基于共面传输线的太赫兹片上系统的研究
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摘要
太赫兹片上系统是将太赫兹的产生、传输和探测都集中在一个几平方厘米的基片上,线宽及间距达到微米量级,具有集成化程度高、系统尺寸小、稳定性好以及操作简便的特点,有利于与微量样品检测技术相互结合。研究采用HFSS软件对共面波导和共面带状线两种太赫兹共面传输线进行了仿真计算,通过优化传输线的宽度、长度、基底的厚度等关键几何参数确定出最佳的传输线结构;研究工作重点对太赫兹波段的共面带状线结构进行了设计和优化,实现了在介电常数很小的BCB基底上的低损耗传输。所得到的最佳结构参数为线宽及间距均为20μm,此结构为后续片上系统实物芯片的制作提供了参数依据。
The THz on-chip system concentrates the generation, transmission and detection of THz on a substrate of several square centimeters. Linewidth and spacing reach micron level, which has the advantages of high integration, small system size, good stability and simple operation, is conducive to the combination of micro-sample detection technology. Two kinds of terahertz coplanar transmission lines, coplanar waveguide and coplanar stripline, are simulated by HFSS software. The optimal transmission line structure is determined by optimizing the key geometric parameters such as the width, length and thickness of the transmission line. The research focuses on the design and optimization of coplanar stripline structure in terahertz band, and achieves low loss transmission on BCB substrate with very small dielectric constant. The optimum structure parameters obtained are line width and spacing of 20μm. This structure provides a parameter basis for the subsequent fabrication of system-on-chip physical chips.
The THz on-chip system concentrates the generation, transmission and detection of THz on a substrate of several square centimeters. Linewidth and spacing reach micron level, which has the advantages of high integration, small system size, good stability and simple operation, is conducive to the combination of micro-sample detection technology. Two kinds of terahertz coplanar transmission lines, coplanar waveguide and coplanar stripline, are simulated by HFSS software. The optimal transmission line structure is determined by optimizing the key geometric parameters such as the width, length and thickness of the transmission line. The research focuses on the design and optimization of coplanar stripline structure in terahertz band, and achieves low loss transmission on BCB substrate with very small dielectric constant. The optimum structure parameters obtained are line width and spacing of 20μm. This structure provides a parameter basis for the subsequent fabrication of system-on-chip physical chips.
引文
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[7] 逯美红, 沈京玲. 太赫兹时域光谱技术对化学混合物的成分分析研究[J]. 光学技术,2010,36(3):445—448.Lu Meihong, Shen Jingling. Studies on the composition of chemical mixtures by terahertz time domain spectroscopy[J]. Optical Technology,2010,36(3):445—448.
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[10] 徐兴福. HFSS射频仿真设计实例大全[M]. 北京:电子工业出版社,2015:107—129.Xu Xingfu. HFSS radio frequency simulation design complete[M]. Beijing:Electronic Industry Publishing House,2015:107—129.
[11] 陈国荣. 有限单元法原理及应用[M]. 北京:科学出版社,2009:1—66.Chen Guorong. Principles and applications of finite element method[M]. Beijing:Science Press,2009:1—66.
[12] 陈鹏, 李晓明, 房少军. FR4 基板金属底板共面波导传输线阻抗特性研究[J]. 微波学报,2011,27(6):47—49.Chen Peng, Li Xiaoming, Fang Shaojun. Impedance characteristics of FR4 substrate metal bottom coplanar waveguide transmission line[J]. Acta microwave Acta Sinica,2011,27(6):47—49.
[13] Yutaka Kadoya, Masayuki Onuma, Shinji Yanagi. THz wave propagation on strip lines: devices, properties, and applications[A]. Dept. of Quantum Matter, Hiroshima University, Hi-gashihiroshima,Japan,2008:739—8530.
[14] Karmoude F,et al. A new compact rectangular planar antenna for thz applications[C]// ICCWCS'17.Larache, Morocco:IEEE,2017.
[15] Wen C P. Coplanar waveguide: a surface strip transmission line suitable for nonreciprocal gyromagnetic device applications[J]. IEEE Trans. Mic. Theo. Tech.,1969,17(12):1087—1090.
[16] 高艳艳. 一种新型的宽阻带共面带状线低通滤波器[C]//2009年全国微波毫米波会议论文集.西安,中国:CNKI,2009:419—422.Gao Yanyan. A new wide stopband coplanar band-line low-pass filter[C]//Proceedings of the 2009 National Conference on Microwave and Millimeter Waves, Xi'an, China:CNKI,2009:419—422.
[17] 冯奎生, 李娜, 李劲. Ansoft HFSS入门教程与仿真实例[M]. 北京:电子工业出版社,2013.Feng Kuisheng, Li Na, Li Jin. Ansoft HFSS introductory tutorial and simulation example[M]. Beijing: Electronics Industry Press,2013.
