基于柔性铰链的微位移机构的设计与分析
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摘要
针对传统机械式微位移机构无法实现高精度定位的问题,采用半圆型柔性铰链设计了一种反对称式柔性放大机构,将输入的直线位移放大并转化为转角位移输出。对其转角刚度、结构形式、结构参数、静态位移输出特性进行分析,并利用Ansys软件对柔性放大机构进行建模和有限元分析,验证了其结构的合理性。
In view of the problem that traditional mechanical micro-displacement mechanism is unable to perform highprecision positioning,the semi-circular flexible hinge is used to design an anti-symmetric flexible amplification mechanism which can amplify the input linear displacement and transform it into angular displacement for output. The paper analyzes its angular stiffness,structure type,structural parameters,and output characteristics of static displacement. The software Ansys is used to establish a model for the flexible amplification mechanism and performing finite element analysis,which proves that the structure is applicable.
In view of the problem that traditional mechanical micro-displacement mechanism is unable to perform highprecision positioning,the semi-circular flexible hinge is used to design an anti-symmetric flexible amplification mechanism which can amplify the input linear displacement and transform it into angular displacement for output. The paper analyzes its angular stiffness,structure type,structural parameters,and output characteristics of static displacement. The software Ansys is used to establish a model for the flexible amplification mechanism and performing finite element analysis,which proves that the structure is applicable.
引文
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[4]张明群.柔性铰链放大机构的研制[J].机床与液压,2003(6):253-255.
[5]曲兴田,董景石.基于柔性铰链放大的压电叠堆泵[J].吉林大学学报,2008,38(3):552-556.
[6]Kojima Y,Okusawa T,Tsubouchi K.Fundamental investigation of a piezoelectric pump for a trace liquid feed[J].JSME International Journal:Series C,1995,38(3):531-537.
[7]Lobontiu N,Garcia E.Two-axis flexure hinges with axially collocated and symmetric notches[J].Computer&Structures,2003(1):1329-1341.
[8]Ryu J W,Gweon D G,Moon K S.Optimal design of a flexure hinge based XYθwafer stage[J].Precision Eng,1997,21:18-28.
[9]张远深,刘晓光.柔性铰链微位移放大机构的研究[J].甘肃科学学报,2011,23(2).
[2]崔新辉.柔性微传动机构的构型设计与分析研究[D].重庆:重庆大学,2012.
[3]Furukawa E,Mizuno M.Displacement amplification and reduction by means of linkage[J].Precision Engineering,1990,24:285-290.
[4]张明群.柔性铰链放大机构的研制[J].机床与液压,2003(6):253-255.
[5]曲兴田,董景石.基于柔性铰链放大的压电叠堆泵[J].吉林大学学报,2008,38(3):552-556.
[6]Kojima Y,Okusawa T,Tsubouchi K.Fundamental investigation of a piezoelectric pump for a trace liquid feed[J].JSME International Journal:Series C,1995,38(3):531-537.
[7]Lobontiu N,Garcia E.Two-axis flexure hinges with axially collocated and symmetric notches[J].Computer&Structures,2003(1):1329-1341.
[8]Ryu J W,Gweon D G,Moon K S.Optimal design of a flexure hinge based XYθwafer stage[J].Precision Eng,1997,21:18-28.
[9]张远深,刘晓光.柔性铰链微位移放大机构的研究[J].甘肃科学学报,2011,23(2).