银饰表面氧化铝保护膜的防腐蚀性能
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摘要
为了提高银饰的抗变色能力,采用大腔体原子层沉积设备,以Al_2O_3作为保护膜进行银饰的批量处理。通过在腔体内加入匀气装置,改善了腔体内膜层厚度的均匀性。通过工艺参数的改进,改善了薄膜的表面形貌。实验表明,用洗银水处理后的银饰直接进行处理,银饰表面会变黑。X射线衍射测试表明基底温度为150℃时,获得的薄膜为无定型结构。扫描电镜测试表明薄膜表面致密、均匀。腐蚀试验表明Al_2O_3膜层厚度为30 nm时,有良好的抗变色效果。光谱测试表明,镀膜后银饰的平均反射率略高于未镀膜银饰的平均反射率,镀膜后对银饰的外观基本无影响。
In order to protect silver jewelry against tarnish,Al_2O_3 thin film was deposited on the silver jewelry by using ALD method with big chamber. The uniformity of film thickness was improved by adding device making gas uniform into the big chamber; the surface morphology of thin film was improved by optimizing process parameters.Experiments shows that the silver jewelry cleaning with silver washing liquid was black by depositing Al2 O3 thin film on silver jewelry directly. XRD test shows that Al_2O_3 thin film is amorphous when the temperature of substrate is150 ℃. SEM test shows that the film is dense and uniform. Corrosion test shows that the film can protect silver jewelry against tarnish well when the thickness is 30 nm. Spectrum test shows that the average reflectance is higher than uncoated silver jewelry and the film does not affect the appearance of silver jewelry basically.
In order to protect silver jewelry against tarnish,Al_2O_3 thin film was deposited on the silver jewelry by using ALD method with big chamber. The uniformity of film thickness was improved by adding device making gas uniform into the big chamber; the surface morphology of thin film was improved by optimizing process parameters.Experiments shows that the silver jewelry cleaning with silver washing liquid was black by depositing Al2 O3 thin film on silver jewelry directly. XRD test shows that Al_2O_3 thin film is amorphous when the temperature of substrate is150 ℃. SEM test shows that the film is dense and uniform. Corrosion test shows that the film can protect silver jewelry against tarnish well when the thickness is 30 nm. Spectrum test shows that the average reflectance is higher than uncoated silver jewelry and the film does not affect the appearance of silver jewelry basically.
引文
1杨长江.金银币变色机理和抗变色工艺研究.大连:大连理工大学,2008Yang Chang-jiang.Tarnishing mechanism and anti-tarnishing techniques of gold and silver coins.Dalian:Dalian University of Technology,2008
2 Nisaratanaporn S,Nisaratanaporn E.The anti-tarnishing,microstructure analysis and mechanical properties of sterling silver with silicon addition.Journal of Metals,Materials and Minerals,2003;12(2):14-16
3 Bernard E M C,Dauvergne E,Evesque M,et al.Reduction of silver tarnishing and protection against subsequent corrosion.Corrosion Science,2005;47(3):665-678
4 Xiang J J,Ding Y Q,Du L Y,et al.Growth mechanism of atomiclayer-deposited Ti Al C metal gate based on Ti Cl4and TMA precursors.Chin Phys B,2016;25(3):037308
5柴智敏.原子层沉积薄膜摩擦特性研究.北京:清华大学,2014Chai zhimin.Study on ttibological performance of films prepared by atomic layer deposition.Beijing:Tsinghua University,2014
6 Haeberle J,Henkel K,Cargouri H,et al.Ellipsometry and XPScomparative studies of thermal and plasma enhanced atomic layer deposited Al2O3films.Beilstein J Nanotechnol,2013;(4):734-740
7 Zhu L Q,Liu Y H,Zhang H L,et al.Atomic layer deposited Al2O3films for anti-reflectance and surface passivation applications.Applied Surface Science,2014;288:431-433
8 Kamran A,Kyung-Hyun C,Jeongdai J,et al.High rateroll-to-roll atmospheric atomic layer deposition of Al2O3thin films towards gas diffusion barriers on polymers.Materials Letters,2014;136:90-94
9 Triani G,Campbell J A,Evans P J,et al.Low temperature atomic layer deposition of titania thin films.Thin Solid Films,2010;518(12):3183-3185
10 Puurunen R L,Vandervorst W,Besling W F A,et al.Island growth in the atomic layer deposition of zirconium oxide and aluminum oxide onhydrogen-terminated silicon:growth mode modeling and transmission electron microscopy.Journal of Applied Physics,2004;96(9):4878-4881
11刘浩学,黄敏,武兵,等.彩色印刷图像色差的主观评价.北京印刷学院学报,2007;15(2):1-4Liu Haoxue,Huang Min,Wu Bing,et al.Color difference evaluation for printed images.Journal of Beijing Institute of Graphic Communication,2007;15(2):1-4
2 Nisaratanaporn S,Nisaratanaporn E.The anti-tarnishing,microstructure analysis and mechanical properties of sterling silver with silicon addition.Journal of Metals,Materials and Minerals,2003;12(2):14-16
3 Bernard E M C,Dauvergne E,Evesque M,et al.Reduction of silver tarnishing and protection against subsequent corrosion.Corrosion Science,2005;47(3):665-678
4 Xiang J J,Ding Y Q,Du L Y,et al.Growth mechanism of atomiclayer-deposited Ti Al C metal gate based on Ti Cl4and TMA precursors.Chin Phys B,2016;25(3):037308
5柴智敏.原子层沉积薄膜摩擦特性研究.北京:清华大学,2014Chai zhimin.Study on ttibological performance of films prepared by atomic layer deposition.Beijing:Tsinghua University,2014
6 Haeberle J,Henkel K,Cargouri H,et al.Ellipsometry and XPScomparative studies of thermal and plasma enhanced atomic layer deposited Al2O3films.Beilstein J Nanotechnol,2013;(4):734-740
7 Zhu L Q,Liu Y H,Zhang H L,et al.Atomic layer deposited Al2O3films for anti-reflectance and surface passivation applications.Applied Surface Science,2014;288:431-433
8 Kamran A,Kyung-Hyun C,Jeongdai J,et al.High rateroll-to-roll atmospheric atomic layer deposition of Al2O3thin films towards gas diffusion barriers on polymers.Materials Letters,2014;136:90-94
9 Triani G,Campbell J A,Evans P J,et al.Low temperature atomic layer deposition of titania thin films.Thin Solid Films,2010;518(12):3183-3185
10 Puurunen R L,Vandervorst W,Besling W F A,et al.Island growth in the atomic layer deposition of zirconium oxide and aluminum oxide onhydrogen-terminated silicon:growth mode modeling and transmission electron microscopy.Journal of Applied Physics,2004;96(9):4878-4881
11刘浩学,黄敏,武兵,等.彩色印刷图像色差的主观评价.北京印刷学院学报,2007;15(2):1-4Liu Haoxue,Huang Min,Wu Bing,et al.Color difference evaluation for printed images.Journal of Beijing Institute of Graphic Communication,2007;15(2):1-4