[18] Grischkowsky D, Duling I N, Chen J C. Electromagnetic shock waves from transmission lines[N]. Physical Review Letters,1987-12-12(15).
[2] Yutaka Kandoya, Masayuki Onuma, Shinji Yanagi. THz wave propagation on strip lines: devices, properties, and applications[J]. Radioengineering,2008,17(2):48—55.
[3] Shinji Yanagi, Masayuki Onuma, Jiro Kitagawa. Propagation of terahertz pulses on coplanar strip-lines on low permittivity substrates and a spectroscopy application[J]. Applied Physics Express,2008,01(012009):1—3.
[4] Darwis F, Wijayanto Y N, Setiawan A, et al. 10 GHz standing-wave coplanar stripline on linbo3 crystal for radio to optical-wave conversion[C]//Journal of Physics: Conference Series.Indonesia,Britain:IEEE,2018:1—5.
[5] McLean J S, Itoh Tatsuo. Analysis of a new configuration of coplanar stripline[Z]. Transactions On Microwave Theory And Techniques,1992.
[6] 巩辰, 张存林. 低损耗太赫兹传输线的介电基底研究[C]. 北京:首都师范大学,2017.Gong Chen, Zhang Cunlin. Dielectric substrate for low loss terahertz transmission line[C]. Beijing:Capital Normal University,2017.
[7] 逯美红, 沈京玲. 太赫兹时域光谱技术对化学混合物的成分分析研究[J]. 光学技术,2010,36(3):445—448.Lu Meihong, Shen Jingling. Studies on the composition of chemical mixtures by terahertz time domain spectroscopy[J]. Optical Technology,2010,36(3):445—448.
[8] 沈京玲, 李宁, 逯美红, 等. 太赫兹电磁波在毒品检测中的应用[J]. 光学技术,2006,32(5):747—749.Shen Jingling, Li Ning, Hai Meihong, et al. Application of terahertz electromagnetic wave in drug detection[J]. Optical Technology,2006,32(5):747—749.
[9] 钟任斌,周俊,刘盛纲. 太赫兹波导的研究进展[A]. 电子科技大学太赫兹研究中心,2012:3.Zhong Renbin, Zhou Jun, Liu Shenggang. Research progress of terahertz waveguide[A]. Terahertz Research Center, University of Electronic Science and Technology,2012:3.
[10] 徐兴福. HFSS射频仿真设计实例大全[M]. 北京:电子工业出版社,2015:107—129.Xu Xingfu. HFSS radio frequency simulation design complete[M]. Beijing:Electronic Industry Publishing House,2015:107—129.
[11] 陈国荣. 有限单元法原理及应用[M]. 北京:科学出版社,2009:1—66.Chen Guorong. Principles and applications of finite element method[M]. Beijing:Science Press,2009:1—66.
[12] 陈鹏, 李晓明, 房少军. FR4 基板金属底板共面波导传输线阻抗特性研究[J]. 微波学报,2011,27(6):47—49.Chen Peng, Li Xiaoming, Fang Shaojun. Impedance characteristics of FR4 substrate metal bottom coplanar waveguide transmission line[J]. Acta microwave Acta Sinica,2011,27(6):47—49.
[13] Yutaka Kadoya, Masayuki Onuma, Shinji Yanagi. THz wave propagation on strip lines: devices, properties, and applications[A]. Dept. of Quantum Matter, Hiroshima University, Hi-gashihiroshima,Japan,2008:739—8530.
[14] Karmoude F,et al. A new compact rectangular planar antenna for thz applications[C]// ICCWCS'17.Larache, Morocco:IEEE,2017.
[15] Wen C P. Coplanar waveguide: a surface strip transmission line suitable for nonreciprocal gyromagnetic device applications[J]. IEEE Trans. Mic. Theo. Tech.,1969,17(12):1087—1090.
[16] 高艳艳. 一种新型的宽阻带共面带状线低通滤波器[C]//2009年全国微波毫米波会议论文集.西安,中国:CNKI,2009:419—422.Gao Yanyan. A new wide stopband coplanar band-line low-pass filter[C]//Proceedings of the 2009 National Conference on Microwave and Millimeter Waves, Xi'an, China:CNKI,2009:419—422.
[17] 冯奎生, 李娜, 李劲. Ansoft HFSS入门教程与仿真实例[M]. 北京:电子工业出版社,2013.Feng Kuisheng, Li Na, Li Jin. Ansoft HFSS introductory tutorial and simulation example[M]. Beijing: Electronics Industry Press,2013.
[18] Grischkowsky D, Duling I N, Chen J C. Electromagnetic shock waves from transmission lines[N]. Physical Review Letters,1987-12-12(15).