高回转精度微柱状电极电化学加工模型及试验
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摘要
为实现高回转精度微柱状电极的精确高效在线制备,对微电极电化学刻蚀过程进行了深入的研究与改进。首先,根据电化学刻蚀原理,分析了电极旋转对柱状电极加工的影响,试验证明电极旋转可以提高电极的回转精度;其次,根据试验归纳,确立了加工电压、浸液深度和电极转速之间的函数关系,建立了高回转精度微柱状电极加工控制数学模型;最后,在上述模型的指导下,选择优化的加工参数组合,成功加工得到一系列直径为100μm左右、同轴度误差小于1μm的柱状电极。
To fabricate cylindrical micro electrode with high rotation accuracy efficiently and precisely on line,the process of electrochemical etching micro electrodes is investigated and improved deeply.First,the effect of rotation on the process of fabricating cylindrical electrode is analyzed based on the mechanism of electrochemical etching.It is proved that electrode rotation can improve the rotation accuracy of electrode by experiments.Second,according to the experimental results,the functional relationships among the applied voltage,immersed depth and rotation speed are established,and the mathematical model of controlling how to fabricate cylindrical electrode is built.Finally,the optimized combination of parameters is chosen under the direction of the model,and series of cylindrical micro electrodes with high rotation accuracy are fabricated with the diameter about 100μm and the error of rotation accuracy controlled below 1μm.
To fabricate cylindrical micro electrode with high rotation accuracy efficiently and precisely on line,the process of electrochemical etching micro electrodes is investigated and improved deeply.First,the effect of rotation on the process of fabricating cylindrical electrode is analyzed based on the mechanism of electrochemical etching.It is proved that electrode rotation can improve the rotation accuracy of electrode by experiments.Second,according to the experimental results,the functional relationships among the applied voltage,immersed depth and rotation speed are established,and the mathematical model of controlling how to fabricate cylindrical electrode is built.Finally,the optimized combination of parameters is chosen under the direction of the model,and series of cylindrical micro electrodes with high rotation accuracy are fabricated with the diameter about 100μm and the error of rotation accuracy controlled below 1μm.
引文
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[18]王明环,朱荻,徐惠宇.微螺旋电极在改善微细电解加工性能中的应用[J].机械科学与技术,2006,25(3):348-351.WANG M H,ZHU D,XU H Y.Use of micro-helix electrodes in improving performance of micro-ECM[J].Mechanical Science and Technology,2006,25(3):348-351(in Chinese).
[19]刘勇,曾永彬.用高转速微电极电解钻削深小孔[J].光学精密工程,2014,22(3):608-615.LIU Y,ZENG Y B.Experimental research on electrochemical drilling of deep and small holes with high speed micro electrode[J].Optics and Precision Engineering,2014,22(3):608-615(in Chinese).
[20]FANG X L,ZENG P F,ZENG Y B,et al.Enhancement of performance of wire electrochemical micromachining using a rotary helical electrode[J].Journal of Materials Processing Technology,2016,227:129-137.
[2]YAMAGATA Y,HIGUCHI T.Three-dimensional micro fabrication by precision cutting technique[J].Journal of the Japan Society for Precision Engineering,1995,61(10):1361-1364.
[3]WAIDA T,OKANO K.Micro-grinding of micro-machine component[J].Journal of the Japan Society for Precision Engineering,1995,61(10):1365-1368.
[4]MASUZAWA T,FUGINO M,KOBAYASHI K,et al.Wire electro-discharge grinding for micro-machining[J].CIRP Annals-Manufacturing Technology,1985,34(1):431-434.
[5]MASUZAWA T,TSUKAMOTO J,FUJINO M.Drilling of deep microholes by EDM[J].CIRP Annals-Manufacturing Technology,1989,38(1):195-198.
[6]BRYANT P J,KIM H S,ZHENG Y C,et al.Technique for shaping scanning tunneling microscope tips[J].Review of Scientific Instruments,1987,58(6):1115.
[7]FOTINO M.Nanotips by reverse electrochemical etching[J].Applied Physics Letters,1992,60(23):2935-2937.
[8]LIM Y M,KIM S H.An electrochemical fabrication method for extremely thin cylindrical micropin[J].International Journal of Machine Tools and Manufacture,2001,41(15):2287-2296.
[9]LIM Y M,LIM H J,LIU J R,et al.Fabrication of cylindrical micropins with various diameters using DC current density control[J].Journal of Materials Processing Technology,2003,141(2):251-255.
[10]LIM H J,LIM Y M,KIM S H.Fabrication of arbitrarily shaped microelectrodes by electrochemical etching[J].Japanese Journal of Applied Physics,2003,42(3):1479-1485.
[11]赵万生,李志勇,王振龙,等.微三维结构电火花铣削关键技术研究[J].微细加工技术,2003(3):49-55.ZHAO W S,LI Z Y,WANG Z L,et al.Research on key techniques of 3D micro-EDM milling[J].Microfabrication Technology,2003(3):49-55(in Chinese).
[12]王明环,朱荻,徐惠宇.电化学腐蚀法制备针尖的试验研究[J].传感器技术,2005,24(3):24-26.WANG M H,ZHU D,XU H Y.Experimental research on tips preparation using electrochemical etching[J].Journal of Transducer Technology,2005,24(3):24-26(in Chinese).
[13]王明环,朱荻,张朝阳.电化学腐蚀法加工微圆柱体[J].机械工程学报,2006,42(6):128-132.WANG M H,ZHU D,ZHANG Z Y.Fabrication of micro-pin based on electrochemical etching[J].Journal of Mechanical Engineering,2006,42(6):128-132(in Chinese).
[14]王少华,朱荻.微尺度线电极电解加工[J].航空学报,2009,30(9):1788-1794.WANG S H,ZHU D.Micro wire electrode electrochemical machining[J].Acta Aeronautica et Astronautica Sinica,2009,30(9):1788-1794(in Chinese).
[15]刘勇,朱荻,曾永彬,等.微细电解铣削加工模型及实验研究[J].航空学报,2010,31(9):1864-1871.LIU Y,ZHU D,ZENG Y B,et al.Theoretical and experimental research on micro electrochemical milling[J].Acta Aeronautica et Astronautica Sinica,2010,31(9):1864-1871(in Chinese).
[16]王明环,彭伟.电化学加工法制备微细工具电极试验研究[J].兵工学报,2010,31(1):74-78.WANG M H,PENG W.Study on micro-electrodes by using electrochemical machining[J].Acta Armamentarii,2010,31(1):74-78(in Chinese).
[17]FAN Z W,HOURNG L W.The analysis and investigation on the microelectrode fabrication by electrochemical machining[J].International Journal of Machine Tools and Manufacture,2009,49(7):659-666.
[18]王明环,朱荻,徐惠宇.微螺旋电极在改善微细电解加工性能中的应用[J].机械科学与技术,2006,25(3):348-351.WANG M H,ZHU D,XU H Y.Use of micro-helix electrodes in improving performance of micro-ECM[J].Mechanical Science and Technology,2006,25(3):348-351(in Chinese).
[19]刘勇,曾永彬.用高转速微电极电解钻削深小孔[J].光学精密工程,2014,22(3):608-615.LIU Y,ZENG Y B.Experimental research on electrochemical drilling of deep and small holes with high speed micro electrode[J].Optics and Precision Engineering,2014,22(3):608-615(in Chinese).
[20]FANG X L,ZENG P F,ZENG Y B,et al.Enhancement of performance of wire electrochemical micromachining using a rotary helical electrode[J].Journal of Materials Processing Technology,2016,227:129-137.