摘要
采用流延法制备了96氧化铝陶瓷基片。研究了氧化铝粉体的粒度、粒度分布、微观形貌等粉体性能对氧化铝陶瓷基片的烧结性能、微观结构的影响。研究结果表明:粒径分布均匀且无明显团聚的氧化铝粉体有利于获得平整度高,表面光滑的高质量流延膜片,并具有较好的性能。
96Al_2O_3 ceramic substrates were prepared by tape casting. The effects of particle size, particle size distribution and microscopic morphology of alumina powders on the sintering properties and microstructure of 96Al_2O_3 ceramic substrates were investigated. The results showed that the green tape with high flatness, smooth surface and high quality can be prepared by the alumina powders with uniform particle size distribution and no obvious reunion. The so obtained green tape had better performance.
引文
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