摘要
碳化硅(SiC)材料因其禁带宽度大、晶体原子离位能高等物理特性,而被视为制作耐高温和抗辐射器件极具潜力的宽带隙半导体材料。本文采用Geant4模拟得到了30μm厚的SiC和Si材料对不同能量的电子、质子、α粒子以及X射线的响应,并对SiC和Si探测器器件的I-V特性和能谱测量结果进行了比较。仿真及试验结果证明,SiC粒子阻挡本领及X射线探测效率与Si探测器相当,SiC与Si探测器对带电粒子的能谱分辨率也没有明显差别。
For its wider bandgap and higher threshold displacement energy,the composed semi- conduct material Silicon carbide( SiC) is investigated as a candidate to replace the semi- conduct material Si to be used in high- temperature and harsh radiation environments by researchers all around the world. In this work,the response of 30μm thick SiC and Si materials to different particlessuch as electrons,protons,alpha particles and X- rays with different energies were obtained using the Geant4 package separately,I- V characteristics of the SiC and Si detectors and energy spectrum measurement results were compared. The simulation and test results showed that the particle stopping power of SiC and X ray detection efficiency are comparable to that of the Si detector,and the SiC and Si detectors have no significant difference in the spectral resolution of charged particles.
引文
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