扫描电子显微镜在岩矿分析中的应用
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摘要
扫描电子显微镜对样品要求低、具有高分辨率和实时成像功能,由于可携带分析功能强大的各类附件,成为岩矿分析中常用的测试仪器之一。本文从岩矿分析的角度出发,详细阐述扫描电子显微镜在形貌观察、成分分析、组构分析和阴极荧光分析中的典型应用案例,证明其不仅能够拍摄高分辨率的样品微区形貌图、阴极荧光图以及具有清晰边界的多相矿物相图;同时可结合能谱仪、波谱仪、电子背散射衍射探头和聚焦离子束等附件及多种分析软件对矿物的二维分布、含量、颗粒形态等信息进行提取,以获得有关岩石、矿物的元素组成,变化规律及其赋存状态等更多信息。由于影响扫描电子显微镜测试结果准确性的原因较多,笔者将重点从制样问题说明,并给予相应的解决办法,以供使用者参考。
Scanning electron microscopy has become one of the commonly used testing instruments in rock and ore analysis and testing because of its low requirements for samples,high resolution and real-time imaging functions,as well as its ability to carry powerful accessories for analysis. In this paper, the typical application cases of scanning electron microscopy in morphology observation,composition analysis,fabric analysis and cathode fluorescence analysis are described in detail from the perspective of rock ore analysis. This proves that it can take high-resolution micro area morphology,cathode fluorescence and multiphase mineral phase map with clear boundary. At the same time,scanning electron microscopy can combine with a variety of accessories which are energy disperse spectroscopy,wavelength dispersive spectrometer,electron backscatter diffraction probe,focused ion beam and analysis software to extract two-dimensional distribution,content,particle morphology and other characteristics of minerals. The ultimate purpose is to obtain more information about the element composition,change rules and occurrence state of rocks and minerals. Because there are many reasons affecting the accuracy of scanning electron microscopy test results,the author will only explain the sample preparation problems and give corresponding solutions for users' reference.
Scanning electron microscopy has become one of the commonly used testing instruments in rock and ore analysis and testing because of its low requirements for samples,high resolution and real-time imaging functions,as well as its ability to carry powerful accessories for analysis. In this paper, the typical application cases of scanning electron microscopy in morphology observation,composition analysis,fabric analysis and cathode fluorescence analysis are described in detail from the perspective of rock ore analysis. This proves that it can take high-resolution micro area morphology,cathode fluorescence and multiphase mineral phase map with clear boundary. At the same time,scanning electron microscopy can combine with a variety of accessories which are energy disperse spectroscopy,wavelength dispersive spectrometer,electron backscatter diffraction probe,focused ion beam and analysis software to extract two-dimensional distribution,content,particle morphology and other characteristics of minerals. The ultimate purpose is to obtain more information about the element composition,change rules and occurrence state of rocks and minerals. Because there are many reasons affecting the accuracy of scanning electron microscopy test results,the author will only explain the sample preparation problems and give corresponding solutions for users' reference.
引文
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[2]马原辉,陈学广,刘哲.扫描电镜粉末样品的制备方法[J].实验室科学,2011,14(1):148-150.
[3]吴立新,陈方玉.现代扫描电镜的发展及其在材料科学中的应用[J].武钢技术,2005,43(6):36-40.
[4]郭素枝.扫描电镜技术及其应用[M].厦门:厦门大学出版社,2006.
[5]于丽芳,杨志军,周永章,等.扫描电镜和环境扫描电镜在地学领域的应用综述[J].中山大学研究生学刊(自然科学,医学版),2008,29(1):54-61.
[6]程涌,文义明,吴伟,等.场发射扫描电镜在现代河流沉积石英颗粒表面形态特征研究中的应用[J].电子显微学报,2017,36(5):457-464.
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[13]刘锡贝,赵江勇,马辉,等.扫描电镜在进境矿物鉴别中的应用[J].电子显微学报,2018,37(2):190-194.
[14]黄杏珍.扫描电镜下灰泥灰岩的鉴别及其沉积环境意义的探讨[J].沉积学报,1984,2(3):91-96.
[15]陈安东,顾佳妮,赵志中,等.云南大理点苍山末次冰期冰碛物石英砂扫描电镜形态特征分析[J].冰川冻土,2016,38(2):453-462.
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[17]李金华,潘永信.透射电子显微镜在地球科学研究中的应用[J].中国科学:地球科学,2015,45(9):1359-1382.
[18]盛克平,丁听生,王虎,等.环境扫描电子显微镜的特性及应用概况[J].理化检验:物理分册,2003,39(9):470-473.
[19]张蓓丽.系统宝石学[M].北京:地质出版社,2006.
[20] PRIOR D J,BOYLE A P,BRENKER F E,et al. The application of electron backscatter diffraction and orientation contrast imaging in the SEM to textural problems in rocks[J]. Am Mineral,1999,84:1741-1759.
[21]徐海军,金淑燕,郑伯让.岩石组构学研究的最新技术——电子背散射衍射(EBSD)[J].现代地质,2007,21(2):213-225.
