基于WS_2纳米片的柔性湿度传感器制备与测试
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摘要
提出了一种基于WS_2纳米片的聚酰亚胺柔性湿度传感器,传感器柔性薄膜和叉指电容电极分别采用加热亚胺化工艺和丝网印刷制备得到,其制备工艺简单,成本低廉。实验表明该柔性湿度传感器能够测量25%RH～85%RH的湿度,且在高湿度范围内(60%RH～85%RH),该柔性湿度传感器的灵敏度高达50.42 pF/%RH。传感器的响应和恢复时间分别为11和26 s,具有较好的稳定性和重复性。此外,该柔性传感器的呼吸性能测试结果表明,其能够用于监测时间间隔为2～10 s的呼吸状态,暗示该传感器可用于某些和呼吸频率有关的疾病诊断。
A polyimide flexible humidity sensor based on WS_2 nanoflakes was proposed.The flexible film and interdigital capacitance electrodes of the humidity sensor were fabricated by the thermal imidization process and screen printing process,respectively.The fabrication processes were simple and low in cost.The experiment results show that the flexible humidity sensor can be used for the humidity detection in 25%RH-85%RH,and the sensor indicates the sensitivity up to 50.42 pF/%RH in the high humidity range of 60%RH-85%RH.The response time and recovery time of the sensor are 11 and 26 s,respectively,indicating good stability and repeatability.Furthermore,the respiration monitoring results of the flexible humidity sensor show that the sensor can detect the human breath in the interval of 2-10 s,indicating that the sensor can be used for the diagnosis gauge of some respiration-related diseases.
A polyimide flexible humidity sensor based on WS_2 nanoflakes was proposed.The flexible film and interdigital capacitance electrodes of the humidity sensor were fabricated by the thermal imidization process and screen printing process,respectively.The fabrication processes were simple and low in cost.The experiment results show that the flexible humidity sensor can be used for the humidity detection in 25%RH-85%RH,and the sensor indicates the sensitivity up to 50.42 pF/%RH in the high humidity range of 60%RH-85%RH.The response time and recovery time of the sensor are 11 and 26 s,respectively,indicating good stability and repeatability.Furthermore,the respiration monitoring results of the flexible humidity sensor show that the sensor can detect the human breath in the interval of 2-10 s,indicating that the sensor can be used for the diagnosis gauge of some respiration-related diseases.
引文
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[2]ZHANG J,SUN L,CHEN C,et al.High performance humidity sensor based on metal organic framework MIL-101(Cr)nanoparticles[J].Journal of Alloys and Compounds,2017,695:520-525.
[3]RIMEIKA R,CIPLYS D,PODERYS V,et al.Fast-response and low-loss surface acoustic wave humidity sensor based on bovine serum albumin-gold nanoclusters film[J].Sensors and Actuators:B,2017,239:352-357.
[4]LE X,DING H,PANG J,et al.A humidity sensor with high sensitivity and low temperature coefficient of frequency based on AlN surface acoustic wave and graphene oxide sensing layer[C]//Proceedings of the 19th International Conference on Solid-State Sensors,Actuators and Microsystems(TRANS-DUCERS).Kaohsiung,China,2017:210-213.
[5]WOYESSA G,NIELSEN K,STEFANI A,et al.Temperature insensitive hysteresis free highly sensitive polymer optical fiber Bragg grating humidity sensor[J].Optics Express,2016,24(2):1206-1213.
[6]LUO Y,CHEN C,XIA K,et al.Tungsten disulfide(WS2)based all-fiber-optic humidity sensor[J].Optics Express,2016,24(8):8956-8966.
[7]BOUDADEN J,STEINMAB L M,ENDRES H E,et al.Polyimide-based capacitive humidity sensor[J].Sensors,2018,18(5):1516-1530.
[8]WANG W,HE S,LI S,et al.Enhanced sensitivity of SAWgas sensor coated molecularly imprinted polymer incorporating high frequency stability oscillator[J].Sensors and Actuators:B,2007,125(2):422-427.
[9]DANKOCO M D,TESFAY G Y,BENEVENT E,et al.Temperature sensor realized by inkjet printing process on flexible substrate[J].Materials Science and Engineering:B,2016,205:1-5.
[10]GONG S,SCHWALB W,WANG Y,et al.A wearable and highly sensitive pressure sensor with ultrathin gold nanowires[J].Nature Communications,2014,5(2):3132-3142.
[11]LIM S,SON D,KIM J,et al.Wearable electronics:transparent and stretchable interactive human machine interface based on patterned graphene heterostructures[J].Advanced Functional Materials,2015,25(3):374.
[12]GUO H,LAN C,ZHOU Z,et al.Transparent,flexible,and stretchable WS2 based humidity sensors for electronic skin[J].Nanoscale,2017,9(19):6246-6253