基于COMSOL的皮秒激光单脉冲烧蚀铜片
|
摘要
利用COMSOL仿真软件建立了铜片双温模型,通过控制变量,数值研究了光斑半径和激光能量对电子与晶格温度的影响,并预测了烧蚀形貌。结果表明,单脉冲激光光斑半径越大,铜片的烧蚀深度越小,烧蚀面积越大;激光能量越高,铜片的烧蚀深度越大,烧蚀面积越大。实验结果进一步证实了仿真的可靠性。
A two-temperature model of copper is established based on the COMSOL simulation software.The effects of spot radius and laser energy on the temperatures of electron and lattice are numerically investigated via the control of variables,and thus the ablation morphology is predicted.The results show that the larger the spot radius of the single-shot laser,the smaller the ablation depth and the larger the ablation area.In contrast,the higher the laser energy,the larger the ablation depth and the larger the ablation area.The reliability of the simulation is verified by the experimental results.
A two-temperature model of copper is established based on the COMSOL simulation software.The effects of spot radius and laser energy on the temperatures of electron and lattice are numerically investigated via the control of variables,and thus the ablation morphology is predicted.The results show that the larger the spot radius of the single-shot laser,the smaller the ablation depth and the larger the ablation area.In contrast,the higher the laser energy,the larger the ablation depth and the larger the ablation area.The reliability of the simulation is verified by the experimental results.
引文
[1] Liu D,Wu Y G,Hu Y T,et al.Fabrication of super-hydrophobic aluminum surface by picosecond laser[J].Laser&Optoelectronics Progress,2016,53(10):101408.刘顿,伍义刚,胡勇涛,等.皮秒激光制备铝基超疏水表面[J].激光与光电子学进展,2016,53(10):101408.
[2] Liu L,Ruan L,Zhang T R,et al.Experimental study on stainless steel micro-hole drilling with picosecond laser[J].Applied Laser,2015,35(4):472-478.刘路,阮亮,张天润,等.皮秒激光加工不锈钢微孔实验研究[J].应用激光,2015,35(4):472-478.
[3] Wang Z, Zhao Q Z. Research progress of manipulating tribological property of materials by ultrashort-pulse-induced surface micro-nano texture[J].Laser&Optoelectronics Progress,2016,53(11):110003.王卓,赵全忠.超短脉冲激光诱导微纳织构调控材料摩擦性能的研究进展[J].激光与光电子学进展,2016,53(11):110003.
[4] Li C, Cheng G H, Stoian R.Investigation of femtosecond laser-induced periodic surface structure on tungsten[J].Acta Optica Sinica,2016,36(5):0532001.李晨,程光华,Stoian R.飞秒激光诱导金属钨表面周期性自组织结构的研究[J].光学学报,2016,36(5):0532001.
[5] Mao S S,QuéréF,Guizard S,et al.Dynamics of femtosecond laser interactions with dielectrics[J].Applied Physics A,2004,79(7):1695-1709.
[6] Anisimov S I,Kapeliovich B L,Perelman T L,et al.Electron emission from metal surfaces exposed to ultrashort laser pulses[J].Journal of Experimental and Theoretical Physics,1974,39(2):375-378.
[7] Jin F Y,Chen B,E S L,et al.Theory analysis and experiment verification on picosecond laser ablation of Al film[J].Chinese Journal of Luminescence,2014,35(6):754-760.金方圆,陈波,鄂书林,等.皮秒激光烧蚀Al膜的理论分析与实验验证[J].发光学报,2014,35(6):754-760.
[8] Lei C X,Ren Y P,Gan Y,et al.Effect of optical properties on the thermal responses of copper films induced by ultrafast lasers[J].High Power Laser and Particle Beams,2017,29(7):071006.雷春霞,任云鹏,干湧,等.光学性质对超快激光辐照下铜膜热响应的影响[J].强激光与粒子束,2017,29(7):071006.
[9] Xu B Q,Zhang Z G,Xu C G,et al.Numerical modeling of laser-induced picosecond ultrasound in micro-nano thin films[J].Journal of Jiangsu University(Natural Science Edition),2012,33(1):83-87.许伯强,张子国,徐晨光,等.微纳米薄膜材料中激光皮秒超声的数值模拟[J].江苏大学学报(自然科学版),2012,33(1):83-87.
[10] Dold C A.Picosecond laser processing of diamond cutting edges[M].Berlin:VDI-Verlag,2013:89-100.
[11] Lin Z B,Zhigilei L V,Celli V.Electron-phonon coupling and electron heat capacity of metals under conditions of strong electron-phonon nonequilibrium[J].Physical Review B,2008,77(7):075133.
[12] Anisimov S I,Rethfeld B.On the theory of ultrashort laser pulse interaction with a metal[J].Proceedings of SPIE,1997,3093:192-203.
[13] Ren Y P,Chen J K,Zhang Y W.Optical properties and thermal response of copper films induced by ultrashort-pulsed lasers[J].Journal of Applied Physics,2011,110(11):113102.
[14] Klemens P G,Williams R K.Thermal conductivity of metals and alloys[J].Metallurgical Reviews,2013,31(1):197-215.
[15] Hu M N,Ge L C,Zhang J P,et al.Hole-drilling with high depth-diameter ratio using multi-pulse femtosecond laser[J].Chinese Journal of Lasers,2016,43(4):0403006.胡梦宁,葛励成,张晋平,等.多脉冲飞秒激光深小孔的加工[J].中国激光,2016,43(4):0403006.