[22]许志琴,王勤,梁凤华,等.电子背散射衍射(EBSD)技术在大陆动力学研究中的应用[J].岩石学报,2009,25(7):1721-1736.
[23]吕智超,蒋职权,曾涛.费氏旋转台法、X光岩组法和电子背散射衍射技术组构分析的比较[J].西部资源,2016,1:67-69.
[24]迟婷婷.扫描电子显微镜对样品的要求及其制备[J].中国计量,2015(8):83.
[25]曹艳芬,宋庆军,卢慧粉,等. ULTRAPLUS场发射扫描电子显微镜的日常维护及故障排除[J].理化检验:物理分册,2015,51(1):49-51,68.
[26]王醒东,张立永,夏芳敏,等.扫描电镜样品的制备技术[J].广州化工,2013,41(1):46-67+67.
[27]华佳捷,刘紫微,林初城,等.场发射扫描电镜中荷电现象研究[J].电子显微学报,2014,33(3):226-232.
[2]马原辉,陈学广,刘哲.扫描电镜粉末样品的制备方法[J].实验室科学,2011,14(1):148-150.
[3]吴立新,陈方玉.现代扫描电镜的发展及其在材料科学中的应用[J].武钢技术,2005,43(6):36-40.
[4]郭素枝.扫描电镜技术及其应用[M].厦门:厦门大学出版社,2006.
[5]于丽芳,杨志军,周永章,等.扫描电镜和环境扫描电镜在地学领域的应用综述[J].中山大学研究生学刊(自然科学,医学版),2008,29(1):54-61.
[6]程涌,文义明,吴伟,等.场发射扫描电镜在现代河流沉积石英颗粒表面形态特征研究中的应用[J].电子显微学报,2017,36(5):457-464.
[7]章晓中.电子显微分析[M].北京:清华大学出版社,2006.
[8]姚骏恩.我国超显微镜的研制与发展[J].电子显微学报,1996,15(2/3/4):353-370.
[9]陈莉,徐军,陈晶.扫描电子显微镜显微分析技术在地球科学中的应用[J].中国科学:地球科学,2015,45(9):1347-1358.
[10]陈木子,高伟建,张勇,等.浅谈扫描电子显微镜的结构及维护[J].分析仪器,2013(4):91-93.
[11]张大同.扫描电镜与能谱仪分析技术[M].广州:华南理工大学出版社,2009:142-143.
[12]李家熙.岩矿测试技术中有效信息的获取[J].岩矿测试,1992,11(1/2):1-5.
[13]刘锡贝,赵江勇,马辉,等.扫描电镜在进境矿物鉴别中的应用[J].电子显微学报,2018,37(2):190-194.
[14]黄杏珍.扫描电镜下灰泥灰岩的鉴别及其沉积环境意义的探讨[J].沉积学报,1984,2(3):91-96.
[15]陈安东,顾佳妮,赵志中,等.云南大理点苍山末次冰期冰碛物石英砂扫描电镜形态特征分析[J].冰川冻土,2016,38(2):453-462.
[16]焦汇胜,李香庭.扫描电镜能谱仪及波谱仪分析技术[M].长春:东北师范大学出版社,2011.
[17]李金华,潘永信.透射电子显微镜在地球科学研究中的应用[J].中国科学:地球科学,2015,45(9):1359-1382.
[18]盛克平,丁听生,王虎,等.环境扫描电子显微镜的特性及应用概况[J].理化检验:物理分册,2003,39(9):470-473.
[19]张蓓丽.系统宝石学[M].北京:地质出版社,2006.
[20] PRIOR D J,BOYLE A P,BRENKER F E,et al. The application of electron backscatter diffraction and orientation contrast imaging in the SEM to textural problems in rocks[J]. Am Mineral,1999,84:1741-1759.
[21]徐海军,金淑燕,郑伯让.岩石组构学研究的最新技术——电子背散射衍射(EBSD)[J].现代地质,2007,21(2):213-225.
[22]许志琴,王勤,梁凤华,等.电子背散射衍射(EBSD)技术在大陆动力学研究中的应用[J].岩石学报,2009,25(7):1721-1736.
[23]吕智超,蒋职权,曾涛.费氏旋转台法、X光岩组法和电子背散射衍射技术组构分析的比较[J].西部资源,2016,1:67-69.
[24]迟婷婷.扫描电子显微镜对样品的要求及其制备[J].中国计量,2015(8):83.
[25]曹艳芬,宋庆军,卢慧粉,等. ULTRAPLUS场发射扫描电子显微镜的日常维护及故障排除[J].理化检验:物理分册,2015,51(1):49-51,68.
[26]王醒东,张立永,夏芳敏,等.扫描电镜样品的制备技术[J].广州化工,2013,41(1):46-67+67.
[27]华佳捷,刘紫微,林初城,等.场发射扫描电镜中荷电现象研究[J].电子显微学报,2014,33(3):226-232.