移干涉测量法修正空气折射率湿度参数 [J].北京理工大学学报,2017,37(11):1108-1113.Chen Qianghua,Xu Dong,Zhang Mengce,et al.Humidity correction of air refractive index based on a phase shift interferometry with three stabilized laser wavelengths [J].Transacitons of Beijing Institute of Technology,2017,37(11):1108-1113.(in Chinese)
[8] 康岩辉,张恒.圆锥量规锥度的高精度光学干涉法测量 [J].光学精密工程,2011,19(11):2551-2557.Kang Yanhui,Zhang Heng.High precison measurement of taper for taper gauge by optical interference method[J].Optics and Precision Engineering,2011,19(11):2551-2557.(in Chinese)
[9] Lee Joohyung,Han Seongheum,Lee Keunwoo,et al.Absolute distance measurement by dual-comb interferometry with adjustable synthetic wavelength [J].Measurement Science and Technology,2013,24(4):045201.
[10] 梁晶,龙兴武,张斌.一种新型多波长绝对距离干涉测量系统的研究[J].光学技术,2008,34(5):681-686.Liang Jing,Long Xingwu,Zhang Bin.Study on a new kind of multi-wavelength absolute distance interferometer [J].Optical Technique,2008,34(5):681-686.(in Chinese)
[11] 华卿,周维虎,许艳.飞秒激光频率梳绝对测距技术综述 [J].计测技术,2012,32(1):1-5.Hua Qing,Zhou Weihu,Xu Yan.Review of absolute distance measurement with femtosecond optical frequency comb [J].Metrology & Measurement Technology,2012,32(1):1-5.(in Chinese)
[12] Wu Hanzhong,Zhang Fumin,Liu Tingyang,et al.Absolute distance measurement by chirped pulse interferometry using a femtosecond pulse laser [J].Optics Express,2015,23(24):251753.
[13] Xu Yan,Zhou Weihu,Liu Deming,et al.Absolute distance measurement by spectrally resolved interferometry based on a femtosecond pulse laser [J].Optical Engineering,2012,51(8):081509.
[14] Kaoru Minoshima,Hirokazu Matsuoto.High-accuracy measurement of 240m distance in an optical tunnel by use of a compact femtosecond laser [J].Applied Optics,2000,39(30):5512-5517.
[15] Khaled Alzahrani,David Burton,Francis Lilley,et al.Absolute distance measurement with micrometer accuracy using a Michelson interferometer and the iterative synthetic wavelength principle [J].Optics Express,2012,20(5):5658-5682.
[16] Chen Junbao,Zhu Hongbin,Xia Wei,et al.Synthetic-wavelength self-mixing interferometry for displacement measurement [J].Optics Communications,2016,368:73-80.
[17] Chen Qianghua,Luo Huifu,Wang Sumei,et al.Measurement of air refractive index fluctuation based on interferometry with two different reference cavity lengths[J].Applied Optics,2012,51(25):6106-6110.
[18] Yan Liping,Chen Benyong,Zhang Enzheng,et al.Precision measurement of refractive index of air based on laser synthetic wavelength interferometry with Edlen equation estimation[J].Review of Scientific Instruments,2015,86(8):085111.
[19] Wu Guanhao,Takahashi Mayumi,Inaba Hajime,et al.Pulse-to-pulse alignment technique based on synthetic-wavelength interferometry of optical frequency combs for distance measurement [J].Optics Letters,2013,38(12):2410-2413.
[20] Chen Qianghua,Liu Jinghai,He Yongxi,et al.Humidity coefficient correction in the calculation equations of air refractive index by He-Ne laser based on phase step interferometry [J].Applied Optics,2015,54(5):1109-1113.