磁控溅射铝镜生产中的关键技术问题及解决办法
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摘要
磁控溅射铝镜生产线经过合理设计配置了真空溅射镀膜段,自动化程度高,大幅度降低了磁控溅射铝镜生产线的造价,实现了磁控溅射铝镜的低成本、高效率生产,是制镜行业生产设备的转型升级,也进一步实现了大型镀膜设备的国产化。该文针对在真空镀铝过程中经常遇到的问题做了简要阐述,同时针对这些问题给出了相应的修改建议。
The magnetron sputtering aluminum mirror production line distributed with vacuum sputtering coating section through proper design improves the level of automation,remarkably decreases the cost of production line and achieves the effective production of magnetron sputtering aluminum mirror with low cost,which is a transformation and upgrading of production equipment of mirror making industry and implements domestication of large scale coating equipment.This article briefly illustrates issues occurred in the procedure of vacuum aluminum coating and proposes relevant modification against these issues.
The magnetron sputtering aluminum mirror production line distributed with vacuum sputtering coating section through proper design improves the level of automation,remarkably decreases the cost of production line and achieves the effective production of magnetron sputtering aluminum mirror with low cost,which is a transformation and upgrading of production equipment of mirror making industry and implements domestication of large scale coating equipment.This article briefly illustrates issues occurred in the procedure of vacuum aluminum coating and proposes relevant modification against these issues.
引文
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[3]尹冬梅.Si掺杂ZnO薄膜的制备及光学性质的研究[D].长春:东北师范大学,2009.
[4]王晓飞.射频磁控溅射制备Cu掺杂ZnO薄膜的结构及性质研究[D].苏州:苏州大学,2008.
[5]陈惠娟.纳米碳/硅异质结的制备及其气敏性研究[D].北京:中国石油大学,2010.
[6]韩莹莹.TiO2及其掺杂膜的制备、结构及性能研究[D].南京:南京理工大学,2010.