[16] Elsayed-Ali H E,Norris T B,Pessot M A,et al.Time-resolvedobservationofelectron-phonon relaxation in copper[J].Physical Review Letters,1987,58(12):1212-1215.
[17] Hu D Z.Numerical calculation of the electron-phonon coupling relaxation time in pulse laser ablation[J].Acta Physica Sinica,2009,58(2):1077-1082.胡德志.脉冲激光烧蚀中电声弛豫时间的确定[J].物理学报,2009,58(2):1077-1082.
[18] Hu W Q,Shin Y C,King G.Modeling of multi-burst mode pico-second laser ablation for improved material removal rate[J].Applied Physics A,2009,98(2):407-415.
[19] Tao S F.The physical processes of the metallic materials in nanosecond laser ablation[J].Laser Journal,2011,32(4):36-37.陶淑芬.纳秒激光脉冲烧蚀金属铜的物理过程分析[J].激光杂志,2011,32(4):36-37.
[2] Liu L,Ruan L,Zhang T R,et al.Experimental study on stainless steel micro-hole drilling with picosecond laser[J].Applied Laser,2015,35(4):472-478.刘路,阮亮,张天润,等.皮秒激光加工不锈钢微孔实验研究[J].应用激光,2015,35(4):472-478.
[3] Wang Z, Zhao Q Z. Research progress of manipulating tribological property of materials by ultrashort-pulse-induced surface micro-nano texture[J].Laser&Optoelectronics Progress,2016,53(11):110003.王卓,赵全忠.超短脉冲激光诱导微纳织构调控材料摩擦性能的研究进展[J].激光与光电子学进展,2016,53(11):110003.
[4] Li C, Cheng G H, Stoian R.Investigation of femtosecond laser-induced periodic surface structure on tungsten[J].Acta Optica Sinica,2016,36(5):0532001.李晨,程光华,Stoian R.飞秒激光诱导金属钨表面周期性自组织结构的研究[J].光学学报,2016,36(5):0532001.
[5] Mao S S,QuéréF,Guizard S,et al.Dynamics of femtosecond laser interactions with dielectrics[J].Applied Physics A,2004,79(7):1695-1709.
[6] Anisimov S I,Kapeliovich B L,Perelman T L,et al.Electron emission from metal surfaces exposed to ultrashort laser pulses[J].Journal of Experimental and Theoretical Physics,1974,39(2):375-378.
[7] Jin F Y,Chen B,E S L,et al.Theory analysis and experiment verification on picosecond laser ablation of Al film[J].Chinese Journal of Luminescence,2014,35(6):754-760.金方圆,陈波,鄂书林,等.皮秒激光烧蚀Al膜的理论分析与实验验证[J].发光学报,2014,35(6):754-760.
[8] Lei C X,Ren Y P,Gan Y,et al.Effect of optical properties on the thermal responses of copper films induced by ultrafast lasers[J].High Power Laser and Particle Beams,2017,29(7):071006.雷春霞,任云鹏,干湧,等.光学性质对超快激光辐照下铜膜热响应的影响[J].强激光与粒子束,2017,29(7):071006.
[9] Xu B Q,Zhang Z G,Xu C G,et al.Numerical modeling of laser-induced picosecond ultrasound in micro-nano thin films[J].Journal of Jiangsu University(Natural Science Edition),2012,33(1):83-87.许伯强,张子国,徐晨光,等.微纳米薄膜材料中激光皮秒超声的数值模拟[J].江苏大学学报(自然科学版),2012,33(1):83-87.
[10] Dold C A.Picosecond laser processing of diamond cutting edges[M].Berlin:VDI-Verlag,2013:89-100.
[11] Lin Z B,Zhigilei L V,Celli V.Electron-phonon coupling and electron heat capacity of metals under conditions of strong electron-phonon nonequilibrium[J].Physical Review B,2008,77(7):075133.
[12] Anisimov S I,Rethfeld B.On the theory of ultrashort laser pulse interaction with a metal[J].Proceedings of SPIE,1997,3093:192-203.
[13] Ren Y P,Chen J K,Zhang Y W.Optical properties and thermal response of copper films induced by ultrashort-pulsed lasers[J].Journal of Applied Physics,2011,110(11):113102.
[14] Klemens P G,Williams R K.Thermal conductivity of metals and alloys[J].Metallurgical Reviews,2013,31(1):197-215.
[15] Hu M N,Ge L C,Zhang J P,et al.Hole-drilling with high depth-diameter ratio using multi-pulse femtosecond laser[J].Chinese Journal of Lasers,2016,43(4):0403006.胡梦宁,葛励成,张晋平,等.多脉冲飞秒激光深小孔的加工[J].中国激光,2016,43(4):0403006.
[16] Elsayed-Ali H E,Norris T B,Pessot M A,et al.Time-resolvedobservationofelectron-phonon relaxation in copper[J].Physical Review Letters,1987,58(12):1212-1215.
[17] Hu D Z.Numerical calculation of the electron-phonon coupling relaxation time in pulse laser ablation[J].Acta Physica Sinica,2009,58(2):1077-1082.胡德志.脉冲激光烧蚀中电声弛豫时间的确定[J].物理学报,2009,58(2):1077-1082.
[18] Hu W Q,Shin Y C,King G.Modeling of multi-burst mode pico-second laser ablation for improved material removal rate[J].Applied Physics A,2009,98(2):407-415.
[19] Tao S F.The physical processes of the metallic materials in nanosecond laser ablation[J].Laser Journal,2011,32(4):36-37.陶淑芬.纳秒激光脉冲烧蚀金属铜的物理过程分析[J].激光杂志,2011,32(4):36-37.